公开(公告)号：US20130240143A1

公开(公告)日：2013-09-19

申请号：US13811877

申请日：2011-07-21

申请人： Hiromi Kiyose ,  Satoru Hiraki ,  Hiroshi Watanabe

发明人： Hiromi Kiyose ,  Satoru Hiraki ,  Hiroshi Watanabe

IPC分类号： B44C1/22

CPC分类号： B44C1/227 ,  H01L21/31111 ,  H01L21/67057 ,  H01L21/67086 ,  H01L21/67109

摘要： A substrate processing device, which processes by immersing the substrate in the processing liquid comprising a mixture of a chemical and a diluting liquid, is provided with: a processing tank (1) that retains the processing liquid; heating means (2, 3) that heat the processing liquid; a temperature detection means (4) that detects the temperature of the processing liquid; a temperature control means (5) that operates the aforementioned heating means (2, 3) in a manner so that the detected temperature approaches a set temperature; a replenishing means (6) that replenishes the diluting liquid in the processing liquid; a concentration detection means (7) that detects the concentration of the processing liquid by measuring the light absorption characteristics of the processing liquid; and a concentration control means (8) that operates the aforementioned replenishing means (6) in a manner so that the detected concentration approaches a set concentration.

摘要翻译： 通过将基板浸渍在包含化学液体和稀释液体的混合物的处理液中进行处理的基板处理装置具有：保持处理液体的处理槽（1） 加热处理液的加热装置（2,3） 温度检测装置（4），其检测处理液的温度; 温度控制装置（5），其以使得检测到的温度接近设定温度的方式操作上述加热装置（2,3）; 补充处理液中的稀释液的补充装置（6）; 浓度检测装置（7），其通过测量处理液的光吸收特性来检测处理液的浓度; 以及以使检测出的浓度接近设定浓度的方式操作上述补充装置（6）的浓度控制装置（8）。

公开(公告)号：US20130048215A1

公开(公告)日：2013-02-28

申请号：US13598431

申请日：2012-08-29

申请人： Noboru Higashi ,  Satoru Hiraki ,  Hiromi Kiyose ,  Hideaki Sato ,  Hiroshi Komiya

发明人： Noboru Higashi ,  Satoru Hiraki ,  Hiromi Kiyose ,  Hideaki Sato ,  Hiroshi Komiya

IPC分类号： B44C1/22 ,  H01L21/465 ,  C03C15/00

CPC分类号： H01L21/67086 ,  G01N21/3577 ,  H01L21/31111 ,  H01L21/67248 ,  H01L21/67253

摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

摘要翻译： 通过将磷酸与稀释剂混合而获得的处理液中的基材浸渍进行处理的基板处理装置包括：浓度检测单元，用于通过测定处理液的吸光度特性来检测处理液的浓度。 集中检测装置包括将处理液引入到内部以使处理液通过的透光部，将具有预定波长的光照射到发光部的发光部，受光部 经由透光部接收来自该发光部的光的第一透镜，将从发光部射出的光会聚到透光部的第一透镜，将透过该透光部的光聚光的第二透镜， 光接收部分和冷却这些中的至少一个的冷却机构。

公开(公告)号：US10226959B2

公开(公告)日：2019-03-12

申请号：US13811877

申请日：2011-07-21

申请人： Hiromi Kiyose ,  Satoru Hiraki ,  Hiroshi Watanabe

发明人： Hiromi Kiyose ,  Satoru Hiraki ,  Hiroshi Watanabe

IPC分类号： B44C1/22 ,  H01L21/67 ,  H01L21/311

摘要： A substrate processing device, which processes by immersing the substrate in the processing liquid comprising a mixture of a chemical and a diluting liquid, is provided with: a processing tank (1) that retains the processing liquid; heating means (2, 3) that heat the processing liquid; a temperature detection means (4) that detects the temperature of the processing liquid; a temperature control means (5) that operates the aforementioned heating means (2, 3) in a manner so that the detected temperature approaches a set temperature; a replenishing means (6) that replenishes the diluting liquid in the processing liquid; a concentration detection means (7) that detects the concentration of the processing liquid by measuring the light absorption characteristics of the processing liquid; and a concentration control means (8) that operates the aforementioned replenishing means (6) in a manner so that the detected concentration approaches a set concentration.

