公开(公告)号：US07901045B2

公开(公告)日：2011-03-08

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  H01L23/488

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US20080180487A1

公开(公告)日：2008-07-31

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  G11B5/127

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US08366950B2

公开(公告)日：2013-02-05

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： G01D15/00

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US20090065474A1

公开(公告)日：2009-03-12

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： B41J2/16

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US08163187B2

公开(公告)日：2012-04-24

申请号：US12478602

申请日：2009-06-04

申请人： Hiroyuki Abo ,  Masaki Ohsumi ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Mitsuru Chida ,  Kazuya Abe

发明人： Hiroyuki Abo ,  Masaki Ohsumi ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Mitsuru Chida ,  Kazuya Abe

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645

摘要： Provided is a process of producing a liquid discharge head having a substrate, a passage-forming member, and a patterned layer. The process includes providing a resin layer on a substrate; providing a resist pattern on the resin layer for patterning the resin layer; forming a patterned layer by patterning the resin layer using the resist pattern as a mask; providing a layer for forming a passage pattern having a shape of passage on the resist pattern lying on the patterned layer; forming a passage pattern by patterning the layer for forming a passage pattern; removing the resist pattern; providing a passage-forming member so as to cover the passage pattern and the patterned layer; and removing the passage pattern to give the passage.

摘要翻译： 提供了一种制造具有基板，通道形成部件和图案化层的排液头的方法。 该方法包括在基底上提供树脂层; 在树脂层上提供抗蚀剂图案，用于图案化树脂层; 通过使用抗蚀剂图案作为掩模对树脂层进行图案化来形成图案层; 提供用于在位于图案化层上的抗蚀剂图案上形成具有通道形状的通道图案的层; 通过图案化形成通道图案的层来形成通道图案; 去除抗蚀剂图案; 提供通道形成构件以覆盖通道图案和图案层; 并且去除通道图案以给出通道。

公开(公告)号：US20090302502A1

公开(公告)日：2009-12-10

申请号：US12478602

申请日：2009-06-04

申请人： Hiroyuki Abo ,  Masaki Ohsumi ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Mitsuru Chida ,  Kazuya Abe

发明人： Hiroyuki Abo ,  Masaki Ohsumi ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Mitsuru Chida ,  Kazuya Abe

IPC分类号： B29C67/00

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645

摘要： Provided is a process of producing a liquid discharge head having a substrate, a passage-forming member, and a patterned layer. The process includes providing a resin layer on a substrate; providing a resist pattern on the resin layer for patterning the resin layer; forming a patterned layer by patterning the resin layer using the resist pattern as a mask; providing a layer for forming a passage pattern having a shape of passage on the resist pattern lying on the patterned layer; forming a passage pattern by patterning the layer for forming a passage pattern; removing the resist pattern; providing a passage-forming member so as to cover the passage pattern and the patterned layer; and removing the passage pattern to give the passage.

摘要翻译： 提供了一种制造具有基板，通道形成部件和图案化层的排液头的方法。 该方法包括在基底上提供树脂层; 在树脂层上提供抗蚀剂图案，用于图案化树脂层; 通过使用抗蚀剂图案作为掩模对树脂层进行图案化来形成图案层; 提供用于在位于图案化层上的抗蚀剂图案上形成具有通道形状的通道图案的层; 通过图案化形成通道图案的层来形成通道图案; 去除抗蚀剂图案; 提供通道形成构件以覆盖通道图案和图案层; 并且去除通道图案以给出通道。

公开(公告)号：US07891784B2

公开(公告)日：2011-02-22

申请号：US12019505

申请日：2008-01-24

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/045

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US20110107598A1

公开(公告)日：2011-05-12

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US20080180486A1

公开(公告)日：2008-07-31

申请号：US12019505

申请日：2008-01-24

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/14 ,  B23P17/00

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US08128204B2

公开(公告)日：2012-03-06

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/05 ,  B41J2/04 ,  G11B5/127 ,  B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。