公开(公告)号：US5975098A

公开(公告)日：1999-11-02

申请号：US775712

申请日：1996-12-17

申请人： Mitsuaki Yoshitani ,  Kazuo Kinose ,  Satoru Tanaka ,  Kenya Morinishi ,  Masahiro Miyagi ,  Naoshige Itami ,  Kazuhiro Watanabe

发明人： Mitsuaki Yoshitani ,  Kazuo Kinose ,  Satoru Tanaka ,  Kenya Morinishi ,  Masahiro Miyagi ,  Naoshige Itami ,  Kazuhiro Watanabe

IPC分类号： B08B3/02 ,  B08B3/12 ,  G02F1/1333 ,  H01L21/00

CPC分类号： H01L21/67051 ,  B08B3/02 ,  B08B3/12 ,  B08B2203/0288 ,  G02F1/1333 ,  Y10S134/902

摘要： A substrate rinsing apparatus of a non-contact type having a high rinsing ability. An ultrasonic rinsing nozzle and a high-pressure rinsing nozzle are both disposed within the same rinsing apparatus. The ultrasonic rinsing nozzle ejects ultrasonic rinsing liquid as a curtain through a slit, while the high-pressure rinsing nozzle ejects a high-pressure rinsing jet toward the ultrasonic rinsing liquid which is ejected toward a substrate. Not only is foreign matter removed by ultrasonic rinsing, but foregoing matter is removed by the high-pressure rinsing jet and is carried away by a flow of the ultrasonic rinsing liquid and washed off the substrate toward a downstream side of rotation of the substrate.

摘要翻译： 具有高冲洗能力的非接触型衬底漂洗装置。 超声波清洗喷嘴和高压冲洗喷嘴均设置在同一冲洗装置内。 超声波冲洗喷嘴通过狭缝喷射超声波冲洗液体作为帘幕，同时高压冲洗喷嘴向朝向基板喷射的超声波冲洗液喷射高压冲洗喷嘴。 通过超声波冲洗除去异物，但是通过高压冲洗喷嘴除去上述物质，并且通过超声波冲洗液体的流动而被排出，从而将基板从基板的下游侧洗出。

公开(公告)号：US20060045966A1

公开(公告)日：2006-03-02

申请号：US11200189

申请日：2005-08-10

申请人： Satoshi Suzuki ,  Kazuo Kinose

发明人： Satoshi Suzuki ,  Kazuo Kinose

IPC分类号： B05D5/06

CPC分类号： G02B5/201 ,  G02B5/223 ,  G03F7/0007 ,  G03F7/2022 ,  H01L27/3211 ,  H01L27/3295 ,  H01L51/0005 ,  H01L51/0016 ,  H01L51/5284 ,  H01L51/56

摘要： A method is capable of easily forming a colored layer such as color filters or organic EL layers only in an active region on a transparent substrate for manufacturing a color liquid crystal display or an organic EL display unit. The method includes the steps of: forming a fine partition of a predetermined pattern using a light-blocking material in an active region on the surface of the transparent substrate, and depositing a light-blocking material into a non-active region; applying plural colors of coloring materials containing a colorant and a photosensitive resin into fine recesses separated by the fine partitions while relatively scanning a nozzle discharging a coloring material with respect to the transparent substrate; exposing the transparent substrate from back side to apply the plural colors and cure; and developing the surface side of the transparent substrate, dissolving the coloring materials applied into the non-active region and remaining not cured, and removing the materials.

摘要翻译： 一种方法能够仅在用于制造彩色液晶显示器或有机EL显示单元的透明基板上的有源区域中容易地形成诸如滤色器或有机EL层之类的着色层。 该方法包括以下步骤：在透明基板的表面上的有源区中使用遮光材料形成预定图案的精细分隔，并将遮光材料沉积到非活性区域中; 将含有着色剂和感光性树脂的着色材料的多种颜色应用于由细分隔物分隔开的细小凹部，同时相对于透明基板排出着色材料的喷嘴; 从背面暴露透明基材以施加多种颜色并固化; 并且使透明基材的表面侧显影，将施加到非活性区域中的着色材料溶解并保持未固化，并除去该材料。

