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公开(公告)号：US07973282B2
公开(公告)日：2011-07-05
申请号：US11723457
申请日：2007-03-20
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US08030614B2
公开(公告)日：2011-10-04
申请号：US12549828
申请日：2009-08-28
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
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公开(公告)号：US20080100832A1
公开(公告)日：2008-05-01
申请号：US11723457
申请日：2007-03-20
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US07214936B2
公开(公告)日：2007-05-08
申请号：US11242129
申请日：2005-10-04
IPC分类号： H01J37/21
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US20060071166A1
公开(公告)日：2006-04-06
申请号：US11242129
申请日：2005-10-04
IPC分类号： G21K7/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US20090314938A1
公开(公告)日：2009-12-24
申请号：US12549828
申请日：2009-08-28
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US10407317B2
公开(公告)日：2019-09-10
申请号：US13979709
申请日：2012-01-18
申请人： Atsushi Miyata , Yoshihiko Nakayama
发明人： Atsushi Miyata , Yoshihiko Nakayama
摘要： The filtration system of the present invention comprises first and second filtration tanks. The first filtration tank has a first floating filter media layer, a first upper screen with a first aperture ratio, a first inlet, a first backwash water supply source, and a first backwash water outlet means. The second filtration tank has a second floating filter media layer, a second upper screen with a second aperture ratio, a second inlet, an inflow blocking mechanism capable of blocking inflow of water to be treated through the second inlet, a second backwash water supply source, and a second backwash water outlet means. The first aperture ratio is smaller than the second aperture ratio.
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公开(公告)号：US20130299409A1
公开(公告)日：2013-11-14
申请号：US13979709
申请日：2012-01-18
申请人： Atsushi Miyata , Yoshihiko Nakayama
发明人： Atsushi Miyata , Yoshihiko Nakayama
IPC分类号： C02F1/24
CPC分类号： C02F1/24 , B01D24/002 , B01D24/007 , B01D24/165 , B01D24/26 , B01D24/263 , B01D24/28 , B01D24/4631 , B01D35/05 , C02F1/004 , C02F2201/005
摘要： The filtration system of the present invention comprises first and second filtration tanks. The first filtration tank has a first floating filter media layer, a first upper screen with a first aperture ratio, a first inlet, a first backwash water supply source, and a first backwash water outlet means. The second filtration tank has a second floating filter media layer, a second upper screen with a second aperture ratio, a second inlet, an inflow blocking mechanism capable of blocking inflow of water to be treated through the second inlet, a second backwash water supply source, and a second backwash water outlet means. The first aperture ratio is smaller than the second aperture ratio.
摘要翻译： 本发明的过滤系统包括第一和第二过滤罐。 第一过滤槽具有第一浮动过滤介质层，具有第一孔径比的第一上筛网，第一入口，第一反洗水供应源和第一回洗水出口装置。 第二过滤槽具有第二浮动过滤器介质层，具有第二孔径比的第二上筛网，第二入口，能够阻止通过第二入口进行待处理的水的流入的流入阻塞机构，第二反洗水供应源 ，以及第二反冲洗水出口装置。 第一开口率小于第二开口率。
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公开(公告)号：US20080197282A1
公开(公告)日：2008-08-21
申请号：US12031754
申请日：2008-02-15
申请人： Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
发明人： Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
IPC分类号： G01N23/00
CPC分类号： H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/24455 , H01J2237/24475 , H01J2237/2804
摘要： There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed.A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam. Thereby, a charged particles beam of a bright-field image passes through the opening of the charged particle detector for a dark-field image, and is detected by the charged particle detector for a bright-field image.
摘要翻译： 提供了一种扫描透射带电粒子束装置，通过该扫描透射带电粒子束装置可以清晰地分离亮场图像的带电粒子和暗场图像的带电粒子，并且可以获得高精度的亮场图像和暗视场图像 即使在样品上的带电粒子束的扫描范围发生变化的状态。 在样品下方设置偏转线圈，并且在偏转线圈的下方设置用于具有开口的暗场图像的带电粒子检测器。 在上述开口的下方设置用于明场图像的带电粒子检测器。 通过样品下方的偏转线圈，用于亮场图像的带电粒子束被配置为与粒子束的扫描同步，并且在与粒子束的偏转方向相反的方向上偏转。 因此，亮场图像的带电粒子束通过带电粒子检测器的开口进行暗场图像，并且由带电粒子检测器检测到用于亮场图像。
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公开(公告)号：US08106990B2
公开(公告)日：2012-01-31
申请号：US12277793
申请日：2008-11-25
申请人： Takenori Ueda , Yoshihiko Nakayama , Tetsuro Kato , Naoko Kajima
发明人： Takenori Ueda , Yoshihiko Nakayama , Tetsuro Kato , Naoko Kajima
IPC分类号： H04N5/222
CPC分类号： G03B21/10 , H04N1/0035 , H04N1/00437 , H04N5/23293
摘要： In response to a power-on of a main switch, a composite image comprising a menu image including multiple command icons for device settings, and a source image from a currently set image input source as a background image, is displayed on an internal monitor of an imaging device. The user can thus select desired command icons for device settings among the multiple command icons in the menu image, while visually checking the background source image. Only the source image without the menu image is displayed on an external display device, which is used for a presentation given to the audience. This arrangement desirably improves the usability of the imaging device, while preventing the display of the menu image on the external display device from damaging the effect of the presentation given to the audience.
摘要翻译： 响应于主开关的通电，包括包括用于设备设置的多个命令图标的菜单图像和来自当前设置的图像输入源的源图像作为背景图像的合成图像被显示在内部监视器 成像装置。 因此，用户可以在目视检查背景源图像的同时，在菜单图像中的多个命令图标之间选择用于设备设置的期望的命令图标。 只有没有菜单图像的源图像显示在外部显示设备上，用于向观众呈现的演示。 这种布置理想地提高了成像装置的可用性，同时防止了外部显示装置上的菜单图像的显示损害了给观众的呈现效果。
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