公开(公告)号：US10020157B2

公开(公告)日：2018-07-10

申请号：US15717364

申请日：2017-09-27

申请人： NIKON METROLOGY NV

发明人： Roger Hadland

IPC分类号： H01J35/10 ,  H01J35/02 ,  H01J29/48 ,  F16C33/76 ,  H02M1/32 ,  H05G1/12 ,  H02M7/10 ,  H01J35/04 ,  F16J15/16 ,  H01J35/16 ,  F16C35/04

CPC分类号： H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/116 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

公开(公告)号：US09953799B2

公开(公告)日：2018-04-24

申请号：US14668029

申请日：2015-03-25

申请人： NIKON CORPORATION ,  NIKON METROLOGY NV

发明人： Fumihiko Hakoda ,  Satoshi Takahashi ,  Jim Smith

IPC分类号： H01J35/16 ,  G01N23/04 ,  H01J35/04 ,  B22D46/00 ,  G21K7/00 ,  H05G1/02 ,  G01N23/02 ,  H01J9/42

CPC分类号： H01J35/16 ,  B22D46/00 ,  G01N23/02 ,  G01N23/04 ,  G21K7/00 ,  H01J9/42 ,  H01J35/04 ,  H01J35/045 ,  H01J2235/163 ,  H05G1/02

摘要： Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.

公开(公告)号：US20180033581A1

公开(公告)日：2018-02-01

申请号：US15717393

申请日：2017-09-27

申请人： NIKON METROLOGY NV

发明人： Roger HADLAND

IPC分类号： H01J35/02 ,  H01J29/48 ,  F16C35/04 ,  F16C33/76 ,  F16J15/16 ,  H05G1/12 ,  H02M7/10 ,  H01J35/10 ,  H01J35/04 ,  H01J35/16 ,  H02M1/32

CPC分类号： H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/087 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

公开(公告)号：US09793084B2

公开(公告)日：2017-10-17

申请号：US13232166

申请日：2011-09-14

申请人： Jani Reijonen ,  Joel Lee Groves

发明人： Jani Reijonen ,  Joel Lee Groves

IPC分类号： G21G4/02 ,  H01J35/04 ,  H01J35/16 ,  H05G1/06 ,  H05H3/06

CPC分类号： H01J35/04 ,  H01J35/16 ,  H01J2235/02 ,  H01J2235/06 ,  H01J2235/086 ,  H01J2235/165 ,  H01J2235/20 ,  H05G1/06 ,  H05H3/06

摘要： Systems, methods, and devices with improved electrode configuration for downhole nuclear radiation generators are provided. For example, one embodiment of a nuclear radiation generator capable of downhole operation may include a charged particle source, a target material, and an acceleration column between the charged particle source and the target material. The acceleration column may include an intermediate electrode that remains floating at a variable potential, being electrically isolated from the rest of the acceleration column.

公开(公告)号：US20170213687A1

公开(公告)日：2017-07-27

申请号：US15414455

申请日：2017-01-24

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Jin-Woo JEONG ,  Yoon-Ho SONG

IPC分类号： H01J35/14 ,  G21K1/10

CPC分类号： H01J35/04 ,  G21K1/02

摘要： The present disclosure relates to an X-ray tube, and more particularly, to an X-ray tube having a simple structure from which an element necessary for focusing an electron beam, such as a magnetic lens, and having generating an X-ray having a focal spot of a nanometer-scale. The present disclosure includes: a electron beam generation unit emitting an electron beam; a limiting electrode unit limiting the electron beam emitted from the electron beam generation unit; and a target unit including a target material emitting an X-ray when the limited electron beam collides with the target material, wherein the limiting electrode includes of an electron beam limiting electrode allowing a portion of the emitted electron beam to pass therethrough and to be delivered to the target unit.

