SUBSTRATE PROCESSING APPARATUS
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 审中-公开
    基板加工设备

    公开(公告)号:US20130048215A1

    公开(公告)日:2013-02-28

    申请号:US13598431

    申请日:2012-08-29

    IPC分类号: B44C1/22 H01L21/465 C03C15/00

    摘要: A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

    摘要翻译: 通过将磷酸与稀释剂混合而获得的处理液中的基材浸渍进行处理的基板处理装置包括:浓度检测单元,用于通过测定处理液的吸光度特性来检测处理液的浓度。 集中检测装置包括将处理液引入到内部以使处理液通过的透光部,将具有预定波长的光照射到发光部的发光部,受光部 经由透光部接收来自该发光部的光的第一透镜,将从发光部射出的光会聚到透光部的第一透镜,将透过该透光部的光聚光的第二透镜, 光接收部分和冷却这些中的至少一个的冷却机构。

    Substrate processing apparatus
    2.
    发明授权

    公开(公告)号:US10153182B2

    公开(公告)日:2018-12-11

    申请号:US13598431

    申请日:2012-08-29

    摘要: A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

    Communication apparatus and key managing method
    3.
    发明授权
    Communication apparatus and key managing method 有权
    通信设备和密钥管理方法

    公开(公告)号:US09106406B2

    公开(公告)日:2015-08-11

    申请号:US13596279

    申请日:2012-08-28

    IPC分类号: H04L9/08

    摘要: According to an embodiment, a communication apparatus includes a key storage unit configured to store therein a cryptographic key; a receiving unit configured to receive a message; an analyzing unit configured to analyze whether the message includes an access request for the cryptographic key; a generating unit configured to, when the message includes the access request, generate request information used to request an access to the cryptographic key requested by the access request; and an access controller configured to control the access to the cryptographic key based on the request information.

    摘要翻译: 根据实施例,通信装置包括密钥存储单元,配置为在其中存储密码密钥; 接收单元,被配置为接收消息; 分析单元,被配置为分析所述消息是否包括对所述密码密钥的访问请求; 生成单元,被配置为当所述消息包括所述访问请求时,生成用于请求访问由所述访问请求请求的密码的请求信息; 以及访问控制器,被配置为基于所述请求信息来控制对所述密码密钥的访问。

    Apparatus, storage system, and computer program product for prevention of data loss
    4.
    发明授权
    Apparatus, storage system, and computer program product for prevention of data loss 有权
    装置,存储系统和计算机程序产品,用于防止数据丢失

    公开(公告)号:US08069301B2

    公开(公告)日:2011-11-29

    申请号:US12393654

    申请日:2009-02-26

    IPC分类号: G06F12/02

    摘要: A data control apparatus includes a mapping-table managing unit that manages a mapping table that is associated with a corrupted-data recovery function of recording data and error correcting code data as redundant data that is given separately from the data, distributed and stored in units of stripe blocks in the plural nonvolatile semiconductor memory devices, the mapping table containing arrangement information of the data and the error correcting code data; a determining unit that determines whether to differentiate frequencies of writing the data into the semiconductor memory devices; and a changing unit that changes the arrangement information by switching the data stored in units of the stripe blocks managed using the mapping table to differentiate the frequencies of writing the data into the semiconductor memory devices, when the determining unit determines that the frequencies of writing the data into the semiconductor memory devices are to be differentiated.

    摘要翻译: 数据控制装置包括映射表管理单元,其管理与记录数据的损坏数据恢复功能和纠错码数据相关联的映射表,作为与数据分开地分配并以单元分布和存储的冗余数据 所述多个非易失性半导体存储器件中的条形块,所述映射表包含所述数据的排列信息和所述纠错码数据; 确定单元,其确定是否将写入数据的频率区分成半导体存储器件; 以及改变单元,其通过切换存储在使用映射表管理的条带块的单元中的数据来改变排列信息,以将写入数据的频率区分为半导体存储器件,当确定单元确定写入的频率 差分数据到半导体存储器件中。

    Storage system and method for striping data
    5.
    发明授权
    Storage system and method for striping data 失效
    存储系统和分条数据的方法

    公开(公告)号:US08065482B2

    公开(公告)日:2011-11-22

    申请号:US12396006

    申请日:2009-03-02

    IPC分类号: G06F12/16

    摘要: A size storage unit stores therein a block size of a memory element. A buffering unit executes buffer processing configured to store data received from a RAID (Redundant Arrays of Inexpensive/Independent Disks) controller into a buffer, and to write the data stored in the buffer into the memory element. A stripe-size receiving unit receives a stripe size that indicates a size of a unit of access at time of access to the memory element by the RAID controller. Writing processing is configured to write data received from the RAID controller into the memory element without executing the buffer processing by the buffering unit, when the stripe size is n times of the block size (n is a positive integer).

