-
公开(公告)号：US20130048215A1
公开(公告)日：2013-02-28
申请号：US13598431
申请日：2012-08-29
申请人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
发明人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
IPC分类号： B44C1/22 , H01L21/465 , C03C15/00
CPC分类号： H01L21/67086 , G01N21/3577 , H01L21/31111 , H01L21/67248 , H01L21/67253
摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.
摘要翻译： 通过将磷酸与稀释剂混合而获得的处理液中的基材浸渍进行处理的基板处理装置包括：浓度检测单元，用于通过测定处理液的吸光度特性来检测处理液的浓度。 集中检测装置包括将处理液引入到内部以使处理液通过的透光部，将具有预定波长的光照射到发光部的发光部，受光部 经由透光部接收来自该发光部的光的第一透镜，将从发光部射出的光会聚到透光部的第一透镜，将透过该透光部的光聚光的第二透镜， 光接收部分和冷却这些中的至少一个的冷却机构。
-
公开(公告)号：US10153182B2
公开(公告)日：2018-12-11
申请号：US13598431
申请日：2012-08-29
申请人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
发明人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
IPC分类号： H01L21/67 , H01L21/311 , G01N21/3577
摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.
-
3.发明授权公开(公告)号：US08712572B2
公开(公告)日：2014-04-29
申请号：US13122231
申请日：2009-10-01
申请人： Noboru Higashi , Masahiro Kihara , Kazuo Okamoto , Hidehiko Watanabe , Kenichi Kaida , Hideki Sumi , Michiaki Mawatari
发明人： Noboru Higashi , Masahiro Kihara , Kazuo Okamoto , Hidehiko Watanabe , Kenichi Kaida , Hideki Sumi , Michiaki Mawatari
CPC分类号： H05K13/0452 , H05K13/0417
摘要： A challenge to be met by the invention is to provide an electronic component mounting machine that makes up an electronic component mounting line and that standardizes an operation input method, to thus enable lessening of work load on an operator during performance of operation input action, and an operation instruction method for use with the electronic component mounting machine. In electronic component mounting machines that make it possible for a single machine to perform a plurality of types of works by replacement of a work head to be built into a common platform according to a type of work, a production start button to a model change button are provided as common individual input parts in a basic operation command input part of a display panel of an operation unit regardless of a work type. Control processing and computation processing commensurate with an operation instruction entered by way of the individual input part are performed according to a work program and a computation processing program corresponding to the work head recognized by a plug-in function.
摘要翻译： 本发明要解决的一个挑战是提供组成电子部件安装线的电子部件安装机，并且使操作输入方法标准化，从而能够在执行操作输入动作期间减轻操作者的工作负荷，并且 与电子部件安装机一起使用的操作指示方法。 在电子部件安装机中，通过根据工作类型将单个机器更换为公用平台的工作头进行更换，能够实现多种类型的作业，将生产开始按钮设定为模型切换按钮 作为操作单元的显示面板的基本操作命令输入部分中的普通单独输入部件而不管工作类型如何。 根据与通过插件功能识别的工作头对应的工作程序和运算处理程序，执行与通过各个输入部输入的操作指令相对应的控制处理和计算处理。
-
公开(公告)号：US20080218734A1
公开(公告)日：2008-09-11
申请号：US12073532
申请日：2008-03-06
申请人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
发明人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
CPC分类号： G01N21/552 , G01N21/33
摘要： An attenuated total reflection probe has a prism and a supporter. The prism is made of an optical material which transmits light in far ultraviolet region, and has a contact plane to be in contact with a sample, and an incoming plane and an outgoing plane both not to be in contact with the sample. The supporter has an opening and is connected hermetically with the prism around the opening and eventually exposes the contact plane facing the opening. The contact plane, the incoming plane and the outgoing plane of the prism are formed such that light transmitting the incoming plane enters the contact plane at an incident angle larger than critical angle and that the light totally reflected by the contact plane goes out through the outgoing plane.
