摘要:
A direct-heated gas-flow measuring apparatus including a measuring tube disposed in the gas stream, a film resistor for generating heat and detecting the temperature thereof, and a feedback control circuit for controlling the heat generated by the film resistor so that the temperature of the film resistor is a predetermined value. Provided in a supporting portion of the film resistor for supporting it to the measuring tube is an aperture for throttling the heat transfer thereof.
摘要:
In a direct-heated flow measuring apparatus including a substrate having a film resistance pattern and a supporting member for supporting the substrate, the supporting member has good heat dissipation characteristics. Provided between the substrate and the supporting member is a heat transfer throttling portion.
摘要:
A direct-heated gas-flow measuring apparatus including a measuring tube disposed in the gas stream, a film resistor for generating heat and detecting the temperature thereof, and a feedback control circuit for controlling the heat generated by the film resistor so that the temperature of the film resistor is a predetermined value. Provided at least at the upstream side of the film resistor near thereto is a shield for reducing the accumulation of deposits on the film resistor. The shield and the film resistor have substantially the same thickness to satisfy the condition:l/t.ltoreq.50where l is a distance therebetween and t is a thickness thereof.
摘要:
In a direct-heated flow measuring apparatus including a substrate having a film resistance pattern and a supporting member for supporting the substrate, the supporting member has good heat dissipation characteristics. Provided between the substrate and the supporting member is a heat transfer throttling portion.
摘要:
A direct-heated gas-flow measuring apparatus for a passage including a plurality of film resistors, disposed within the passage, for generating heat and measuring the temperature thereof, and a feedback control circuit for controlling the heat generated by the film resistors so that the temperature of each of the film resistors is a predetermined value. The feedback control circuit generates a plurality of output signals corresponding to voltages applied to the film resistors. A mean value for the plurality of output signals is calculated as the amount of gas-flow rate.
摘要:
In a direct-heated flow measuring apparatus including a film resistor having a substrate supported by a supporting member in a passage, at least one face of the substrate on the upstream side thereof is sloped with respect to a fluid stream within the passage.
摘要:
In a direct-heated flow measuring apparatus including a film resistor having a substrate and a resistance layer thereon, the substrate is supported by a supporting member in a passage. Provided between the substrate and the supporting member is an adiabatic member for enhancing the adiabatic effect of the resistance layer. The substrate is adhered by adhesives having an excellent thermal conductivity coefficient to the adiabatic member, and the supporting member is also adhered by adhesives having an excellent thermal conductivity coefficient to the adiabatic member.
摘要:
A gas-flow measuring apparatus including a semiconductor chip and a sensing circuit. The semiconductor chip includes an electric heater and two temperature-detecting elements. One of the temperature-detecting elements is located closer to the heater than the other. The sensing circuit generates voltage in response to the flow rate of gas flowing through a gas passage.
摘要:
In a semiconductor-type flow rate detecting apparatus, a casing arranged in the fluid path includes first and second semiconductor chips. The first semiconductor chip has a first temperature detector. The second semiconductor chip arranged in proximity to the first semiconductor chip has a heater and a second temperature detector.
摘要:
A semiconductor type flow rate detecting apparatus having first and second control units arranged at upstream and downstream positions respectively in a flow stream to be measured and an operation circuit. The first control unit includes a first temperature detecting element and a first temperature control heater. The second control unit includes a second temperature detecting element, a second temperature control heater and a preliminary heater. The operation circuit controls the second and preliminary heaters and generates a signal indicative of flow rate. The operation circuit has a constant power consumption circuit to control heat from the preliminary heater to a constant level.