公开(公告)号：US06427108B1

公开(公告)日：2002-07-30

申请号：US09354337

申请日：1999-07-16

申请人： Katsumi Kanasugi ,  Satoru Hiraki ,  Shuji Nagatani

发明人： Katsumi Kanasugi ,  Satoru Hiraki ,  Shuji Nagatani

IPC分类号： B60K4100

CPC分类号： F16H61/66254 ,  B60K28/165 ,  B60W2050/0028 ,  B60W2050/0057 ,  B60W2530/16 ,  B60W2550/142 ,  B60W2710/105 ,  F16H59/48 ,  F16H59/58 ,  F16H59/66 ,  F16H61/0213 ,  F16H2059/082 ,  F16H2059/142 ,  F16H2059/663 ,  Y10T477/69 ,  Y10T477/692

摘要： A control system for an automatic vehicle transmission, in which the running resistance acting on the vehicle and the driving force generated by the vehicle are calculated, and a slope of a road on which the vehicle travels is estimated based on at least the calculated running resistance and the driving force. The vehicle running state is then discriminated by comparing the estimated slope with a predetermined value. The maximum driving force to be generated by the vehicle at the current gear ratio is calculated to determine a driving force difference from the calculated driving force and the gear ratio of the transmission is determined such that the driving force difference is a predetermined value in response to the discriminated running state, thereby enhancing the drivability.

摘要翻译： 一种自动车辆变速器的控制系统，其中计算作用在车辆上的行驶阻力和由车辆产生的驱动力，并且至少基于计算出的行驶阻力来估计车辆行驶的道路的斜率 和驱动力。 然后通过将估计斜率与预定值进行比较来区分车辆行驶状态。 计算出以当前齿轮比产生的车辆的最大驱动力，以确定与所计算的驱动力的驱动力差，并且确定变速器的齿轮比，使得驱动力差响应于 识别运行状态，从而提高驾驶性能。

公开(公告)号：US10153182B2

公开(公告)日：2018-12-11

申请号：US13598431

申请日：2012-08-29

申请人： Noboru Higashi ,  Satoru Hiraki ,  Hiromi Kiyose ,  Hideaki Sato ,  Hiroshi Komiya

发明人： Noboru Higashi ,  Satoru Hiraki ,  Hiromi Kiyose ,  Hideaki Sato ,  Hiroshi Komiya

IPC分类号： H01L21/67 ,  H01L21/311 ,  G01N21/3577

摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

公开(公告)号：US08705037B2

公开(公告)日：2014-04-22

申请号：US13120330

申请日：2009-08-31

申请人： Hiroshi Yokota ,  Satoru Hiraki ,  Nobuyoshi Yasuda

发明人： Hiroshi Yokota ,  Satoru Hiraki ,  Nobuyoshi Yasuda

IPC分类号： G01N21/00 ,  G01N21/01 ,  G01N1/10 ,  G01N21/85 ,  G01N21/17 ,  G01N21/03 ,  G01N21/05

CPC分类号： G01N21/8507 ,  G01N21/03 ,  G01N21/05 ,  G01N21/15 ,  G01N21/1702 ,  G01N21/5907 ,  G01N2021/152 ,  G01N2201/0639

摘要： A liquid component concentration meter measures the concentration of a liquid in a liquid supply tube from outside the liquid supply tube. The concentration meter includes a liquid supply tube; a light transmission unit; a light emission unit for irradiating light to the light transmission unit; a light reception unit for receiving light passed through the light transmission unit; a support member that movably supports the light emission unit and the light reception unit such that a measurement position is moved along the light transmission unit; a measurement-position moving mechanism for moving the support member such that the measurement position is moved within a predetermined area in the light transmission unit; and a data processing unit for calculating the concentration of the liquid in the liquid supply tube based on intensities of light received by the light reception unit at different measurement positions.

