公开(公告)号：US07901045B2

公开(公告)日：2011-03-08

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  H01L23/488

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US20080180487A1

公开(公告)日：2008-07-31

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  G11B5/127

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US08366950B2

公开(公告)日：2013-02-05

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： G01D15/00

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US20090065474A1

公开(公告)日：2009-03-12

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： B41J2/16

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US07727411B2

公开(公告)日：2010-06-01

申请号：US11681411

申请日：2007-03-02

申请人： Jun Yamamuro ,  Shuji Koyama ,  Kenji Ono ,  Toshiyasu Sakai

发明人： Jun Yamamuro ,  Shuji Koyama ,  Kenji Ono ,  Toshiyasu Sakai

IPC分类号： B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/14145 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： The present invention provides a manufacturing method of a substrate for an ink jet head including forming an ink supply opening to a silicon substrate, including (a) forming, at the back surface of the silicon substrate, an etching mask layer, which has an opening that is asymmetric with a center line, extending in the longitudinal direction, of an area on the surface of the silicon substrate where the ink supply opening is to be formed; (b) forming a non-through hole on the silicon substrate via the opening on the etching mask layer; and (c) forming the ink supply opening by performing a crystal anisotropic etching to the silicon substrate from the opening.

摘要翻译： 本发明提供一种喷墨头用基板的制造方法，其特征在于，包括：（a）在所述硅基板的背面形成有具有开口部的蚀刻掩模层 在硅基板的要形成供墨口的表面上的区域的沿长度方向延伸的中心线是不对称的; （b）通过蚀刻掩模层上的开口在硅衬底上形成非通孔; 和（c）通过从开口对硅衬底进行结晶各向异性蚀刻来形成供墨口。

公开(公告)号：US07681993B2

公开(公告)日：2010-03-23

申请号：US11203129

申请日：2005-08-15

申请人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ejecting ink as they are energized. This circuit board is so constructed as to reduce wire resistances for the heaters while at the same time preventing an increase in the size of the board and realizing a high-density integration of the heaters required for high resolution printing. This construction is made possible by forming electrode wires of first and second electrode wire layers to reduce an area that the wire patterns for the heater occupy on the circuit board. In reducing the effective thickness of protective insulation layer formed on the heater to prevent a possible degradation of thermal efficiency, one of the protective insulation layers over the electrode wires is removed from the heater, depending on the thickness of the electrode wires.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器以产生用于在通电时喷射墨水的热能。 该电路板被构造成降低加热器的导线电阻，同时防止板的尺寸增加，并实现高分辨率印刷所需的加热器的高密度集成。 通过形成第一电极线层和第二电极线层的电极线，能够减小加热器的电线图案在电路基板上的占有面积。 在减小加热器上形成的保护绝缘层的有效厚度以防止热效率可能降低的情况下，根据电极线的厚度，从加热器上除去电极线上的保护绝缘层之一。

公开(公告)号：US07669981B2

公开(公告)日：2010-03-02

申请号：US12407012

申请日：2009-03-19

申请人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

发明人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

IPC分类号： B41J2/05

CPC分类号： B41J2/14 ,  B41J2202/17 ,  Y10T29/49401

摘要： An ink jet print head substrate capable of precisely blowing fuse element to store data reliably is provided. An ink jet print head incorporating such a substrate and an ink jet printing apparatus are also provided. The interlayer insulating film formed over the fuse element is made of a material that has a lower melting point than the material of the fuse element and which forms a cavity therein by heat produced when the fuse elements is blown.