公开(公告)号：US5915396A

公开(公告)日：1999-06-29

申请号：US881920

申请日：1997-06-25

申请人： Kazuo Kinose

发明人： Kazuo Kinose

IPC分类号： B65G49/07 ,  H01L21/677 ,  B08B3/02

CPC分类号： H01L21/67745 ,  H01L21/67184 ,  Y10S134/902

摘要： A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first transportation mechanism movable along a first transportation path in a predetermined transportation direction; a cassette load portion provided on one side of the transportation path; a plurality of unit portions arranged in a direction crossing the transportation direction on the other side of the first transportation path; and a second transportation mechanism disposed between each two adjacent unit portions and movable along a second transportation path in the transportation direction. The first transportation mechanism can perform a substrate transferring operation with respect to a cassette placed on the cassette load portion and a processing unit in a unit portion disposed in closest proximity to the first transportation path among the plurality of unit portions. The second transportation mechanism can perform a substrate transferring operation with respect to any processing units included in unit portions disposed on opposite sides of the second transportation path.

摘要翻译： 提供了一种基板处理装置，其需要减小的安装空间并且允许准备改变处理顺序。 一种基板处理装置，包括：沿预定的输送方向沿第一输送路径移动的第一输送机构; 设置在所述传送路径的一侧的盒装载部; 多个单元部，沿与第一输送路径另一侧的输送方向交叉的方向配置; 以及第二输送机构，其设置在两个相邻的单元部分之间，并且沿着输送方向沿着第二输送路径移动。 第一输送机构可以相对于放置在盒装载部分上的盒子和在多个单元部分中最靠近第一传送路径设置的单元部分中的处理单元执行基板传送操作。 第二输送机构可以相对于设置在第二输送路径的相对侧的单元部分中包含的任何处理单元执行基板转印操作。

公开(公告)号：US4949667A

公开(公告)日：1990-08-21

申请号：US339017

申请日：1989-04-14

申请人： Toshio Yoshida ,  Kenichi Nakamura ,  Yoshihisa Matsuda ,  Eiichiro Hayashi ,  Kazuo Kinose ,  Megumu Fukui

发明人： Toshio Yoshida ,  Kenichi Nakamura ,  Yoshihisa Matsuda ,  Eiichiro Hayashi ,  Kazuo Kinose ,  Megumu Fukui

IPC分类号： B05C1/08 ,  H05K3/00

CPC分类号： B05C1/086 ,  B05C1/0813 ,  B05C1/0834 ,  B05C1/0865 ,  H05K3/0091

摘要： A roll coating apparatus for applying a coating liquid having a high viscosity at a normal temperature, to a surface of a substrate, including a device for feeding the substrate, a coating roll rotatably provided in contact with the fed substrate, and a doctor for regulating the coating liquid adhering to the coating roll to a prescribed amount. Respective axial lines of the coating roll and the doctor are inclined with a prescribed angle with respect to the horizontal plane and a coating liquid supply device is provided at the highest position thereof. The coating liquid supplied at the highest end of the coating roll adheres to the surface of the coating roll. The quantity thereof is controlled by the doctor. The coating liquid flows downward on the surface of the coating roll due to its weight and rotation of the coating roll. Accordingly, the coating liquid on the surface of the coating roll is constantly renewed and no irregularities occur to the density of the liquid. The coating liquid is transferred from the coating roll, to form a film having a prescribed uniform thickness on the substrate. This roll coating apparatus may further include a device for heating parts of the apparatus or the substrate to lower the viscosity of the coating liquid. Thus, it becomes possible to form a film of a more uniform and regulated thickness easily.