摘要翻译： 衰减的全反射探头具有棱镜和支撑。 棱镜由透射远紫外区域的光并且具有与样品接触的接触面以及不与样品接触的入射面和出射面的光学材料制成。 支撑件具有开口并且围绕开口与棱镜气密地连接，并且最终暴露面向开口的接触平面。 形成棱镜的接触平面，入射平面和出射平面，使得透射入射平面的光以大于临界角的入射角进入接触平面，并且由接触平面全反射的光通过出射 飞机
-
公开(公告)号：US08646174B2
公开(公告)日：2014-02-11
申请号：US13381245
申请日：2010-05-07
CPC分类号： H05K13/0452 , H01L23/552 , H01L25/50 , H01L2924/0002 , H05K13/0812 , Y10T29/49128 , Y10T29/4913 , Y10T29/49131 , Y10T29/53022 , H01L2924/00
摘要： An object is to provide an electronic component mounting method in which an adequate component mounting work to which a check result is correctly reflected is enabled and it is possible to satisfy both reduction of the failure occurrence rate and improvement of the working efficiency. An electronic component mounting apparatus in which an appearance checking section which checks a board to detect existence or non-existence of a failure item, and a component mounting section which transfers and mounts an allocated mounting object component to the board in which the check is ended are integrally disposed includes a mounting availability determination processing section 28d which determines an availability of an execution of an operation of mounting the mounting object component, based on a result of detection of a failure item. In a mounting availability determining process, an availability of an execution of a mounting operation for the mounting object component is automatically determined based on preset failure patterns of the detection result.
摘要翻译： 本发明的目的是提供一种电子部件安装方法，其中能够正确反映检查结果的适当部件安装工作，并且可以同时满足故障发生率的降低和工作效率的提高。 一种电子部件安装装置，其中检查板以检测故障项目的存在或不存在的外观检查部分以及将分配的安装对象部件传送并安装到检查结束的板的部件安装部分 一体地设置有基于故障项目的检测结果的安装可用性判定处理部28d，其确定安装对象部件的安装的动作的可行性。 在安装可用性确定过程中，基于检测结果的预设故障模式自动确定对安装对象部件的安装操作的执行的可用性。
-
6.发明授权公开(公告)号：US08390816B2
公开(公告)日：2013-03-05
申请号：US12921066
申请日：2009-03-03
申请人： Noboru Higashi , Naomi Kariyama , Akifumi Ikehata
发明人： Noboru Higashi , Naomi Kariyama , Akifumi Ikehata
CPC分类号： G01N21/33 , G01N21/552
摘要： In far ultraviolet spectroscopy using attenuated total reflection, total reflection light is measured by using evanescent waves of total reflection light. The penetration depth thereof is equal to or larger than 150 nm in a wavelength range in the far ultraviolet range wherein the penetration depth depends on a wavelength of the far ultraviolet light, refractive index of an object to be measured, refractive index of optical material of the probe and incident angle of the far ultraviolet light at an interface between the probe and the object. The attenuated total reflection probe is made of an optical material selected so as to have the penetration depth equal to or higher than 150 nm in far ultraviolet wavelength range, and the probe makes contact with the object to be measured at the interface, and the far ultraviolet light is incident on the interface at incident angle larger than critical angle in the wavelength range so as to have the penetration depth equal to or higher than 150 nm. The total reflection light from the interface is measured, and absorbance of the object to be measured is determined.
