公开(公告)号：US09036157B2

公开(公告)日：2015-05-19

申请号：US13655540

申请日：2012-10-19

Applicant: National Applied Research Laboratories

Inventor： Ming-Hsing Shen ,  Chi-Hung Huang ,  Wei-Chung Wang ,  Yung-Hsiang Chen

IPC: G01B11/02 ,  G01B9/02 ,  G01B11/16

CPC classification number: G01B9/0203 ,  G01B9/02087 ,  G01B11/161

Abstract: A system of computing surface reconstruction, in-plane and out-of-plane displacements and strain distribution utilizes the optical switching element to switch the reference beam to analyze the images of the test object before and after deformation, to measure the topography, in-plane and out-of-plane displacements and surface two-dimensional strain distribution on the test surface of the test object, and thus to increase the measurement range on the test surface of the test object with the use of image registration. Thereby, the complexity and error of scanning the test object can be reduced. Such a system need not to move the image capturing device or test object to generate relative displacement for reaching the measurement effect of the test surface of the test object in three-dimensional coordinates.

Abstract translation: 一种计算表面重建，平面内和平面外位移和应变分布的系统利用光学开关元件切换参考光束，以分析变形前后的测试对象的图像，测量地形， 在测试对象的测试表面上的平面和面外位移和表面二维应变分布，从而通过使用图像配准来增加测试对象的测试表面上的测量范围。 因此，可以减少扫描测试对象的复杂性和错误。 这样的系统不需要移动图像捕获装置或测试对象以产生相对位移，以达到三维坐标中测试对象的测试表面的测量效果。

公开(公告)号：US09395173B2

公开(公告)日：2016-07-19

申请号：US14521440

申请日：2014-10-22

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Ming-Hsing Shen ,  Wei-Chung Wang ,  Chi-Hung Huang ,  Jyh-Rou Sze ,  Chun-Li Chang

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/447

CPC classification number: G01B9/02042 ,  G01B9/02044 ,  G01B9/0209 ,  G01J3/447 ,  G01J3/45 ,  G02B21/0024

Abstract: The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Abstract translation: 传统的白光干涉仪，共聚焦显微镜和椭偏仪被集成为功能意义上的一个装置，并且可以在集成装置上推导传统测量的几何参数。 因此，与现有技术相比，可以确保设备成本节省，在线测量，快速监测，缩短制造时间以及减少制造过程中物体损坏可能性的优点和功效。