摘要翻译： 一种用于将常温下具有高粘度的涂布液施加到基材表面的辊涂装置，包括用于供给基材的装置，可转动地设置成与所馈送的基底接触的涂布辊和用于调节 附着在涂布辊上的涂布液达到规定量。 涂布辊和刮刀的各轴线相对于水平面倾斜规定的角度，在其最高位置设置涂布液供给装置。 在涂布辊的最高端供给的涂布液附着在涂布辊的表面。 其数量由医生控制。 涂布液由于涂布辊的重量和旋转而在涂布辊的表面上向下流动。 因此，涂布辊表面上的涂布液不断更新，并且液体的密度不发生不规则。 涂布液从涂布辊转印，在基板上形成规定均匀厚度的膜。 该辊涂装置还可以包括用于加热装置的部件或基板以降低涂布液的粘度的装置。 因此，可以容易地形成更均匀和调节的厚度的膜。

公开(公告)号：US5755883A

公开(公告)日：1998-05-26

申请号：US621336

申请日：1996-03-25

申请人： Kazuo Kinose ,  Kazuto Ozaki ,  Tetsuo Azuma ,  Hideo Okada

发明人： Kazuo Kinose ,  Kazuto Ozaki ,  Tetsuo Azuma ,  Hideo Okada

IPC分类号： B05C1/08 ,  B05C1/02

CPC分类号： B05C1/0865 ,  B05C1/0813 ,  B05C1/0834

摘要： A roll coater for forming a film of uniform thickness on a substrate W includes a bottom plate 6 for transporting the substrate W in a predetermined direction F, a coating rubber roll 4 for transferring a coating liquid Q adhering to the outer circumferential face onto the substrate W, and an ink supplying device for supplying ink to the outer circumferential face of the roll 4. The ink supplying device includes a roll 1 for transferring the coating liquid Q adhering to the outer circumferential face thereof to the outer circumferential surface of a roll 4, metal doctor 2 for supplying a coated film of a coating liquid Q of uniform thickness, and a coating liquid reservoir 3 for storing coating liquid Q. A scraper 7 for scraping the remaining coating liquid Q on the outer circumferential face of the metal roll 1 is provided downstream of the roll 4 and upstream of the coating liquid reservoir 3.

摘要翻译： 用于在基板W上形成均匀厚度的膜的辊涂机包括用于沿预定方向F输送基板W的底板6，用于将附着在外周面上的涂布液体Q转印到基板上的涂布橡胶辊4 W和用于向辊4的外周面供墨的供墨装置。供墨装置包括辊1，用于将附着在其外周面上的涂布液Q转印到辊4的外周面上 用于供给厚度均匀的涂布液Q的涂膜的金属刮刀2以及用于储存涂布液Q的涂液储存器3.用于刮擦金属辊1的外周面上的剩余涂布液Q的刮刀7 设置在辊4的下游和涂覆液储存器3的上游。

公开(公告)号：US5631048A

公开(公告)日：1997-05-20

申请号：US397545

申请日：1995-02-28

申请人： Kazuo Kinose ,  Kazuto Ozaki ,  Tsuyoshi Okumura

发明人： Kazuo Kinose ,  Kazuto Ozaki ,  Tsuyoshi Okumura

IPC分类号： B05C1/02 ,  B05C1/08 ,  B05D1/28 ,  G03C1/74 ,  G03F7/16 ,  H01L21/027 ,  H01L21/30

CPC分类号： B05C1/0834 ,  B05D1/28

摘要： A method of forming a thin film on the surface of a substrate using a roll coater without forming a projection of the thin film near the rear edge of the substrate includes the steps of: loading a substrate on a stage, moving the stage in a predetermined direction up to a certain position where at least a portion of the surface of the substrate comes into contact with the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is a predetermined value, and further moving the stage in the predetermined direction to cancel the contact between the surface of the substrate and the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is relatively reduced. Until the stage reaches the certain position, a predetermined amount of coating liquid is supplied, and thereafter, a smaller amount of coating liquid is supplied to the surface of the substrate. For example, the transfer speed of the stage is increased while maintaining the rotation speed of the applicator roll at a constant level, or the rotating speed of the applicator roll is decreased while maintaining the transfer speed of the stage at a constant level.