公开(公告)号：US20160254116A1

公开(公告)日：2016-09-01

申请号：US15032514

申请日：2014-11-19

申请人： Shimadzu Corporation

发明人： Masaaki Ukita ,  Takuro Izumi ,  Yusuke Koga

IPC分类号： H01J35/14 ,  H01J35/08 ,  H01J35/06

CPC分类号： H01J35/14 ,  H01J35/04 ,  H01J35/06 ,  H01J35/08

摘要： A metal including a passivation film 33a with a thickness of 10 nm or more is used as a metal electrode (a focus cup electrode 33) for generating an electric filed in a vacuum. The focus cup electrode 33 is made of stainless steel. The stainless steel is immersed in a treatment solution to perform coating (passivation treatment) . Accordingly, the passivation film 33a can be formed to be thicker than 10 nm. In this manner, the passivation film 33a is thicker than 10 nm. Therefore, the surface is uniform, and the adhesion is excellent, and the number of pinholes is small. Accordingly, the withstand voltage performance can be improved.

摘要翻译： 使用包括厚度为10nm以上的钝化膜33a的金属作为用于在真空中产生电场的金属电极（聚焦杯电极33）。 聚焦杯电极33由不锈钢制成。 将不锈钢浸入处理溶液中以进行涂覆（钝化处理）。 因此，钝化膜33a可以形成为比10nm厚。 以这种方式，钝化膜33a比10nm厚。 因此，表面均匀，粘附性优异，针孔数少。 因此，能够提高耐压性能。

公开(公告)号：US09155185B2

公开(公告)日：2015-10-06

申请号：US12618821

申请日：2009-11-16

申请人： Jani Reijonen ,  Luke T. Perkins ,  Frederic Gicquiel ,  Christian Stoller ,  Peter Wraight

发明人： Jani Reijonen ,  Luke T. Perkins ,  Frederic Gicquiel ,  Christian Stoller ,  Peter Wraight

IPC分类号： G21G1/10 ,  H05H5/02 ,  G01V5/10 ,  H05H7/22 ,  H05H3/06 ,  H01J35/04 ,  H01J35/16 ,  G21B1/00

CPC分类号： H05H3/06 ,  G01V5/10 ,  G21G1/10 ,  H01J35/04 ,  H01J35/16 ,  H01J2235/02 ,  H01J2235/06 ,  H01J2235/086 ,  H01J2235/165 ,  H01J2235/20

摘要： Systems, methods, and devices with improved electrode configuration for downhole nuclear radiation generators are provided. For example, one embodiment of a nuclear radiation generator capable of downhole operation may include a charged particle source, a target material, and an acceleration column between the charged particle source and the target material. The acceleration column may include several electrodes shaped such that substantially no electrode material from the electrodes is sputtered onto an insulator surface of the acceleration column during normal downhole operation.

摘要翻译： 提供了用于井下核辐射发生器的具有改进的电极配置的系统，方法和装置。 例如，能够进行井下操作的核辐射发生器的一个实施例可以包括带电粒子源，目标材料和带电粒子源与目标材料之间的加速柱。 加速柱可以包括几个电极，其形状使得在正常的井下操作期间基本上没有电极的电极材料溅射到加速柱的绝缘体表面上。

公开(公告)号：US09048059B2

公开(公告)日：2015-06-02

申请号：US13554379

申请日：2012-07-20

申请人： Jin Woo Jeong ,  Jun Tae Kang ,  Yoon Ho Song ,  Jae Woo Kim

发明人： Jin Woo Jeong ,  Jun Tae Kang ,  Yoon Ho Song ,  Jae Woo Kim

IPC分类号： H01J35/04 ,  H01J35/16 ,  H01J35/08

CPC分类号： H01J35/04 ,  H01J35/08 ,  H01J35/16 ,  H01J2235/16

摘要： The present disclosure relates to a stacked x-ray tube apparatus using a spacer, and more particularly, to a stacked x-ray tube apparatus using a spacer that makes it possible to reduce the size of an x-ray tube by forming a stacked structure, with electric insulation and predetermined gaps maintained for each electrode, by forming a stacked x-ray tube by inserting insulating spacers (for example, ceramic) between a exhausting port, a cathode, a gate, a focusing electrode, and an anode and bonding them with an adhesive substance, and then inserting a spacer between a field emitter on a cathode substrate and a gate hole connected with a gate electrode.

