-
公开(公告)号：US06331967B1
公开(公告)日：2001-12-18
申请号：US09522075
申请日：2000-03-09
IPC分类号： G11B700
CPC分类号： G11B19/247
摘要： In a device for controlling rotation of a disk, if a determination is made that a signal is not normally detected by a pre-pit-region detection circuit, an error signal is obtained from a pulse generator to control the rotation of the disk. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit so that rotations of the disk are controlled.
摘要翻译： 在用于控制盘的旋转的装置中，如果确定信号未被预凹坑区域检测电路正常检测到，则从脉冲发生器获得误差信号以控制盘的旋转。 如果通过预凹坑区域检测电路确定正常地检测到信号，并且如果以预定的间隔正常地检测到同步信号，则从摆动信号获得误差信号，使得盘的旋转为 受控。 如果确定预定间隔检测电路以预定间隔检测同步信号，则从与PLL电路产生的再现信号同步的时钟获得误差信号，从而控制盘的旋转。
-
公开(公告)号：US06259662B1
公开(公告)日：2001-07-10
申请号：US09210588
申请日：1998-12-14
IPC分类号： G11B700
CPC分类号： G11B19/28
摘要： When a detected value of the signal processing speed from a frequency comparator is larger than a prescribed value input from an input terminal, the rotation control of a disk is switched from constant linear velocity control to constant angular velocity control using an error signal from an arithmetic unit. Alternatively, when a detected value of the rotational velocity from a frequency comparator is larger than a prescribed value input form an input terminal, the rotation control of the disk is switched from the constant angular velocity control into the constant linear velocity control.
摘要翻译： 当来自频率比较器的信号处理速度的检测值大于从输入端子输入的规定值时，使用来自算术的误差信号将盘的旋转控制从恒定线速度控制切换到恒定角速度控制 单元。 或者，当来自频率比较器的旋转速度的检测值大于从输入端子输入的规定值时，盘的旋转控制从恒定角速度控制切换到恒定线速度控制。
-
公开(公告)号：US06421308B1
公开(公告)日：2002-07-16
申请号：US09241411
申请日：1999-02-02
IPC分类号： G11B2010
CPC分类号： G11B27/36 , G11B7/00718 , G11B7/00745 , G11B20/1833 , G11B27/24 , G11B27/3027 , G11B2220/216 , G11B2220/2575
摘要： For recording data on and reproducing data from an optical disk of a single spiral land/groove configuration, a header detector detects header regions on the optical disk, a PID error detector judges whether the address information read from the header regions is erroneous, using error detection codes, and detects the number of errors per sector. An error count comparator compares the number of errors per sector with a predetermined value, and a state judging circuit identifies the state of the optical disk device by causing transition to a higher or lower state according to the output of the error count comparator. The recording and reproduction are controlled according to the state thus identified.
摘要翻译： 为了在单个螺旋纹/纹槽配置的光盘上记录数据和再现数据，标题检测器检测光盘上的标题区，PID错误检测器判断从标题区读出的地址信息是否错误，使用错误 检测代码，并检测每个扇区的错误数。 误差计数比较器将每个扇区的误差数与预定值进行比较，状态判断电路根据误差计数比较器的输出，通过转变到更高或更低的状态来识别光盘装置的状态。 根据所识别的状态来控制记录和再现。
-
公开(公告)号：US06275878B1
公开(公告)日：2001-08-14
申请号：US09239994
申请日：1999-01-29
IPC分类号： G06F306
CPC分类号： G11B20/1883 , G11B20/10 , G11B20/1833 , G11B27/3027 , G11B2220/20 , G11B2220/216 , G11B2220/2575
摘要： A data recorder for recording data onto a record medium on which a sync signal is inserted at a given interval, has a sequence controller, wherein, after receiving the command from the system controller which triggers an initiation of a recording operation, the sequence controller activates the first encoder in response to a leading end signal of the encoded block from the sync signal set-up section, activates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and activates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block, and wherein, during the absence of the command from the system controller which triggers an initiation of a recording operation, the sequence controller deactivates the first encoder in response to a leading end signal of an encoded block from the sync signal set-up section, deactivates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and deactivates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block.