摘要翻译： 液体成分浓度计从液体供给管外部测量液体供给管中的液体浓度。 浓度计包括液体供应管; 光传输单元; 用于向所述光传输单元照射光的发光单元; 光接收单元，用于接收通过光传输单元的光; 支撑构件，其可移动地支撑所述发光单元和所述光接收单元，使得测量位置沿着所述光传输单元移动; 测量位置移动机构，用于使所述支撑构件移动，使得所述测量位置在所述光传输单元中的预定区域内移动; 以及数据处理单元，用于基于在不同测量位置处由光接收单元接收的光的强度来计算液体供应管中的液体的浓度。

公开(公告)号：US20110176136A1

公开(公告)日：2011-07-21

申请号：US13120330

申请日：2009-08-31

申请人： Hiroshi Yokota ,  Satoru Hiraki ,  Nobuyoshi Yasuda

发明人： Hiroshi Yokota ,  Satoru Hiraki ,  Nobuyoshi Yasuda

IPC分类号： G01N21/01

CPC分类号： G01N21/8507 ,  G01N21/03 ,  G01N21/05 ,  G01N21/15 ,  G01N21/1702 ,  G01N21/5907 ,  G01N2021/152 ,  G01N2201/0639

摘要： The concentration of a liquid in a liquid supply tube, which is supplied with the liquid, is stably measured from the outside of the liquid supply tube. A liquid component concentration meter is provided with a liquid supply tube (14, 16) adapted to be supplied with a liquid; a light transmission unit (15) provided midway through the liquid supply tube (14, 16); a light emission unit (9, 22) for irradiating measurement light to the light transmission unit (15); a light reception unit (10, 23) for receiving measurement light passed through the light transmission unit (15); a support member (31) adapted to movably support the light emission unit (9, 22) and the light reception unit (10, 23) in such a way that a measurement position (32) is moved along the light transmission unit (15), wherein the measurement position (32) is a position at which light is irradiated to the light transmission unit (15) and, also, is a position at which the light passed through the light transmission unit (15) is received by the light reception unit (23); a measurement-position moving mechanism (2) for moving the support member (31) in such a way that the measurement position (32) is moved within a predetermined area in the light transmission unit (15); and a data processing unit adapted to acquire data of intensities of light received by the light reception unit (10, 23) at a plurality of measurement positions (32) and to calculate the concentration of the liquid flowing through the liquid supply tube (14, 16), based on the plural intensities of received light.

摘要翻译： 从液体供给管的外侧稳定地测量供给液体的液体供给管内的液体浓度。 液体成分浓度计设有适于供应液体的液体供应管（14,16） 设置在所述液体供给管（14,16）的中途的光传输单元（15）; 用于将测量光照射到光传输单元（15）的发光单元（9,22）; 光接收单元（10,23），用于接收通过所述光传输单元（15）的测量光; 支撑构件（31），其适于以使得测量位置（32）沿着光传输单元（15）移动的方式可移动地支撑发光单元（9,22）和光接收单元（10,23） ，其中所述测量位置（32）是光照射到所述光传输单元（15）的位置，并且也是通过所述光传输单元（15）的光被所述光接收 单位（23）; 测量位置移动机构（2），用于使测量位置（32）在光传输单元（15）中的预定区域内移动的方式移动支撑构件（31）; 以及数据处理单元，其适于在多个测量位置（32）处获取由所述光接收单元（10,23）接收的光的强度的数据，并且计算流过所述液体供给管（14,23）的液体的浓度， 16），基于多个强度的接收光。