公开(公告)号：US07908993B2

公开(公告)日：2011-03-22

申请号：US11466665

申请日：2006-08-23

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B05C15/00

CPC分类号： B05D1/02 ,  C23C24/04 ,  H01L41/314

摘要： A film forming apparatus including a film forming chamber which forms a film, a jetting mechanism which jets aerosol containing material particles onto a substrate in the film forming chamber, a measuring chamber communicating with the film forming chamber, a measuring mechanism which measures a thickness of the film in the measuring chamber, a pressure adjusting mechanism which controls an internal pressure of the film forming chamber and the measuring chamber, a conveyor which transports the substrate between the film forming chamber and the measuring chamber, and a blocking section which blocks a communication between the film forming chamber and the measuring chamber. Accordingly, inside of the measuring chamber is maintained clean without being polluted with the aerosol, and the measurement precision can be maintained. In the film forming process, the film thickness can be easily and precisely measured, and fed back to the film forming condition.

摘要翻译： 一种成膜装置，包括：成膜室，其形成膜;喷射机构，其将含有材料颗粒的气溶胶喷射到成膜室中的基板上;测量室，与成膜室连通;测量机构， 测量室中的膜，控制成膜室和测量室的内部压力的压力调节机构，在成膜室和测量室之间输送基板的输送器和阻挡通信的阻挡部分 在成膜室和测量室之间。 因此，测量室的内部保持清洁而不被气溶胶污染，并且可以保持测量精度。 在成膜过程中，可以容易且精确地测量膜厚，并将其反馈至成膜条件。

公开(公告)号：US07506441B2

公开(公告)日：2009-03-24

申请号：US11090201

申请日：2005-03-28

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B21D53/76

CPC分类号： C23C24/04 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49401

摘要： The present invention provides a simple method using aerosol deposition, for manufacturing a piezoelectric film that will simultaneously satisfy various characteristics required of a piezoelectric film. In the method, the piezoelectric film is formed on a substrate by ejecting an aerosol containing particles of a piezoelectric material onto the substrate so that the particles adhere thereto, and a second piezoelectric layer is formed on the first piezoelectric layer by conducting the ejection such that energy used for crushing the particles when the particles collide with the substrate is less than in the formation of the first piezoelectric film.

摘要翻译： 本发明提供一种使用气溶胶沉积的简单方法，用于制造能够同时满足压电膜所需的各种特性的压电膜。 在该方法中，通过将含有压电材料颗粒的气溶胶喷射到基板上以使颗粒附着在基板上而形成压电膜，并且通过进行喷射在第一压电层上形成第二压电层，使得 当颗粒与基板碰撞时用于粉碎颗粒的能量小于第一压电膜的形成。

公开(公告)号：US20070046717A1

公开(公告)日：2007-03-01

申请号：US11466745

申请日：2006-08-23

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B41J2/015

CPC分类号： B05D1/02 ,  B05B7/0012 ,  B05B12/36

摘要： A film forming apparatus includes a film forming chamber for performing a film formation; an exhaust unit connected to the film forming chamber to discharge a gas out of the film forming chamber; a holder provided in the film forming chamber to hold a process-objective material; a jetting nozzle provided in the film forming chamber on which a jetting port is formed in a slit shape, and jetting an aerosol containing particulate material to form a film made of the particulate material on the process-objective material; and a shielding member provided at a side of the jetting port in a longitudinal direction of the jetting port to cover a side of a jet flow of the aerosol jetted from the jetting port. Accordingly, it is possible to suppress a turbulence of a flow of the aerosol due to an exhaust flow, and to form the film uniformly.

摘要翻译： 成膜装置包括用于进行成膜的成膜室; 连接到成膜室的排气单元，用于将气体排出成膜室; 设置在成膜室中以保持加工对象材料的保持器; 设置在成膜室内的喷射喷嘴，喷射口形成为狭缝形状，并且喷射含有颗粒材料的气溶胶，以在工艺目标材料上形成由颗粒材料制成的膜; 以及屏蔽构件，其设置在所述喷射口的所述喷射口的纵向方向的一侧，以覆盖从所述喷射口喷射的所述气溶胶的喷流的一侧。 因此，可以抑制由排气引起的气溶胶流动的紊流，并且均匀地形成膜。

公开(公告)号：US20050231073A1

公开(公告)日：2005-10-20

申请号：US11083953

申请日：2005-03-21

申请人： Hiroto Sugahara ,  Kazuo Kobayashi ,  Motohiro Yasui ,  Jun Akedo ,  Sou Baba

发明人： Hiroto Sugahara ,  Kazuo Kobayashi ,  Motohiro Yasui ,  Jun Akedo ,  Sou Baba

IPC分类号： B41J2/14 ,  B41J2/16 ,  H01L41/08 ,  H01L41/22

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.

