公开(公告)号：US20240347371A1

公开(公告)日：2024-10-17

申请号：US18751140

申请日：2024-06-21

申请人： NHK SPRING CO., LTD.

发明人： Yusuke OTSUKA ,  Naoya KIDA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Michiyoshi SONE ,  Hiroki SAKAMOTO

IPC分类号： H01L21/687 ,  H01J37/32

CPC分类号： H01L21/68757 ,  H01J37/32715 ,  H01J2237/2007

摘要： A laminate structure of the disclosure is a laminate structure for a semiconductor manufacturing device, and includes a substrate containing aluminum and including a first face, an intermediate layer arranged on the first face of the substrate and containing aluminum oxide, and a cover layer arranged on the intermediate layer and containing metal atoms. The intermediate layer includes a partition wall forming a plurality of voids in a cross-sectional shape parallel to the first face. The intermediate layer includes a boundary layer covering the first face of the substrate. The cover layer is arranged in some of the plurality of voids in the intermediate layer. The plurality of voids includes voids adjacent to the boundary layer and separated from the cover layer.

公开(公告)号：US20240327967A1

公开(公告)日：2024-10-03

申请号：US18738218

申请日：2024-06-10

申请人： NHK SPRING CO., LTD.

发明人： Hibiki YOKOYAMA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Michiyoshi SONE ,  Masahiro FUJII ,  Takatoshi NAMBU

IPC分类号： C23C4/01

CPC分类号： C23C4/01

摘要： The metal mask has a body having a first surface in contact with a surface of a workpiece, a second surface opposite the first surface and a third surface between the first surface and the second surface, and an eave portion continuous with the body portion and projecting outwards from the first surface, the eave portion being arranged away from the surface of the workpiece. The third surface (side surface) of the body portion of the metal mask may have a stepped portion formed of the eave portion. The third surface (side surface) of the body part has an inclined surface that extends from the first surface to the second surface and may have a structure in which the eave portion is arranged above the inclined surface.

公开(公告)号：US20240342740A1

公开(公告)日：2024-10-17

申请号：US18751200

申请日：2024-06-22

申请人： NHK SPRING CO., LTD.

发明人： Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC分类号： B05B12/26

CPC分类号： B05B12/26

摘要： A masking fixture according to an embodiment of the present disclosure includes an insertion portion fitted into an opening of a workpiece, a covering portion above the insertion portion covering the opening of the workpiece, and an eave portion above the covering portion projecting outwards from an outer edge of the covering portion. In the masking fixture, the eave portion may be arranged higher than the top surface of the workpiece when the insertion portion is fitted into the opening of the workpiece, and a protruding portion may be arranged at the top of the eave portion. The masking fixture may be made of resin.

公开(公告)号：US20230207286A1

公开(公告)日：2023-06-29

申请号：US18176749

申请日：2023-03-01

申请人： NHK SPRING CO., LTD.

发明人： Hibiki YOKOYAMA ,  Naoya KIDA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Michiyoshi SONE

IPC分类号： H01J37/32 ,  C23C4/11

CPC分类号： H01J37/32715 ,  C23C4/11

摘要： A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on the first surface and a plurality of second layers on the second surface. In the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked. The first surface and the second surface are connected via a corner, and each first end portion and each second end portion are alternately stacked at the corner.

公开(公告)号：US20190316230A1

公开(公告)日：2019-10-17

申请号：US15999785

申请日：2017-02-16

申请人： NHK SPRING CO., LTD. ,  TOPURA CO., LTD.

发明人： Noriyoshi KANEDA ,  Takeshi SUZUKI ,  Kouhei MIYAMOTO ,  Naoki HORIUCHI

IPC分类号： C22C21/02 ,  C22F1/043 ,  C22C21/14 ,  C22C21/16 ,  C22C21/18 ,  C22C21/00 ,  C22F1/057

摘要： An aluminum alloy contains 0.7% to 1.8% of silicon, 0.5% to 2.1% of copper, 0.4% to 1.8% of manganese, 0.6% to 1.6% of magnesium, and 0.1% to 0.7% of zinc in terms of mass ratio and the balance aluminum with inevitable impurities.

公开(公告)号：US20160352200A1

公开(公告)日：2016-12-01

申请号：US15117291

申请日：2015-02-04

申请人： NHK Spring Co., LTD.

发明人： Noriyoshi KANEDA ,  Shota NISHIHAMA

IPC分类号： H02K17/16 ,  B23K20/12 ,  H02K15/00

CPC分类号： H02K17/16 ,  B23K20/122 ,  B23K2101/36 ,  H02K15/0012 ,  H02K17/165 ,  H02K2213/03

摘要： A rotor includes: conductors having a bar shape; a first end ring joined to one ends of the conductors by friction stir welding, at least a surface opposite to a surface from which the conductors extend being stirred by the friction stir welding; a second end ring joined to other ends of the conductors by friction stir welding, at least a surface opposite to a surface from which the conductors extend being stirred by the friction stir welding; and an iron core disposed between the first and the second end rings, having a cylindrical shape, and including a plurality of insertion holes through which the respective conductors are insertable in a central axis direction of the iron core.

摘要翻译： 转子包括：具有杆形状的导体; 通过摩擦搅拌焊接接合到导体的一端的第一端环，至少与导体延伸的表面相对的表面通过摩擦搅拌焊接而被搅动; 通过摩擦搅拌焊接接合到导体的另一端的第二端环，至少与导体延伸的表面相对的表面通过摩擦搅拌焊接而被搅动; 以及设置在所述第一和第二端环之间的铁芯，其具有圆柱形形状，并且包括多个插入孔，各个导体可以通过所述插入孔沿铁芯的中心轴线方向插入。