公开(公告)号：US20220157579A1

公开(公告)日：2022-05-19

申请号：US17592766

申请日：2022-02-04

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: H01J37/32 ,  C23C16/46 ,  C23C16/458 ,  C23C16/44 ,  C23C14/34 ,  C23C14/50 ,  C23C14/24 ,  H05B3/28 ,  H05B1/02

Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.

公开(公告)号：US12211710B2

公开(公告)日：2025-01-28

申请号：US17219316

申请日：2021-03-31

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko Hanamachi ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: H01J37/32 ,  C23C16/458 ,  C23C16/46 ,  H01J37/34 ,  H01L21/67 ,  H01L21/687 ,  H05B3/28

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：US12000737B2

公开(公告)日：2024-06-04

申请号：US17590780

申请日：2022-02-01

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: G01K7/06 ,  G01K7/14 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G05D23/22

CPC classification number: G01K7/06 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G01K7/14 ,  G05D23/22

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.