摘要:
[Object] To monitor, on a metallic body surface, a region that has a specific hue and a region that does not have the specific hue and has a surface whose roughness varies.[Solution] Included are: a measurement apparatus which includes a line sensor camera which is provided such that an optical axis of the line sensor camera is substantially parallel to a normal direction of a metallic body surface, and first, second, and third illumination light sources each configured to irradiate the metallic body surface with first, second, and third illumination light beams each having a strip shape, the measurement apparatus being configured to measure separately respective reflected light beams of the three illumination light beams that have been emitted; and an arithmetic processing apparatus configured to calculate surface state monitoring information on the basis of luminance values of the reflected light beams. The second and third illumination light sources are provided such that a second angle between an optical axis of the second illumination light source and the optical axis of the line sensor camera is substantially equal to a third angle between an optical axis of the third illumination light source and the optical axis of the line sensor camera, and the first illumination light source is provided such that a first angle between the optical axis of the line sensor camera and an optical axis of the first illumination light source is larger than the second angle. The arithmetic processing apparatus calculates information on a hue of the metallic body surface on the basis of a luminance value of the reflected light beam of the first illumination light beam and information on surface roughness of the metallic body on the basis of luminance values of the respective reflected light beams of the second and third illumination light beams.
摘要:
[Object] To perform shape inspection of a metallic body in a simple way at higher speed with higher density.[Solution] An apparatus of the present invention includes: a measurement apparatus configured to irradiate a metallic body with at least two illumination light beams, and measure reflected light separately; and an arithmetic processing apparatus configured to calculate information used for shape inspection of the metallic body on the basis of measurement results. The measurement apparatus includes a plurality of illumination light sources configured to emit strip-shaped illumination light having different peak wavelengths, and a plurality of monochrome line sensor cameras that have band-pass filters and are aligned vertically above a surface of the metallic body and set to capture images of the same portion of the metallic body by their respective shift lenses, the number of the monochrome line sensor cameras being the same as the number of the peak wavelengths of the emitted illumination light. At least two of the plurality of illumination light sources are provided in a manner that an angle formed by a normal direction to the surface of the metallic body and an optical axis of the first illumination light source is substantially equal to an angle formed by the normal direction and an optical axis of the second illumination light source and the two illumination light sources face each other with the line sensor cameras therebetween in a relative movement direction of the metallic body and the measurement apparatus.
摘要:
To inspect the shape of a metallic body further accurately, regardless of surface roughness of the metallic body. A shape inspection apparatus for a metallic body according to the present invention includes: a measurement apparatus configured to irradiate a metallic body with at least two illumination light beams, and measure reflected light of the two illumination light beams from the metallic body separately; and an arithmetic processing apparatus configured to calculate information used for shape inspection of the metallic body on the basis of luminance values of the reflected light. The measurement apparatus includes a first illumination light source and a second illumination light source configured to irradiate the metallic body with strip-shaped illumination light having mutually different peak wavelengths, and a color line sensor camera configured to measure reflected light of first illumination light and reflected light of second illumination light, separately. The first illumination light source and the second illumination light source are provided in a manner that their optical axes form substantially equal angles with a direction of regular reflection of an optical axis of the color line sensor camera at a surface of the metallic body. A wavelength difference between a peak wavelength of the first illumination light and a peak wavelength of the second illumination light is equal to or more than 5 nm and equal to or less than 90 nm.
摘要:
[Object] To provide a shape measurement apparatus that, in measuring the unevenness shape of a measurement object by a light-section method, enables the shape of the measurement object to be measured precisely even when the distance between the measurement object and an image capturing apparatus fluctuates.[Solution] Provided is a shape measurement apparatus including: a linear light position detection unit that detects, from a captured image of linear light applied to a measurement object by a linear light irradiation apparatus that is captured by an image capturing apparatus, a linear light position of the linear light; a distance computation unit that computes a distance from the image capturing apparatus to the measurement object, on the basis of a distance difference between a reference linear light position detected by the linear light position detection unit when the measurement object is positioned at a position of a predetermined reference distance from the image capturing apparatus and the linear light position detected by the linear light position detection unit, the reference distance, and an angle formed by an optical axis of the image capturing apparatus and an emission direction of the linear light; a focus adjustment unit that adjusts focus of the image capturing apparatus on the basis of the distance from the image capturing apparatus to the measurement object; and a shape computation unit that computes a shape of the measurement object on the basis of the captured image.
摘要:
[Object] To integratively index a surface property of a measured object by utilizing a measurement result at a plurality of illumination wavelengths and measurement angles.[Solution] A surface property indexing apparatus according to the present invention includes a measurement device that generates a plurality of captured images by capturing images of reflected light of illumination light on a surface of the measured object while selecting its wavelength, and an arithmetic processing apparatus that indexes a surface property of the measured object on the basis of the obtained captured images. The captured images generated by the measurement device are of the same wavelength of the reflected light that forms images in an image capturing device, and is of different reflection angles of the reflected light that forms images in the image capturing device in the direction corresponding to the longitudinal direction of the measured object in the captured image. The arithmetic processing apparatus reconstructs the generated captured images to generate a plurality of processing target images having a common wavelength of the reflected light and a common reflection angle of the reflected light and composed of pixels corresponding to the different view field positions of the measured object, and indexes the surface property of the measured object on the basis of the generated processing target images.