摘要翻译： 在基板表面的部分区域上容易形成压电材料层。 通过在基板的表面上形成与图案形式的基板的硬度不同的不同的硬度材料层，载体气体中的压电材料的颗粒粘附在其上的成膜允许区域A 提供了抑制膜形成的膜形式和膜沉积抑制区域B. 此外，当通过AD将含有压电材料的颗粒的载气喷射到基板的表面上时，由于颗粒在成膜允许区域中的粘附而形成膜状的压电材料层 因此，可以在基板的表面的部分区域容易地形成压电体层。

公开(公告)号：US07955647B2

公开(公告)日：2011-06-07

申请号：US11090173

申请日：2005-03-28

申请人： Motohiro Yasui ,  Jun Akedo ,  Sou Baba

发明人： Motohiro Yasui ,  Jun Akedo ,  Sou Baba

IPC分类号： C23C16/00 ,  B05D5/12

CPC分类号： H01L41/314 ,  C23C24/04 ,  H01L41/1876

摘要： A simple method is provided for manufacturing a film such as a piezoelectric film wherein the adhesiveness of the film on a substrate can be improved. An aerosol containing particles is ejected onto a substrate so that the particles adhere thereto, wherein the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are attached in the substrate, and the Vickers hardness Hv(p) of the particles is within a range of 0.39≦Hv(p)/Hv(b)≦3.08. The adhesiveness between the particles and the substrate can thereby be improved to reliably form a film. The present invention can be satisfactorily applied to the formation of a piezoelectric film.

摘要翻译： 提供了一种用于制造诸如压电膜的膜的简单方法，其中可以提高基板上的膜的粘附性。 将含有颗粒的气溶胶喷射到基板上，使得颗粒粘附到其上，其中颗粒附着在基材中的粘合表面的维氏硬度Hv（b）与维氏硬度Hv（p）之间的比例 颗粒在0.39和n1E的范围内; Hv（p）/ Hv（b）＆nlE; 3.08。 从而能够提高粒子与基材的粘合性，可靠地形成膜。 本发明可以令人满意地应用于压电膜的形成。

公开(公告)号：US07954448B2

公开(公告)日：2011-06-07

申请号：US11466745

申请日：2006-08-23

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B05C5/02

CPC分类号： B05D1/02 ,  B05B7/0012 ,  B05B12/36

摘要： A film forming apparatus includes a film forming chamber for performing a film formation; an exhaust unit connected to the film forming chamber to discharge a gas out of the film forming chamber; a holder provided in the film forming chamber to hold a process-objective material; a jetting nozzle provided in the film forming chamber on which a jetting port is formed in a slit shape, and jetting an aerosol containing particulate material to form a film made of the particulate material on the process-objective material; and a shielding member provided at a side of the jetting port in a longitudinal direction of the jetting port to cover a side of a jet flow of the aerosol jetted from the jetting port. Accordingly, it is possible to suppress a turbulence of a flow of the aerosol due to an exhaust flow, and to form the film uniformly.

摘要翻译： 成膜装置包括用于进行成膜的成膜室; 连接到成膜室的排气单元，用于将气体排出成膜室; 设置在成膜室中以保持加工对象材料的保持器; 设置在成膜室内的喷射喷嘴，喷射口形成为狭缝形状，并且喷射含有颗粒材料的气溶胶，以在工艺目标材料上形成由颗粒材料制成的膜; 以及屏蔽构件，其设置在所述喷射口的所述喷射口的纵向方向的一侧，以覆盖从所述喷射口喷射的所述气溶胶的喷流的一侧。 因此，可以抑制由排气引起的气溶胶流动的紊流，并且均匀地形成膜。

公开(公告)号：US20070048439A1

公开(公告)日：2007-03-01

申请号：US11466753

申请日：2006-08-23

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B05D5/12 ,  B05D3/02

CPC分类号： C23C24/04 ,  B41J2/161 ,  B41J2/164 ,  C04B35/111 ,  C04B35/491 ,  C04B35/6262 ,  C04B35/62645 ,  C04B2235/3203 ,  C04B2235/3217 ,  C04B2235/3249 ,  C04B2235/3409 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/656 ,  C04B2235/6567 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/43

摘要： A method of producing a film includes: a heating treatment step of performing a heating treatment for ceramic particles; a film-forming step for forming the film by jetting, onto a substrate, an aerosol containing the ceramic particles which have been subjected to the heating treatment so as to make the ceramic particles adhere to the substrate; and an annealing-treatment step for performing an annealing treatment for the film. Accordingly, it is possible to previously vaporize and remove water and an additive which would otherwise cause gasification in the annealing treatment step, thereby preventing the defect and destruction of the film in the annealing treatment step. Thus, it is possible to provide a piezoelectric actuator plate, for ink-jet head, having satisfactory piezoelectric characteristics.

