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    Programmable mask for fabricating biomolecule array or polymer array, apparatus for fabricating biomolecule array or polymer array including the programmable mask, and method of fabricating biomolecule array or polymer array using the programmable mask
    3.
    发明申请
    Programmable mask for fabricating biomolecule array or polymer array, apparatus for fabricating biomolecule array or polymer array including the programmable mask, and method of fabricating biomolecule array or polymer array using the programmable mask 失效
    用于制造生物分子阵列或聚合物阵列的可编程掩模，用于制造包括可编程掩模的生物分子阵列或聚合物阵列的装置，以及使用可编程掩模制造生物分子阵列或聚合物阵列的方法

    公开(公告)号：US20070134831A1

    公开(公告)日：2007-06-14

    申请号：US11634408

    申请日：2006-12-06

    申请人： Moon Jung ,  Dong Shin ,  Se Park ,  Hyeon Pyo ,  Chi Jun

    发明人： Moon Jung ,  Dong Shin ,  Se Park ,  Hyeon Pyo ,  Chi Jun

    IPC分类号： H01L21/00

    CPC分类号： G03F7/70291 ,  B01J19/0046 ,  B01J2219/00286 ,  B01J2219/00434 ,  B01J2219/00448 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/0072 ,  B01J2219/00722 ,  B82Y30/00 ,  G03F7/70275

    摘要： Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, and a method of fabricating a biomolecule or polymer array using the programmable mask. The programmable mask for fabricating a biomolecule array or polymer array includes a first substrate including a black matrix having openings and first pixel electrodes; a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors; a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light; a first polarizing plate laminated on one side of the first substrate; a second polarizing plate laminated on one side of the second substrate; and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions.

    摘要翻译： 提供了一种用于及时制造具有高密度的生物分子或聚合物阵列的可编程掩模，用于制造包括掩模的生物分子或聚合物阵列的装置，以及使用可编程掩模制造生物分子或聚合物阵列的方法。 用于制造生物分子阵列或聚合物阵列的可编程掩模包括包括具有开口的黑矩阵的第一基底和第一像素电极; 第二基板，包括用于根据施加的电信号切换对应于开口的像素区域的薄膜晶体管和连接到薄膜晶体管的漏极的第二像素电极; 介于所述第一基板和所述第二基板之间的液晶层，所述液晶层包括可根据所述薄膜晶体管的电信号而配置的液晶，以选择性地透射光; 层叠在第一基板的一侧的第一偏振片; 层叠在所述第二基板的一侧的第二偏振片; 以及层叠在第二偏振片的一侧上的透镜阵列层，其包括对应于像素区域的透镜。

    Wavelength tunable optical filter
    4.
    发明申请
    Wavelength tunable optical filter 失效
    波长可调滤光片

    公开(公告)号：US20050135736A1

    公开(公告)日：2005-06-23

    申请号：US10923838

    申请日：2004-08-24

    申请人： Chang Kim ,  Myung Lee ,  Chi Jun ,  Chang Choi ,  Yun Kim

    发明人： Chang Kim ,  Myung Lee ,  Chi Jun ,  Chang Choi ,  Yun Kim

    IPC分类号： G02B6/12 ,  G02B6/34 ,  G02B26/00 ,  G02B6/28

    CPC分类号： G02B26/001 ,  G02B2006/12109

    摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

    摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

    Thermally actuated wavelength tunable optical filter
    5.
    发明申请
    Thermally actuated wavelength tunable optical filter 失效
    热致振动波长可调滤光片

    公开(公告)号：US20050105849A1

    公开(公告)日：2005-05-19

    申请号：US10819271

    申请日：2004-04-07

    申请人： Chang Kim ,  Myung Lee ,  Chang Choi ,  Chi Jun ,  Yun Kim

    发明人： Chang Kim ,  Myung Lee ,  Chang Choi ,  Chi Jun ,  Yun Kim

    IPC分类号： G02B26/00 ,  G02B6/34 ,  G02B6/26 ,  G02B6/32 ,  G02B6/42

    CPC分类号： G02B6/29358 ,  G02B6/29395

    摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.

