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公开(公告)号：US20060071166A1
公开(公告)日：2006-04-06
申请号：US11242129
申请日：2005-10-04
IPC分类号： G21K7/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US08030614B2
公开(公告)日：2011-10-04
申请号：US12549828
申请日：2009-08-28
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
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公开(公告)号：US07449926B2
公开(公告)日：2008-11-11
申请号：US11443110
申请日：2006-05-31
IPC分类号： H03L7/00
摘要： A reset signal generation circuit for generating a reset signal synchronously or asynchronously to a clock signal in accordance with an operation state. An operation detection circuit detects operation of a CPU and generates an operation detection signal. A signal control circuit generates a first reset signal synchronously or asynchronously to an internal clock signal based on the operation detection signal and a system reset signal. The first reset signal is provided to synchronous circuits including the CPU.
摘要翻译： 一种复位信号产生电路，用于根据操作状态产生与时钟信号同步或异步的复位信号。 操作检测电路检测CPU的操作并产生操作检测信号。 信号控制电路基于操作检测信号和系统复位信号，产生与内部时钟信号同步或异步的第一复位信号。 第一复位信号被提供给包括CPU的同步电路。
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公开(公告)号：US20080100832A1
公开(公告)日：2008-05-01
申请号：US11723457
申请日：2007-03-20
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US20070170960A1
公开(公告)日：2007-07-26
申请号：US11443110
申请日：2006-05-31
IPC分类号： H03L7/00
摘要： A reset signal generation circuit for generating a reset signal synchronously or asynchronously to a clock signal in accordance with an operation state. An operation detection circuit detects operation of a CPU and generates an operation detection signal. A signal control circuit generates a first reset signal synchronously or asynchronously to an internal clock signal based on the operation detection signal and a system reset signal. The first reset signal is provided to synchronous circuits including the CPU.
摘要翻译： 一种复位信号产生电路，用于根据操作状态产生与时钟信号同步或异步的复位信号。 操作检测电路检测CPU的操作并产生操作检测信号。 信号控制电路基于操作检测信号和系统复位信号，产生与内部时钟信号同步或异步的第一复位信号。 第一复位信号被提供给包括CPU的同步电路。
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公开(公告)号：US07214936B2
公开(公告)日：2007-05-08
申请号：US11242129
申请日：2005-10-04
IPC分类号： H01J37/21
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US6043490A
公开(公告)日：2000-03-28
申请号：US12757
申请日：1998-01-23
申请人： Katsuhiko Sakai
发明人： Katsuhiko Sakai
IPC分类号： H01J37/20 , H01J37/02 , H01J37/147 , G06K9/40 , H01J37/28
CPC分类号： H01J37/02 , H01J2237/0216
摘要： Mechanical vibration detecting sensors and a sound wave sensor are provided in a column, and mechanical vibration detecting sensors, a sound wave sensor and electromagnetic wave detecting antennas are provided in a sample stage side. Outputs of the sensors and the antennas are processed by signal processing circuits and correction signals generated by these signal processing circuits are added to X-direction and Y-direction scanning signals from signal generating circuits.
摘要翻译： 在列中设置机械振动检测传感器和声波传感器，在样本台侧设置机械振动检测传感器，声波传感器和电磁波检测天线。 传感器和天线的输出由信号处理电路处理，由这些信号处理电路生成的校正信号被加到来自信号发生电路的X方向和Y方向的扫描信号上。
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公开(公告)号：US5126571A
公开(公告)日：1992-06-30
申请号：US627854
申请日：1990-12-14
申请人： Katsuhiko Sakai
发明人： Katsuhiko Sakai
IPC分类号： H01J37/20 , H01J37/317 , H01L21/00 , H01L21/265 , H01L21/302
CPC分类号： H01L21/67103 , H01J37/3171 , H01J2237/2001
摘要： A semiconductor manufacturing apparatus for manufacturing a semiconductor device by treating a semiconductor wafer, comprising a vacuum implanting room, a wafer holder for installing the semiconductor wafer in the implanting room, nozzles provided in the wafer holder for evaporating a liquid refrigerant, and a compressor for supplying the liquid refrigerant to the nozzles through wall of the implanting room. As the refrigerant is compressed into the nozzles in a liquid state and evaporated in the vacuum implanting room, the semiconductor manufacturing apparatus is neither frozen nor frosted by the moisture in the ambient air.
摘要翻译： 一种用于通过处理半导体晶片制造半导体器件的半导体制造装置，该半导体晶片包括真空注入室，用于将半导体晶片安装在植入室中的晶片保持器，用于蒸发液体制冷剂的晶片保持器中设置的喷嘴，以及用于 通过植入室的壁将液体制冷剂供应到喷嘴。 当制冷剂以液态压缩到喷嘴中并在真空注入室中蒸发时，半导体制造装置既不被环境空气中的水分冻结也不会磨损。
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公开(公告)号：US20090314938A1
公开(公告)日：2009-12-24
申请号：US12549828
申请日：2009-08-28
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.
摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。
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公开(公告)号：US06252351B1
公开(公告)日：2001-06-26
申请号：US09219303
申请日：1998-12-23
申请人： Genta Koizumi , Katsuhiko Sakai , Hiroshi Mabuchi , Mitsuru Yamazaki , Seiichi Kurihara , Yuji Abe
发明人： Genta Koizumi , Katsuhiko Sakai , Hiroshi Mabuchi , Mitsuru Yamazaki , Seiichi Kurihara , Yuji Abe
IPC分类号： H01J162
CPC分类号： H01L33/38 , B41J2/45 , H01L27/153 , H01L33/20 , H01L33/44
摘要： A contact layer having a low resistance in an LED is extended from an inside edge of a light take-out region in a light emitting dot to a central position thereof, whereby an input current in the light take-out region expands, while an electrode is extended from an inside edge of the light take-out region to the center of the light take-out region so as to shape like substantially a letter T with a length which is not over the center, whereby increase in an electrode covering ratio in the light take-out region can be suppressed. As a result, a uniform light output in the light take-out region can be attained, so that a light output can be remarkably improved. When electrodes in the light take-out regions in adjacent light emitting dots are staggered relative to the direction perpendicular to an aligned direction of the light take-out region (a reference straight line), the light take-out regions are arranged horizontally in substantially a straight line, so that a light emitting pattern in the aligned direction of the light take-out regions are not so staggered. Thus, an LED array having a high output and a uniform distribution of light intensity is provided.
摘要翻译： 在LED中具有低电阻的接触层从发光点的光取出区域的内边缘延伸到其中心位置，由此光取出区域中的输入电流膨胀，而电极 从光取出区域的内边缘延伸到光取出区域的中心，以便形成为长度不在中心的大致字母T，从而增加电极覆盖率 可以抑制光取出区域。 结果，可以获得在光取出区域中均匀的光输出，从而可以显着提高光输出。 当相邻发光点的光取出区域中的电极相对于与光取出区域（参考直线）的排列方向垂直的方向交错时，光取出区域基本上水平布置 直线，使得在光取出区域的排列方向上的发光图案不是错开的。 因此，提供具有高输出和均匀光强分布的LED阵列。
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