摘要翻译： 本公开涉及一种使用间隔物的叠层X射线管装置，更具体地说，涉及一种使用间隔件的层叠X射线管装置，其可以通过形成堆叠结构来减小X射线管的尺寸 通过在排气口，阴极，栅极，聚焦电极和阳极之间插入绝缘间隔物（例如陶瓷）来形成堆叠的x射线管，并且通过在每个电极上保持电绝缘和预定间隙 然后在阴极基板的场发射体和与栅电极连接的栅极孔之间插入间隔物。

公开(公告)号：US20140362976A1

公开(公告)日：2014-12-11

申请号：US14469724

申请日：2014-08-27

申请人： AKIRA MATSUMOTO ,  Kiyoyuki Deguchi ,  Yuuichi Kogure ,  Kazuhito Nakamura ,  Tomoyuki Okada ,  Toru Fujita ,  Tatsuya Nakamura

发明人： AKIRA MATSUMOTO ,  Kiyoyuki Deguchi ,  Yuuichi Kogure ,  Kazuhito Nakamura ,  Tomoyuki Okada ,  Toru Fujita ,  Tatsuya Nakamura

IPC分类号： H01J35/18 ,  H01J35/04

CPC分类号： H01J35/045 ,  H01J35/04 ,  H01J35/06 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/186

摘要： Provided is an X-ray tube which can perform stable X-ray radiation under a desired condition in a radiation region extending in a predetermined direction. Included are a base plate having an opening portion and made of alloy 426, an X-ray transmission window made of titanium foil and arranged to close the opening portion of the base plate, a flat box-like vessel portion attached to the base plate and inside of which is in a vacuum state, an X-ray target provided at the opening portion in the vessel portion, and an electron source injecting electrons to the X-ray target in the vessel portion. The electron source includes a liner cathode, a first control electrode pulling out electrons from the cathode and a second control electrode restricting radiation range of the pulled-out electrons. At this time, X-rays emitted from the X-ray window spreads radially from opening shape of the opening portion.

摘要翻译： 本发明提供一种X射线管，其可以在沿预定方向延伸的辐射区域中在期望条件下执行稳定的X射线辐射。 包括具有开口部分并由合金426制成的基板，由钛箔制成并布置成封闭基板的​​开口部分的X射线透射窗口，附接到基板的扁平盒状容器部分和 其内部处于真空状态，设置在容器部分的开口部分的X射线靶和向血管部分中的X射线靶标注入电子的电子源。 电子源包括衬底阴极，从阴极拉出电子的第一控制电极和限制被拉出电子的辐射范围的第二控制电极。 此时，从X射线窗口射出的X射线从开口部的开口形状向径向扩散。

公开(公告)号：US08498380B2

公开(公告)日：2013-07-30

申请号：US13131086

申请日：2009-11-23

申请人： Rolf Karl Otto Behling

发明人： Rolf Karl Otto Behling

IPC分类号： H01J35/14

CPC分类号： H01J35/14 ,  H01J35/04 ,  H01J35/045 ,  H01J35/26 ,  H01J2235/06

摘要： The present invention refers to an X-ray tube of the rotary-anode type which comprises at least one temporarily negatively biased auxiliary grid electrode (119) with an aperture through which an electron beam (115) emitted by a tube cathode's thermoionic electron emitter (111) can pass. As an alternative thereto, the auxiliary grid electrode (119) may also be positively biased so as to enhance electron emission from a thermoionic electron emitter (111). The auxiliary grid electrode may thereby be connected to a supply voltage UAUX of a controllable voltage supply unit by means of a feedthrough cable (120) serving as a feeding line for providing the main control grid (112) with a grid supply voltage UG.

摘要翻译： 本发明涉及一种旋转阳极型X射线管，其包括至少一个具有孔的暂时负偏置的辅助栅电极（119），电子束（115）由管阴极的热分子电子发射器（ 111）可以通过。 作为替代方案，辅助栅电极（119）也可以被正偏置，以便增强来自热电子发射体（111）的电子发射。 因此，辅助栅极可以通过用作为主控电网（112）提供电网电源电压UG的馈电线的馈通电缆（120）连接到可控电压供应单元的电源电压UAUX。