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    Actuator device, liquid-jet head and liquid-jet apparatus
    2.
    发明申请
    Actuator device, liquid-jet head and liquid-jet apparatus 失效
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US20070007860A1

    公开(公告)日：2007-01-11

    申请号：US11482689

    申请日：2006-07-10

    申请人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    发明人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    IPC分类号： H01L41/187

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/20 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

    摘要翻译： 致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）构成的层; 设置在由二氧化硅（SiO 2）构成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100）面取向的氧化镧（LNO）制成的基层; 和压电元件。 压电元件包括​​：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系 系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

    Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus
    3.
    发明申请
    Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus 有权
    压电元件，致动器装置，喷液头和液体喷射装置

    公开(公告)号：US20060268073A1

    公开(公告)日：2006-11-30

    申请号：US11390222

    申请日：2006-03-28

    申请人： Motoki Takabe ,  Koji Sumi

    发明人： Motoki Takabe ,  Koji Sumi

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/11 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： Provided are a piezoelectric element, an actuator device, a liquid-jet head and a liquid-jet apparatus which exhibit excellent displacement characteristics; and the piezoelectric element is configured of a lower electrode, a piezoelectric layer and an upper electrode, in which piezoelectric element the proportion of the (100) planes present in the face surface of the piezoelectric layer to the (100), (110) and (111) planes present therein is not less than 70%, and in which piezoelectric element the proportion of the (100), (110) and (210) planes present in the vertical surface orthogonal to the face surface of the piezoelectric layer to the (100), (110), (210), (111) and (211) planes present therein is not less than 80%.

    摘要翻译： 提供具有优异的位移特性的压电元件，致动器装置，液体喷射头和液体喷射装置; 并且压电元件由下电极，压电层和上电极构成，其中压电元件在压电层的表面中存在的（100）面的比例与（100），（110）和 其中存在的（111）面不小于70％，并且在压电元件中，垂直于压电层的表面的垂直表面中存在的（100），（110）和（210）面的比例与 （100），（110），（210），（111）和（211）面不少于80％。

    Piezoelectric device and liquid jet head
    5.
    发明授权
    Piezoelectric device and liquid jet head 有权
    压电元件和液体喷头

    公开(公告)号：US07717546B2

    公开(公告)日：2010-05-18

    申请号：US11879628

    申请日：2007-07-18

    申请人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    发明人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

    摘要： A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

    摘要翻译： 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

    Liquid ejecting head and method for manufacturing the same
    6.
    发明授权
    Liquid ejecting head and method for manufacturing the same 有权
    液体喷头及其制造方法

    公开(公告)号：US07712878B2

    公开(公告)日：2010-05-11

    申请号：US12057672

    申请日：2008-03-28

    申请人： Motoki Takabe ,  Koji Sumi

    发明人： Motoki Takabe ,  Koji Sumi

    IPC分类号： B41J2/045

    CPC分类号： B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/14419 ,  H01L41/0973 ,  H01L41/25 ,  Y10T29/42

    摘要： A liquid ejecting head includes a flow channel substrate having a pressure generating chamber communicating with a nozzle aperture through which liquid is ejected, and a piezoelectric element disposed on one surface of the flow channel substrate. The piezoelectric element includes a common electrode, a piezoelectric layer, and an individual electrode. The piezoelectric layer is made of lead zirconate titanate having a rhombohedral or monoclinic crystal structure preferentially oriented in the (100) plane. The saturated polarization Pm and the residual polarization Pr of the piezoelectric layer satisfy the relationship 33%≦2Pr/2Pm≦46%.

    摘要翻译： 液体喷射头包括具有与喷射孔连通的压力发生室的流动通道基板，液体喷射通过该流路基板，以及设置在流路基板的一个表面上的压电元件。 压电元件包括​​公共电极，压电层和单独电极。 压电层由具有在（100）平面中优先取向的菱面体或单斜晶体结构的锆钛酸铅制成。 压电层的饱和极化Pm和残余极化Pr满足关系33％＆lt; 1lE; 2Pr / 2Pm＆nlE; 46％。

    Actuator device, liquid-jet head and liquid-jet apparatus
    8.
    发明授权
    Actuator device, liquid-jet head and liquid-jet apparatus 失效
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US07589450B2

    公开(公告)日：2009-09-15

    申请号：US11482689

    申请日：2006-07-10

    申请人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    发明人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    IPC分类号： H01L41/00 ,  H02N2/00

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/20 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100m) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

    摘要翻译： 致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）制成的层; 提供在由二氧化硅（SiO 2）制成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100μm）面取向的氧化镧（LNO）构成的基层; 和压电元件。 压电元件包括​​：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系 系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

    Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus
    10.
    发明申请
    Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
    电介质膜的制造方法，压电元件的制造方法，液体喷射头的制造方法，电介质膜，压电元件，液体喷射装置

    公开(公告)号：US20060230590A1

    公开(公告)日：2006-10-19

    申请号：US11392757

    申请日：2006-03-30

    申请人： Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

    发明人： Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

    IPC分类号： H04R17/00

    CPC分类号： H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C18/1216 ,  C23C18/1283 ,  H01L41/0973 ,  H01L41/1876 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

    摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the sintering step is performed at a heating-up rate of 100 [° C/sec] to 150 [° C./sec].

    摘要翻译： 一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧结所述电介质前体膜以形成电介质膜的烧结步骤，其中所述干燥步骤包括将所述电介质前体膜加热到低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜 在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧结工序在加热 升速率为100 [℃/秒]至150℃/秒。