摘要翻译： 用于将数据记录到以给定间隔插入同步信号的记录介质上的数据记录器具有序列控制器，其中在从系统控制器接收到触发记录操作开始的命令之后，序列控制器激活 第一编码器响应于来自同步信号建立部分的编码块的前端信号，响应于下一编码块的前端信号激活第一编码器和第二编码器，并激活第一编码器， 所述第二编码器和所述数据读取器响应于所述下一个后续编码块的前端信号，并且其中，在不存在触发记录操作开始的系统控制器的命令的情况下，所述序列控制器使所述第一编码器 响应于来自同步信号设置部分的编码块的前端信号，在第一编码器和第二编码器的响应中停用 nse到下一个编码块的前导信号，并且响应于下一个后续编码块的前导信号去激活第一编码器，第二编码器和数据读取器。
-
公开(公告)号：US6118742A
公开(公告)日：2000-09-12
申请号：US058844
申请日：1998-04-13
IPC分类号： G11B19/28 , G11B19/247 , G11B27/22
CPC分类号： G11B19/247
摘要： If a determination is made that a signal is not normally detected by the pre-pit-region detection circuit 53, an error signal is obtained from a pulse generator 58 to control the rotations of the disk 50. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit 53 and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk 50 are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit 53 at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit 54 so that rotations of the disk 50 are controlled.
摘要翻译： 如果确定信号未被预凹坑区域检测电路53正常检测到，则从脉冲发生器58获得误差信号以控制盘50的旋转。如果确定信号 通常由预凹坑区域检测电路53检测到，并且如果以预定间隔不正常地检测到同步信号，则从摆动信号获得误差信号，从而控制盘50的旋转。 如果确定了预定间隔检测电路53以预定间隔检测到同步信号，则从与PLL电路54产生的再现信号同步的时钟获得误差信号，使得盘50的旋转为 受控。
-
公开(公告)号：US08305568B2
公开(公告)日：2012-11-06
申请号：US13032165
申请日：2011-02-22
申请人： Shigeru Matsui , Masayuki Hachiya
发明人： Shigeru Matsui , Masayuki Hachiya
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When the sum of scattered, diffracted, and reflected lights due to the illumination beams is detected, influence of the anisotropy which a contaminant particle and a defect existing in the wafer itself or thereon have with respect to an illumination direction, can be eliminated.
摘要翻译： 来自光源的光由分束器变成两个照明光束。 光束从具有基本相等的仰角的两个相互基本正交的方位角照射到半导体晶片上，以形成照明点。 当检测到由于照明光束引起的散射，衍射和反射光的总和时，可以消除晶片本身或其上存在的污染颗粒和缺陷相对于照明方向的各向异性的影响。
-
公开(公告)号：US07916287B2
公开(公告)日：2011-03-29
申请号：US12754634
申请日：2010-04-06
申请人： Shigeru Matsui , Masayuki Hachiya
发明人： Shigeru Matsui , Masayuki Hachiya
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When the sum of scattered, diffracted, and reflected lights due to the illumination beams is detected, influence of the anisotropy which a contaminant particle and a defect existing in the wafer itself or thereon have with respect to an illumination direction, can be eliminated.
摘要翻译： 来自光源的光由分束器变成两个照明光束。 光束从具有基本相等的仰角的两个相互基本正交的方位角照射到半导体晶片上，以形成照明点。 当检测到由于照明光束引起的散射，衍射和反射光的总和时，可以消除晶片本身或其上存在的污染颗粒和缺陷相对于照明方向的各向异性的影响。
-
公开(公告)号：US07761246B2
公开(公告)日：2010-07-20
申请号：US12349206
申请日：2009-01-06
申请人： Shigeru Matsui
发明人： Shigeru Matsui
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/47
摘要： When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.
摘要翻译： 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。
-
公开(公告)号：US20090244529A1
公开(公告)日：2009-10-01
申请号：US12482479
申请日：2009-06-11
申请人： Kenji Oka , Shigeru Matsui
发明人： Kenji Oka , Shigeru Matsui
IPC分类号： G01N21/88
CPC分类号： G01N21/8851 , G01N21/9501
摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.
摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。
-
公开(公告)号：US20090213364A1
公开(公告)日：2009-08-27
申请号：US12367673
申请日：2009-02-09
申请人： Shigeru Matsui
发明人： Shigeru Matsui
IPC分类号： G01N21/47
CPC分类号： G01N21/9501 , G01N21/8806
摘要： If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other or to improve both of them. Also, there is a problem that the detection sensitivity is lowered on an outer circumference portion than on an inner circumference portion of the article to be inspected.A plurality of measurement units comprising an illumination optics, a measurement spot, a collection optics, and a light detection optics are provided, inspection results obtained from the plurality of measurement spots are integrated, and light-amount distribution to each measurement spot is controlled according to a scan radial position.
摘要翻译： 如果测量点的照度受到限制，以防止被检查物品的热损伤，由于检测灵敏度和检测速度处于权衡关系，因此难以改进其中之一而不牺牲其他 或改善两者。 此外，存在检测灵敏度在外周部比被检查物品的内周部低的问题。 提供包括照明光学元件，测量点，收集光学元件和光检测光学元件的多个测量单元，从多个测量点获得的检查结果被整合，并且根据以下测量点控制对每个测量点的光量分布 到扫描径向位置。
-
-
-
-
-
-
-
-
-
搜索结果
111 条记录 (耗时 0.034 秒)
