公开(公告)号：US20140087587A1

公开(公告)日：2014-03-27

申请号：US13667338

申请日：2012-11-02

Applicant: Novellus Systems, Inc.

Inventor： Gary Lind

IPC: H01R13/434 ,  H01R43/26

CPC classification number: H01R13/434 ,  C23C16/4583 ,  C23C16/509 ,  H01J37/32532 ,  H01J37/32577 ,  H01J37/32605 ,  H01L21/68792 ,  H01R13/2407 ,  H01R35/04 ,  H01R43/26 ,  Y10T29/49117

Abstract: Embodiments include a high temperature electrode connection assembly for a wafer-processing pedestal. The high temperature electrode connection assembly includes an electrode rod having a cup that mounts to a stud embedded in the pedestal and a plate adapter portion. The assembly also includes a floating plate having an outer surface and an aperture for receiving the electrode rod. The floating plate contacts an inner surface of the pedestal to resist lateral movement of the electrode rods. The assembly also includes an anti-rotation retainer ring that frictionally engages the electrode rod and an anti-rotation post extending from the outer surface of the floating plate. The anti-rotation post limits rotation of the electrode rod with respect to the floating plate.

Abstract translation: 实施例包括用于晶片处理基座的高温电极连接组件。 高温电极连接组件包括具有安装到嵌入在基座中的螺柱的杯的电极杆和板适配器部分。 组件还包括具有外表面和用于接收电极棒的孔的浮动板。 浮板接触基座的内表面以抵抗电极棒的横向移动。 组件还包括摩擦接合电极棒的防旋转保持环和从浮动板的外表面延伸的防旋转柱。 防转动柱限制了电极杆相对于浮动板的旋转。

公开(公告)号：US09088085B2

公开(公告)日：2015-07-21

申请号：US13667338

申请日：2012-11-02

Applicant: Novellus Systems, Inc.

Inventor： Gary Lind

IPC: H01R13/434 ,  H01R43/26 ,  H01R13/24 ,  H01R13/35 ,  H01L21/687 ,  H01J37/32 ,  C23C16/458 ,  C23C16/50 ,  C23C16/509 ,  H01R35/04

CPC classification number: H01R13/434 ,  C23C16/4583 ,  C23C16/509 ,  H01J37/32532 ,  H01J37/32577 ,  H01J37/32605 ,  H01L21/68792 ,  H01R13/2407 ,  H01R35/04 ,  H01R43/26 ,  Y10T29/49117

Abstract: Embodiments include a high temperature electrode connection assembly for a wafer-processing pedestal. The high temperature electrode connection assembly includes an electrode rod having a cup that mounts to a stud embedded in the pedestal and a plate adapter portion. The assembly also includes a floating plate having an outer surface and an aperture for receiving the electrode rod. The floating plate contacts an inner surface of the pedestal to resist lateral movement of the electrode rods. The assembly also includes an anti-rotation retainer ring that frictionally engages the electrode rod and an anti-rotation post extending from the outer surface of the floating plate. The anti-rotation post limits rotation of the electrode rod with respect to the floating plate.

Abstract translation: 实施例包括用于晶片处理基座的高温电极连接组件。 高温电极连接组件包括具有安装到嵌入在基座中的螺柱的杯的电极杆和板适配器部分。 组件还包括具有外表面和用于接收电极棒的孔的浮动板。 浮板接触基座的内表面以抵抗电极棒的横向移动。 组件还包括摩擦接合电极棒的防旋转保持环和从浮动板的外表面延伸的防旋转柱。 防转动柱限制了电极杆相对于浮动板的旋转。