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    X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL
    3.
    发明申请
    X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL 审中-公开
    X射线源，高压发生器，电子束枪，旋转靶组件，旋转靶和旋转真空密封

    公开(公告)号：US20160020058A1

    公开(公告)日：2016-01-21

    申请号：US14774424

    申请日：2014-03-12

    申请人： NIKON METROLOGY NV

    发明人： Roger HADLAND

    IPC分类号： H01J35/02 ,  H01J35/04 ,  H05G1/12 ,  F16C35/04 ,  H01J35/16 ,  F16J15/16 ,  F16C33/76 ,  H01J35/10 ,  H01J29/48

    CPC分类号： H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/087 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

    摘要： Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

    摘要翻译： 本文公开了一种用于x射线源的高压发生器（120），x射线枪，电子束装置，旋转真空密封件，用于x射线源的靶组件，旋转x射线发射 目标（500）和x射线源。 这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用如计算机断层摄影。 特别地，高电压发生器包括电连接第一电压倍增器（122a，122b）和第二电压倍增器（122b，122c）之间的屏蔽电极（123a，123b）。 电子束装置包括控制光电检测器（202a，202b，未示出）和具有布置在其间的透明导电屏蔽（203a和203b，203c-未示出）的光发射器（201a，202a）。 旋转式真空密封件包括位于用于旋转轴（401）的孔（301）的高压和低压端之间的位置的可泵送室（302）。 旋转目标组件被构造成使得当轴承壳体（403）和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。 旋转X射线发射目标（500）具有支撑在轮毂上的多个目标板（560），所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极（123a）。