摘要翻译： 在使用衰减全反射的远紫外光谱中，通过使用全反射光的消逝波来测量全反射光。 其穿透深度在远紫外范围的波长范围内等于或大于150nm，其中穿透深度取决于远紫外光的波长，待测物体的折射率，光学材料的折射率 探针和探针与物体之间的界面处的远紫外光的探测和入射角。 衰减的全反射探针由选择的光学材料制成，以便在远紫外线波长范围内具有等于或高于150nm的穿透深度，并且探针在界面处与待测量的物体接触，并且远 紫外光以大于临界角的入射角入射在界面上，使其具有等于或高于150nm的穿透深度。 测定界面的全反射光，测定被测定物的吸光度。
-
7.发明申请公开(公告)号：US20090073436A1
公开(公告)日：2009-03-19
申请号：US12293061
申请日：2007-03-08
申请人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
发明人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
CPC分类号： G01N21/552 , G01N21/33
摘要： An optical probe consists of a first component made of a first optical material having a light transmission property in the far ultraviolet region, and a second component made of a second optical material arranged in contact with the surface of the first component. For example, the second optical material has a higher refractive index in the far ultraviolet region than the first optical material. The second component is provided, on a side in contact with a sample, with a surface totally reflecting light having incident angle equal to or larger than the critical angle. Alternatively, an optical probe has an optical material having a light transmission property in the far ultraviolet region, having a surface totally reflecting a ray of light of incident angle equal to or larger than the critical angle, at a side in contact with a sample, and the refractive index is higher near the surface than at the other parts in the far ultraviolet region. Consequently, a spectroscopic measurement becomes possible on very small solute components dissolved into water or the like in the far ultraviolet region.
摘要翻译： 光学探针由在远紫外区域具有透光性的第一光学材料制成的第一部件和与第一部件的表面接触配置的第二光学材料制成的第二部件组成。 例如，第二光学材料在远紫外区域具有比第一光学材料更高的折射率。 第二部件在与样品接触的一侧具有全反射入射角等于或大于临界角的光的表面。 或者，光学探针具有在远紫外区域具有透光性的光学材料，具有在与样品接触的一侧上具有完全反射入射角等于或大于临界角的入射角的光的表面， 并且折射率在表面附近比在远紫外区域的其它部分高。 因此，在远紫外区域溶解于水等的非常小的溶质成分上，可以进行光谱测定。
-
8.发明申请Light dispersion compensating element and composite type light dispersion compensating element using that element and light dispersion compensating method using that element 审中-公开使用该元件的光色散补偿元件和复合型光色散补偿元件以及使用该元件的光色散补偿方法公开(公告)号：US20050100274A1
公开(公告)日：2005-05-12
申请号：US10398576
申请日：2001-10-12
申请人： Shiro Yamashita , Noboru Higashi
发明人： Shiro Yamashita , Noboru Higashi
IPC分类号： G02B5/26 , G02B5/28 , G02B6/34 , H04B10/2507 , H04B10/2525 , H04B10/40 , H04B10/50 , H04B10/60 , G02B6/26 , G02B6/02
CPC分类号： G02B5/288 , G02B6/29364 , G02B6/29367 , G02B6/29394 , G02B6/29395 , H04B10/25133
摘要： In the past, the occurrence of wavelength dispersion in signals transmitted through optical fibers caused considerable problems in terms of communications at a communications bit rate of 10 Gbps or more, and particularly optical communications at 40 Gbps or more. In the present invention, an optical dispersion compensating element can be realized having a group velocity delay time vs. wavelength characteristics curve in which the extreme value of group velocity delay time is large over a broad bandwidth by composing a compound optical dispersion compensating element containing optical dispersion compensating elements in which a reflector Or multi-layer film element is disposed in opposition to the incident surface of a multi-layer film element capable of performing dispersion compensation by utilizing group velocity delay time vs. wavelength characteristics, and connecting a plurality of elements capable of performing dispersion compensation in series. According to the present invention, dispersion compensation for each channel as well as dispersion compensation of a plurality of channels is performed.