    摘要翻译： 提供了微机电系统（MEMS）的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤​​或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在 至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。 此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。 由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

    Tunable-wavelength optical filter and method of manufacturing the same
    7.
    发明申请
    Tunable-wavelength optical filter and method of manufacturing the same 有权
    可调谐波长光学滤波器及其制造方法

    公开(公告)号：US20050157392A1

    公开(公告)日：2005-07-21

    申请号：US11045554

    申请日：2005-01-27

    申请人： Chang Choi ,  Myung Lee ,  Chang Kim ,  Chi Jun ,  Youn Kim

    发明人： Chang Choi ,  Myung Lee ,  Chang Kim ,  Chi Jun ,  Youn Kim

    IPC分类号： G02B5/20 ,  G02B1/10 ,  G02B5/08 ,  G02B26/00 ,  H01S3/10

    CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

    摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

    摘要翻译： 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以有选择地发射透射光相对于入射光的波长。

    Tunable-wavelength optical filter and method of manufacturing the same
    8.
    发明申请
    Tunable-wavelength optical filter and method of manufacturing the same 有权

    公开(公告)号：US20060285209A1

    公开(公告)日：2006-12-21

    申请号：US11508017

    申请日：2006-08-21

    申请人： Chang Choi ,  Myung Lee ,  Chang Kim ,  Chi Jun ,  Youn Kim

    发明人： Chang Choi ,  Myung Lee ,  Chang Kim ,  Chi Jun ,  Youn Kim

    IPC分类号： G02B27/00

    CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

    摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.

    Variable optical attenuator with tunable wavelength selectivity
    10.
    发明申请
    Variable optical attenuator with tunable wavelength selectivity 审中-公开
    具有可调波长选择性的可变光衰减器

    公开(公告)号：US20050191025A1

    公开(公告)日：2005-09-01

    申请号：US11118473

    申请日：2005-05-02

    申请人： Chang-Kyu Kim ,  Myung Lee ,  Chi Jun ,  Chang Choi ,  Youn Kim

    发明人： Chang-Kyu Kim ,  Myung Lee ,  Chi Jun ,  Chang Choi ,  Youn Kim

    IPC分类号： G02B26/02 ,  G02B6/26 ,  G02B6/34 ,  G02B6/35 ,  G02B6/00

    CPC分类号： G02B6/352 ,  G02B6/266 ,  G02B6/29358 ,  G02B6/29389 ,  G02B6/29395 ,  G02B6/3514 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3594

    摘要： A variable optical attenuator with tunable wavelength selectivity includes at least two reflectors disposed parallel to each other at a predetermined angle from an optic axis and driving units connected to said at least two reflectors for allowing the reflectors to move back and forth in a direction perpendicular or parallel to the optic axis or to revolve centering on an axis perpendicular or parallel to the optic axis. Since the variable optical attenuator of the present invention serves as a variable optical attenuator and, at the same time, as a tunable wavelength filter, problems of insertion loss and optical alignment that might be caused by separately installing a variable optical attenuator and a wavelength filter can be effectively prevented. Moreover, by implementing the variable optical attenuator and the tunable wavelength filter by using a single device, the size of a system using the optical attenuator can be reduced.

    摘要翻译： 具有可调波长选择性的可变光衰减器包括至少两个反射器，所述至少两个反射器以与光轴成预定角度彼此平行设置，以及连接到所述至少两个反射器的驱动单元，用于允许反射器在垂直或垂直方向上前后移动， 平行于光轴或者以垂直于或平行于光轴的轴为中心旋转。 由于本发明的可变光衰减器用作可变光衰减器，同时作为可调谐波长滤波器，可能由单独安装可变光衰减器和波长滤波器引起的插入损耗和光对准问题 可以有效地防止。 此外，通过使用单个器件实现可变光衰减器和可调波长滤波器，可以减小使用光衰减器的系统的尺寸。