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公开(公告)号:US20220338349A1
公开(公告)日:2022-10-20
申请号:US17850495
申请日:2022-06-27
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Stéphane BOUVIER , Emmanuel LEFEUVRE , Frédéric VOIRON
IPC: H05K1/11 , H01S5/02315
Abstract: A current path is provided through an interposer to ground a grounding pattern associated with a transmission line, by exploiting an interposer substrate that has a high-resistivity portion at a first surface and a low-resistivity portion extending from the high-resistivity portion to a second surface of the interposer. Moreover, a set of blind via-holes comprising electrically-conductive material extend from the first surface of the interposer substrate through the high-resistivity portion and into the low-resistivity portion. Top-to-bottom connection can be made using the conductive material in the blind vias and using the low-resistivity portion of the substrate, while the high-resistivity portion of the substrate impedes current leakage from the transmission line to the second surface of the substrate. The number and dimensions of the blind via-holes control the impedance of the grounding pattern relative to the transmission line's characteristic impedance.
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公开(公告)号:US20240321782A1
公开(公告)日:2024-09-26
申请号:US18614266
申请日:2024-03-22
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Sébastien IOCHEM , Stéphane BOUVIER
IPC: H01L23/62 , H01L21/027 , H01L25/16 , H01L27/06
CPC classification number: H01L23/62 , H01L21/0274 , H01L25/16 , H01L27/0682 , H01L27/0688 , H01L28/90
Abstract: A resistor-capacitor component that includes: a capacitor having at least a first electrode structure and a second electrode structure separated by a dielectric structure; an insulating layer on the second electrode structure, the insulating layer having contact holes distributed across a surface of the insulating layer, each of the contact holes delimiting an opening onto the second electrode structure having a corrugated edge; and a conductive layer on the insulating layer and filling the contact holes to form electrical contacts with the second electrode structure.
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公开(公告)号:US20230010467A1
公开(公告)日:2023-01-12
申请号:US17945462
申请日:2022-09-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yohei YAMAGUCHI , Yasuhiro MURASE , Stéphane BOUVIER
IPC: H01L27/01
Abstract: RC-network components that include a substrate and capacitor having a thin-film top electrode portion at a surface on one side of the substrate. The low ohmic semiconductor substrate is doped to contribute 5% or less to the resistance of the RC-network component. The resistance provided in series with the capacitor is controlled by providing a contact plate, spaced from the thin-film top electrode portion by an insulating layer, and a set of one or more bridging contacts passing through openings in the insulating layer. The bridging contacts electrically interconnect the thin-film top electrode portion and the contact plate. Different resistance values can be set by appropriate selection of the number of bridging contacts. The openings are elongated thereby reducing temperature concentration at their periphery. Correspondingly, the bridging contacts have an elongated cross-sectional shape.
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公开(公告)号:US20230017133A1
公开(公告)日:2023-01-19
申请号:US17935296
申请日:2022-09-26
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yohei YAMAGUCHI , Yasuhiro MURASE , Stéphane BOUVIER
Abstract: RC-network components that include a substrate having a capacitor with a thin-film top electrode portion at a surface at one side of the substrate. The low ohmic semiconductor substrate is doped to contribute 5% or less to the resistance of the RC-network component. The resistance in series with the capacitor is controlled by providing a contact plate, spaced from the top electrode portion by an insulating layer, and a set of one or more bridging contacts in openings in the insulating layer. The bridging contacts electrically interconnect the top electrode portion and contact plate. Different resistance values can be set by appropriate selection of the number of bridging contacts. Temperature concentration at the periphery of the openings is reduced by providing reduced thickness portions in the insulating layer around the periphery of the openings.
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公开(公告)号:US20230012912A1
公开(公告)日:2023-01-19
申请号:US17946455
申请日:2022-09-16
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Stéphane BOUVIER , David DENIS , Emmanuel LEFEUVRE
IPC: H01L27/01 , H01L21/762 , H05K1/18 , H05K1/02 , H01L23/64
Abstract: An electronic device is provided that includes a board equipped with a pair of differential transmission lines that each have an opening extending between two line terminals. Moreover, the device includes a capacitor module that includes a support and two capacitors that each have two capacitor terminals, respectively, connected to the two line terminals of one line of the pair of transmission lines. In addition, the support includes a separating region between the two capacitors that has at least one cavity disposed between the two capacitors.
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公开(公告)号:US20220216350A1
公开(公告)日:2022-07-07
申请号:US17656510
申请日:2022-03-25
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Stéphane BOUVIER , Sébastien IOCHEM , David DENIS
Abstract: A three-dimensional capacitor component that includes a substrate having a textured (contoured) surface and a stack of layers formed conformally over the textured surface to constitute a capacitive stack structure. Respective contacts to the bottom and top electrodes of the capacitive stack structure are both provided at a first side of the component. The bottom electrode and substrate are doped with dopants of the same polarity, and the substrate is heavily doped so that current between a terminal portion of the bottom electrode and remote parts of the bottom electrode flows via the substrate, lowering ESR. A backside metallization layer produces a further, and greater, reduction in ESR. The capacitor component may be implemented as a discrete capacitor component, but may also be integrated with other components/devices. Corresponding fabrication methods are described.
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公开(公告)号:US20230125974A1
公开(公告)日:2023-04-27
申请号:US18087892
申请日:2022-12-23
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Julien EL SABAHY , Larry BUFFLE , Stéphane BOUVIER , Frédéric VOIRON
Abstract: A semi-conductor structure with selective bottom terminal contacting is described. The semiconductor device comprises a first metal layer disposed over a substrate; a conductive layer disposed over the first metal layer; and a second metal layer disposed over the conductive layer, the second metal layer embedding a porous structure comprising a plurality of pores that extend substantially perpendicularly from a top surface of the porous structure toward the conductive layer, wherein only a subset of the plurality of pores open onto the conductive layer.
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公开(公告)号:US20220344100A1
公开(公告)日:2022-10-27
申请号:US17860308
申请日:2022-07-08
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Stéphane BOUVIER , David DENIS , Emmanuel LEFEUVRE
Abstract: An electronic device and a method for manufacturing an electronic device. The electronic device includes: a board equipped with a pair of differential transmission lines, each line of the pair having an opening extending between two line terminals; and a capacitor module that includes: a base; and two 3D capacitors supported by the base, each 3D capacitor comprising two capacitor terminals respectively connected to the two line terminals of one line of the pair of transmission lines.
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公开(公告)号:US20220190101A1
公开(公告)日:2022-06-16
申请号:US17551437
申请日:2021-12-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Stéphane BOUVIER , Nicolas NORMAND , Emmanuel LEFEUVRE
IPC: H01L49/02 , H01L23/522 , H01L27/08 , H01L21/768
Abstract: An electrical device that includes a substrate; a 3D capacitor including a capacitor dielectric region of a dielectric material, a capacitor electrode region of a conductive material, the capacitor dielectric region and the capacitor electrode region being arranged at least partially inside a cavity extending in the substrate from a top face of the substrate; and a surrounding through opening in the substrate and which surrounds a surrounded substrate region, the 3D capacitor being outside of the surrounded substrate region, the surrounding through opening extending from the top face to a bottom face of the substrate, wherein inside the surrounding through opening a surrounding dielectric region of the dielectric material and a surrounding conductive region of the conductive material are arranged.
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