摘要翻译： 使用辊涂机在基板的表面上形成薄膜的方法，而不在基板的后边缘附近形成薄膜的突起，包括以下步骤：将基板载置在载物台上，将载物台移动到预定的 方向一直到一定位置，其中衬底的表面的至少一部分与涂布辊接触，同时控制辊涂装置的操作，使得每单位面积从涂布辊转移到涂布辊的涂布液的量 基板表面是预定值，并且进一步在预定方向上移动台架以消除基板表面与涂布辊之间的接触，同时控制辊涂装置的操作，使得每单位面积转印的涂布液量 从涂布辊到基材表面相对减少。 直到阶段到达某一位置，供给预定量的涂布液，之后将更少量的涂布液供给到基板的表面。 例如，在保持涂布辊的转速保持恒定的水平的同时，增加载物台的传送速度，或者在使载物台的传送速度保持在一定水平的同时降低涂布辊的旋转速度。

公开(公告)号：US5782978A

公开(公告)日：1998-07-21

申请号：US876866

申请日：1997-06-16

申请人： Kazuo Kinose ,  Takeshi Yonezawa ,  Taimi Oketani ,  Tomoo Yamamoto

发明人： Kazuo Kinose ,  Takeshi Yonezawa ,  Taimi Oketani ,  Tomoo Yamamoto

IPC分类号： B05C11/08 ,  B05D1/00 ,  B05D1/40 ,  G03F7/16 ,  H01L21/00 ,  H01L21/027 ,  B05C5/00

CPC分类号： H01L21/6715 ,  B05C11/08 ,  B05D1/005 ,  G03F7/162

摘要： A fluid application apparatus of the present invention includes a rotatable substrate holding mechanism (4), a photoresist liquid supply portion (5) and a motor mechanism (26). The photoresist liquid supply portion (5) supplies resist fluid to a region smaller than the entire region of the substrate surface while moving in the horizontal direction relative to the substrate holding mechanism (4). The motor mechanism (26) rotates the substrate holding mechanism (4) to diffuse the resist fluid over the entire surface of the substrate and form a resist layer having a predetermined thickness.

摘要翻译： 本发明的流体涂布装置包括可旋转的基板保持机构（4），光致抗蚀剂液体供应部分（5）和马达机构（26）。 光致抗蚀剂液体供应部分（5）在相对于基板保持机构（4）在水平方向上移动的同时，向比基板表面的整个区域小的区域提供抵抗流体。 马达机构（26）使基板保持机构（4）旋转，以将抗蚀剂流体扩散到基板的整个表面上，并形成具有预定厚度的抗蚀剂层。

公开(公告)号：US5028457A

公开(公告)日：1991-07-02

申请号：US565885

申请日：1990-08-09

申请人： Kazuo Kinose ,  Masato Tanaka

发明人： Kazuo Kinose ,  Masato Tanaka

IPC分类号： G03F7/16 ,  B05C1/02 ,  B05C1/08 ,  B05D1/28 ,  H01L21/027 ,  H01L27/12 ,  H05K3/06 ,  B05D1/36 ,  B05C1/12

CPC分类号： B05C1/0865 ,  B05C1/0834 ,  B05D1/28

摘要： An improved roll coating apparatus and method includes a coating roll having a smooth surface for applying a resist, a doctor roll having grooves on its surface for supplying prescribed amount of the resist to the coating roll, and a back up roll which is in contact with the coating roll for conveying a substrate on which the resist is applied to a prescribed direction. Even if there are minute concave portions on the surface of the substrate, the resist is forced to fill the minute concave portions, since the resist is pressed and forced to be applied on the substrate by the coating roll having smooth surface and the back up roll.

摘要翻译： 一种改进的辊涂设备和方法包括：具有用于施加抗蚀剂的光滑表面的涂布辊，在其表面上具有用于向涂布辊供应规定量的抗蚀剂的凹槽的刮墨辊以及与涂布辊接触的支撑辊 用于将其上施加有抗蚀剂的基板输送到规定方向的涂布辊。 即使在基板的表面上存在微小的凹部，由于抗蚀剂被压制并且通过具有平滑表面的涂布辊和背面辊被迫施加在基板上，所以抗蚀剂被迫填充微小凹部 。