摘要翻译： 提供一种能够精确地熔断熔丝元件以可靠地存储数据的喷墨打印头基板。 还提供了一种并入这种基板的喷墨打印头和喷墨打印设备。 形成在保险丝元件上方的层间绝缘膜由具有比熔丝元件的材料低的熔点并且当熔丝元件被吹制时产生的热量在其中形成空腔的材料制成。

公开(公告)号：US07641316B2

公开(公告)日：2010-01-05

申请号：US11203130

申请日：2005-08-15

申请人： Toshiyasu Sakai ,  Teruo Ozaki ,  Kenji Ono ,  Ichiro Saito ,  Sakai Yokoyama ,  Satoshi Ibe ,  Kazuaki Shibata

发明人： Toshiyasu Sakai ,  Teruo Ozaki ,  Kenji Ono ,  Ichiro Saito ,  Sakai Yokoyama ,  Satoshi Ibe ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1646

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board reduces areas of the heaters to achieve higher printing resolution and image quality. This board also prevents a degradation of thermal energy efficiency and reduces power consumption. The protective insulation layer for the electrode wire layer is formed of two layers and one of the two layers is removed from above the heater to improve the heat energy efficiency. The resistor layer is deposited over the electrode wire layer. The patterning for removing the protective insulation layer is done in a wider range than a gap of the electrode wire layer, the gap being used to form the heater. Further, by forming the electrode wires in two layers, a possible reduction in an effective bubble generation area of the heater can be prevented.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器，以便在通电时产生用于喷墨的热能。 该电路板减少了加热器的面积，以实现更高的打印分辨率和图像质量。 该板还可防止热能效率的降低并降低功耗。 用于电极线层的保护绝缘层由两层形成，并且从加热器上方移除两层中的一层以提高热能效率。 电阻层沉积在电极丝层上。 用于去除保护绝缘层的图案在比电极丝层的间隙更宽的范围内进行，该间隙用于形成加热器。 此外，通过将电极线形成为两层，可以防止加热器的有效气泡产生面积的降低。

公开(公告)号：US20060098053A1

公开(公告)日：2006-05-11

申请号：US11264160

申请日：2005-11-02

申请人： Ichiro Saito ,  Toshiyasu Sakai ,  Teruo Ozaki ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata

发明人： Ichiro Saito ,  Toshiyasu Sakai ,  Teruo Ozaki ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H05K1/167

摘要： In an ink jet head circuit board including a heater for generating thermal energy used for ejecting ink in response to application of electricity, a drop in thermal energy efficiency is prevented while reducing an area of the heater to achieve higher-resolution and higher-image-quality printing, and damages on the heater attributable to a manufacturing process are avoided. To achieve this, a resistor layer is disposed on an electrode wire layer; and two protective layers are disposed thereon. Then the upper protective layer is removed in a site above the heater. Accordingly, it is possible to dispose the protective layers without causing a decrease in an effective bubble generating region, and to improve thermal energy efficiency by reducing the effective thickness of the protective layer above the heater. Moreover, the resistor layer is covered with the first protective layer and is thereby prevented from adverse effects in the manufacturing process such as etching processes.

公开(公告)号：US20060033779A1

公开(公告)日：2006-02-16

申请号：US11202079

申请日：2005-08-12

申请人： Kazuaki Shibata ,  Sakai Yokoyama ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Toshiyasu Sakai

发明人： Kazuaki Shibata ,  Sakai Yokoyama ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Toshiyasu Sakai

IPC分类号： B41J2/04 ,  B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection. This board has the heaters formed with high precision to reduce their areas. It has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. Over the first electrodes the second electrodes made of aluminum are formed. The second electrodes are deposited with a resistor layer. The heater is formed in the gap between the first electrodes. With this construction, the heaters are formed without large dimensional variations among them. Should a defect occur in a protective layer above or near the heaters, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

摘要翻译： 提供一种喷墨头电路板，其具有用于产生用于喷墨的热能的加热器。 该板具有高精度形成的加热器，以减少其面积。 它具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 在第一电极上形成由铝制成的第二电极。 第二电极沉积有电阻层。 加热器形成在第一电极之间的间隙中。 利用这种结构，在它们之间形成没有大尺寸变化的加热器。 如果在加热器上方或附近的保护层中发生缺陷，则可以有效地防止腐蚀进行，因为电阻层的材料比铝更耐侵蚀，并且第一电极具有耐腐蚀性。