摘要翻译： 制造薄膜的方法包括：对陶瓷颗粒进行加热处理的加热处理步骤; 通过将含有已经进行了加热处理的陶瓷颗粒的气溶胶喷射到基板上以使陶瓷颗粒粘附到基板上而形成膜的成膜步骤; 以及对该膜进行退火处理的退火处理工序。 因此，可以预先蒸发除去在退火处理工序中会引起气化的水和添加剂，从而防止退火处理工序中的膜的缺陷和破坏。 因此，可以提供具有令人满意的压电特性的用于喷墨头的压电致动器板。

公开(公告)号：US20070046156A1

公开(公告)日：2007-03-01

申请号：US11467012

申请日：2006-08-24

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： H01L41/047

CPC分类号： C23C28/042 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14266 ,  C23C24/04 ,  C23C28/048 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/435

摘要： A method of producing a piezoelectric actuator includes the steps of: forming a first electrode layer on a substrate by jetting an aerosol containing particles of a conductive material and ceramic particles onto the substrate to make the particles adhere to the substrate; forming a piezoelectric layer on the first electrode layer by jetting an aerosol containing particles of a piezoelectric material onto the first electrode layer to make the particles adhere to the electrode; performing an annealing treatment for the piezoelectric layer; and forming, on the piezoelectric layer, a second electrode layer paring with the first electrode layer. Accordingly, the adherence between the substrate and the first electrode layer and between the first electrode layer and the piezoelectric layer are improved, thereby hardly causing exfoliation of the layers due to differences in coefficients of thermal expansion between the layers.

摘要翻译： 制造压电致动器的方法包括以下步骤：通过将含有导电材料颗粒和陶瓷颗粒的气溶胶喷射到基板上而在基板上形成第一电极层，使颗粒粘附到基板上; 通过在所述第一电极层上喷射含有压电材料颗粒的气雾剂，在所述第一电极层上形成压电体层，使所述颗粒粘附到所述电极上; 对压电体层进行退火处理; 以及在所述压电层上形成与所述第一电极层配对的第二电极层。 因此，衬底和第一电极层之间以及第一电极层和压电层之间的粘附性得到改善，由于层之间的热膨胀系数的差异，几乎不会导致层的剥离。

公开(公告)号：US20070044713A1

公开(公告)日：2007-03-01

申请号：US11466665

申请日：2006-08-23

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B05D5/12 ,  B05C5/00 ,  B05D1/02

CPC分类号： B05D1/02 ,  C23C24/04 ,  H01L41/314

摘要： A film forming apparatus including a film forming chamber which forms a film, a jetting mechanism which jets aerosol containing material particles onto a substrate in the film forming chamber, a measuring chamber communicating with the film forming chamber, a measuring mechanism which measures a thickness of the film in the measuring chamber, a pressure adjusting mechanism which controls an internal pressure of the film forming chamber and the measuring chamber, a conveyor which transports the substrate between the film forming chamber and the measuring chamber, and a blocking section which blocks a communication between the film forming chamber and the measuring chamber. Accordingly, inside of the measuring chamber is maintained clean without being polluted with the aerosol, and the measurement precision can be maintained. In the film forming process, the film thickness can be easily and precisely measured, and fed back to the film forming condition.

摘要翻译： 一种成膜装置，包括：成膜室，其形成膜;喷射机构，其将含有材料颗粒的气溶胶喷射到成膜室中的基板上;测量室，与成膜室连通;测量机构， 测量室中的膜，控制成膜室和测量室的内部压力的压力调节机构，在成膜室和测量室之间输送基板的输送器和阻挡通信的阻挡部分 在成膜室和测量室之间。 因此，测量室的内部保持清洁而不被气溶胶污染，并且可以保持测量精度。 在成膜过程中，可以容易且精确地测量膜厚，并将其反馈至成膜条件。

公开(公告)号：US07866578B2

公开(公告)日：2011-01-11

申请号：US11467039

申请日：2006-08-24

申请人： Motohiro Yasui ,  Jun Akedo

发明人： Motohiro Yasui ,  Jun Akedo

IPC分类号： B05B1/14

CPC分类号： B05B7/1486 ,  B05B7/0012 ,  B05B7/025 ,  B05B7/1404 ,  B05B7/1472 ,  C23C4/00 ,  C23C4/02 ,  C23C4/04 ,  C23C4/073 ,  C23C4/18 ,  C23C30/00

摘要： A film forming apparatus includes an aerosol generating section which generates an aerosol; a jetting nozzle having an internal passage formed therein and through which the aerosol flows, the internal passage having one end serving as a supply port of the aerosol and having other end serving as a jetting port of the aerosol; a narrowed channel which is provided in the internal passage and which has a channel area narrower than a channel area on an upstream of the narrowed channel; and a collision portion which is provided in the internal passage on a downstream of the narrowed channel, and against which a flow of the aerosol passed through the narrowed channel collides. Since the aggregated particles are crushed and supplied from the jetting nozzle in the form of fine particles, a thin and uniform film can be formed on the process-objective material.

摘要翻译： 成膜装置包括产生气溶胶的烟雾发生部， 喷嘴，其内部通道形成在其中并且气溶胶通过该喷嘴喷嘴，内部通道具有一端用作气溶胶的供应口，另一端用作气溶胶的喷射口; 所述通道设置在所述内部通路中，并且具有比所述变窄通道的上游侧的通道区域窄的通道区域; 以及碰撞部分，其在所述内部通道中设置在所述狭窄通道的下游，并且所述气溶胶流过所述狭窄通道的流动与所述碰撞部分碰撞。 由于聚集的颗粒被粉碎并以细颗粒的形式从喷射嘴供应，所以可以在工艺目标材料上形成薄而均匀的膜。