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公开(公告)号：US20220157579A1
公开(公告)日：2022-05-19
申请号：US17592766
申请日：2022-02-04
Applicant: NHK SPRING CO., LTD.
Inventor： Naoya Kida , Arata Tatsumi , Kenji Sekiya , Naoya Aikawa , Masaya Takanashi
IPC: H01J37/32 , C23C16/46 , C23C16/458 , C23C16/44 , C23C14/34 , C23C14/50 , C23C14/24 , H05B3/28 , H05B1/02
Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.
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公开(公告)号：US20170058406A1
公开(公告)日：2017-03-02
申请号：US15123021
申请日：2015-02-25
Applicant: NHK Spring Co., Ltd.
Inventor： Masaru Takimoto , Yuichiro Yamauchi , Satoshi Hirano , Naoya Aikawa
IPC: C23C24/04
Abstract: A laminate includes: a substrate; and a metallic coating that is formed from copper powder containing 0.002% to 0.020% by weight of phosphorus and having been subjected to reduction treatment, the metallic coating being deposited on the substrate.
Abstract translation: 层压体包括：基材; 以及由含有0.002〜0.020重量％的磷并经过还原处理的铜粉形成的金属被膜，金属被膜沉积在基板上。
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公开(公告)号：US12211710B2
公开(公告)日：2025-01-28
申请号：US17219316
申请日：2021-03-31
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko Hanamachi , Arata Tatsumi , Kenji Sekiya , Naoya Aikawa , Masaya Takanashi
IPC: H01J37/32 , C23C16/458 , C23C16/46 , H01J37/34 , H01L21/67 , H01L21/687 , H05B3/28
Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.
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公开(公告)号：US12000737B2
公开(公告)日：2024-06-04
申请号：US17590780
申请日：2022-02-01
Applicant: NHK SPRING CO., LTD.
Inventor： Naoya Kida , Arata Tatsumi , Kenji Sekiya , Naoya Aikawa , Masaya Takanashi
Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.
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Patent Agency Ranking
公开(公告)号：US10290529B2
公开(公告)日：2019-05-14
申请号：US15948473
申请日：2018-04-09
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko Hanamachi , Naoya Aikawa
IPC: H01L21/683 , H01L21/3065 , H01L21/02 , H05B3/18 , H05B3/74 , H01L21/67 , H05B3/28
Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.
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公开(公告)号：US20240178049A1
公开(公告)日：2024-05-30
申请号：US18284928
申请日：2022-02-04
Applicant: NHK Spring Co., Ltd.
Inventor： Naoya Kida , Jun Futakutiya , Daisuke Fujino , Naoya Aikawa , Keiko Wada , Aya Nakajima
IPC: H01L21/687 , H05B3/18 , H05B3/30
CPC classification number: H01L21/68785 , H05B3/18 , H05B3/30 , H05B2203/002 , H05B2213/07
Abstract: A placement board includes: a main body unit configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. A temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20° C. or more in a state where the medium has been caused to circulate through the flow channel.
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公开(公告)号：US11490464B2
公开(公告)日：2022-11-01
申请号：US16598100
申请日：2019-10-10
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko Hanamachi , Kenji Sekiya , Go Takahara , Naoya Aikawa , Yuta Kisara , Arata Tatsumi
Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.
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公开(公告)号：US10435792B2
公开(公告)日：2019-10-08
申请号：US15123021
申请日：2015-02-25
Applicant: NHK Spring Co., Ltd.
Inventor： Masaru Takimoto , Yuichiro Yamauchi , Satoshi Hirano , Naoya Aikawa
Abstract: A laminate includes: a substrate; and a metallic coating that is formed from copper powder containing 0.002% to 0.020% by weight of phosphorus and having been subjected to reduction treatment, the metallic coating being deposited on the substrate.
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公开(公告)号：US20180315680A1
公开(公告)日：2018-11-01
申请号：US15774087
申请日：2016-11-10
Applicant: NHK Spring Co., Ltd.
Inventor： Naoya Aikawa , Satoshi Hirano , Yuichiro Yamauchi
CPC classification number: B05D1/12 , B05D7/24 , B22F1/00 , B22F9/08 , B32B15/01 , B32B15/02 , B32B15/04 , B32B15/20 , C04B41/90 , C22C9/00
Abstract: A laminate includes: an insulating substrate; an intermediate layer formed on a surface of the substrate and containing a metal or an alloy as a main component; and a metal film formed of a copper powder having a hydrogen content of 0.002% by mass or less and laminated on the intermediate layer. An interface between the intermediate layer and the metal film is plastically deformed.
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