    摘要翻译: 大小存储单元存储存储元件的块大小。 缓冲单元执行缓冲处理,其被配置为将从RAID(廉价/独立磁盘的冗余阵列)控制器接收的数据存储到缓冲器中,并且将存储在缓冲器中的数据写入存储器元件。 条形尺寸接收单元接收指示由RAID控制器访问存储器元件时的访问单元的大小的条带大小。 写入处理被配置为当条带大小是块大小的n倍(n为正整数)时,将从RAID控制器接收的数据写入存储元件,而不执行缓冲单元的缓冲器处理。

    STORAGE CONTROL DEVICE AND STORAGE CONTROL METHOD
    6.
    发明申请
    STORAGE CONTROL DEVICE AND STORAGE CONTROL METHOD 审中-公开
    存储控制设备和存储控制方法

    公开(公告)号:US20090327803A1

    公开(公告)日:2009-12-31

    申请号:US12395811

    申请日:2009-03-02

    IPC分类号: G06F11/20

    CPC分类号: G06F11/108

    摘要: A RAID is configured using plural nonvolatile semiconductor memory devices to enable recovery of data stored in the nonvolatile semiconductor memory devices, and data is read from the nonvolatile semiconductor memory device included in the RAID in response to a data reading request inputted from outside. When an error occurs during the reading, data for which the reading error occurs is recovered, and rewritten into an area of the nonvolatile semiconductor memory device in which the reading error occurs.

    摘要翻译: 使用多个非易失性半导体存储器件来配置RAID,以使得能够恢复存储在非易失性半导体存储器件中的数据,并且响应于从外部输入的数据读取请求,从包括在RAID中的非易失性半导体存储器件读取数据。 当在读取期间发生错误时,发生读取错误的数据被恢复,并被重写到发生读取错误的非易失性半导体存储器件的区域中。

    DATA TRANSFER SCHEME USING CACHING AND DIFFERENTIAL COMPRESSION TECHNIQUES FOR REDUCING NETWORK LOAD
    8.
    发明申请
    DATA TRANSFER SCHEME USING CACHING AND DIFFERENTIAL COMPRESSION TECHNIQUES FOR REDUCING NETWORK LOAD 审中-公开
    使用缓存和差分压缩技术的数据传输方案可减少网络负载

    公开(公告)号:US20080250119A1

    公开(公告)日:2008-10-09

    申请号:US11967435

    申请日:2007-12-31

    IPC分类号: G06F15/16

    摘要: In a data transfer scheme using a caching technique and/or a compression technique which is capable of reducing the network load of a network connecting between data transfer devices, correspondences between data and their names are registered at the data transfer devices and the corresponding names are transferred, instead of transferring the data, for those data for which the correspondences are registered, so that it is possible to reduce the amount of transfer data among the data transfer devices. Even when the name corresponding to the data is not registered so that it is impossible to transfer the corresponding name instead of transferring the data, it is possible to reduce the amount of transfer data among the data transfer devices by transferring the compressed data in which this data is expressed in a compressed form by utilizing the name corresponding to the registered reference data.

    摘要翻译: 在使用缓存技术和/或压缩技术的数据传输方案中,能够减少在数据传输设备之间连接的网络的网络负载,数据和它们的名称之间的对应关系被登记在数据传输设备上,并且相应的名称是 而是传送数据,而不是传送数据,对于其对应被登记的那些数据,使得可以减少数据传送装置之间的传送数据量。 即使当与数据相对应的名称没有被登记使得不可能传送相应的名称而不是传送数据时,也可以通过传送数据传送装置中的这种数据的压缩数据来减少传送数据的数量 通过利用与注册的参考数据对应的名称,以压缩形式表示数据。

    Planar motor
    10.
    发明申请
    Planar motor 失效
    平面电机

    公开(公告)号:US20080122397A1

    公开(公告)日:2008-05-29

    申请号:US11605376

    申请日:2006-11-29

    IPC分类号: B64C17/06

    摘要: A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.

    摘要翻译: 形成在安装在可动台的下表面上的公共电极基座上的公共电极板面对形成在分隔电极基板上的分离电极板,该分离电极基板安装在主基板的上表面上,该间隔电极基板以预定间隔彼此分开 。 由球轴承,可动侧的球塞,钢球,固定侧的球塞,以及球轴承构成的支承机构,能够使活动台沿X轴,Y轴,车削方向移动。 驱动线性致动器19沿X轴,Y轴和转动方向移动可动台。