摘要翻译： 在过去，通过光纤传输的信号中的波长色散的发生在通信比特率为10Gbps以上，特别是40Gbps以上的光通信的通信方面引起相当大的问题。 在本发明中，通过组合包含光学的复合光学色散补偿元件，可以实现具有群速度延迟时间对波长特性曲线的光学色散补偿元件，其中组宽度带宽上的组速度延迟时间的极值大 散射补偿元件，其中反射器或多层膜元件与通过利用组速度延迟时间对波长特性进行色散补偿的多层膜元件的入射表面相对设置，并且连接多个元件 能够串联进行色散补偿。 根据本发明，执行每个通道的色散补偿以及多个通道的色散补偿。
-
公开(公告)号：US20120102726A1
公开(公告)日：2012-05-03
申请号：US13381245
申请日：2010-05-07
IPC分类号： B23P21/00
CPC分类号： H05K13/0452 , H01L23/552 , H01L25/50 , H01L2924/0002 , H05K13/0812 , Y10T29/49128 , Y10T29/4913 , Y10T29/49131 , Y10T29/53022 , H01L2924/00
摘要： An object is to provide an electronic component mounting method in which an adequate component mounting work to which a check result is correctly reflected is enabled and it is possible to satisfy both reduction of the failure occurrence rate and improvement of the working efficiency. An electronic component mounting apparatus in which an appearance checking section which checks a board to detect existence or non-existence of a failure item, and a component mounting section which transfers and mounts an allocated mounting object component to the board in which the check is ended are integrally disposed includes a mounting availability determination processing section 28d which determines an availability of an execution of an operation of mounting the mounting object component, based on a result of detection of a failure item. In a mounting availability determining process, an availability of an execution of a mounting operation for the mounting object component is automatically determined based on preset failure patterns of the detection result.
摘要翻译： 本发明的目的是提供一种电子部件安装方法，其中能够正确反映检查结果的适当部件安装工作，并且可以同时满足故障发生率的降低和工作效率的提高。 一种电子部件安装装置，其中检查板以检测故障项目的存在或不存在的外观检查部分以及将分配的安装对象部件传送并安装到检查结束的板的部件安装部分 一体地设置有基于故障项目的检测结果的安装可用性判定处理部28d，其确定安装对象部件的安装的动作的可行性。 在安装可用性确定过程中，基于检测结果的预设故障模式自动确定对安装对象部件的安装操作的执行的可用性。
-
10.发明授权公开(公告)号：US07978331B2
公开(公告)日：2011-07-12
申请号：US12293061
申请日：2007-03-08
申请人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
发明人： Noboru Higashi , Yukihiro Ozaki , Akifumi Ikehata
IPC分类号： G01N21/55
CPC分类号： G01N21/552 , G01N21/33
摘要： An optical probe consists of a first component made of a first optical material having a light transmission property in the far ultraviolet region, and a second component made of a second optical material arranged in contact with the surface of the first component. For example, the second optical material has a higher refractive index in the far ultraviolet region than the first optical material. The second component is provided, on a side in contact with a sample, with a surface totally reflecting light having incident angle equal to or larger than the critical angle. Alternatively, an optical probe has an optical material having a light transmission property in the far ultraviolet region, having a surface totally reflecting a ray of light of incident angle equal to or larger than the critical angle, at a side in contact with a sample, and the refractive index is higher near the surface than at the other parts in the far ultraviolet region. Consequently, a spectroscopic measurement becomes possible on very small solute components dissolved into water or the like in the far ultraviolet region.
摘要翻译： 光学探头由在远紫外区域具有透光性的第一光学材料制成的第一部件和与第一部件的表面接触地布置的第二光学材料制成的第二部件组成。 例如，第二光学材料在远紫外区域具有比第一光学材料更高的折射率。 第二部件在与样品接触的一侧具有全反射入射角等于或大于临界角的光的表面。 或者，光学探针具有在远紫外区域具有透光性的光学材料，具有在与样品接触的一侧上具有完全反射入射角等于或大于临界角的入射角的光的表面， 并且折射率在表面附近比在远紫外区域的其它部分高。 因此，在远紫外区域溶解于水等的非常小的溶质成分上，可以进行光谱测定。
-
-
-
-
-
-
-
-
-
搜索结果
23 条记录 (耗时 0.028 秒)
