摘要:
A pressure sensor includes a metal diaphragm provided at the end of a pressure introduction portion, a glass layer bonded to a surface of the metal diaphragm opposite to the pressure introduction side thereof, and a semiconductor chip acting as a semiconductor strain gauge bonded to the surface of the glass layer.
摘要:
A semiconductor pressure sensor having a cylindrical housing with an opening formed at its tip end which is exposed to a pressure atmosphere and a metal diaphragm for receiving pressure, which is formed in a wall of the cylindrical housing defining the opening. A metal oxide layer is formed in a surface of the metal diaphragm by oxidizing the surface of the metal diaphragm, and a glass layer is formed on the metal oxide layer. A semiconductor chip, on which a strain gauge is formed, is firmly and surely bonded to the metal diaphragm through the glass layer by virtue of the metal oxide layer. This semiconductor pressure sensor can measure high pressure with sufficient sensitivity and high accuracy.
摘要:
A semiconductor pressure sensor having a cylindrical housing with an opening formed at its tip end which is exposed to a pressure atmosphere and a metal diaphragm for receiving pressure which is formed in a wall of the cylindrical housing defining the opening. A metal oxide layer is formed in a surface of the metal diaphragm by oxidizing the surface of the metal diaphragm, and a glass layer is formed on the metal oxide layer. A semiconductor chip, on which a strain gauge is formed, is firmly and surely bonded to the metal diaphragm through the glass layer by virtue of the metal oxide layer. This semiconductor pressure sensor can measure high pressure with sufficient sensitivity and high accuracy.
摘要:
A pressure detector has a cylindrical housing projecting into an atmosphere the pressure of which to be measured, a pressure chamber formed within the housing, to which is the pressure to be measured is introduced, a metallic diaphragm formed on a surface of one portion of a wall defining the pressure chamber, which deforms in accordance with changes in the pressure which is to be measured, and a strain gauge provided in the diaphragm for generating an output signal corresponding to the strain generated due to the deformation of the diaphragm. The strain gauge is composed of a diamond monocrystal plate and a diamond semiconductor film formed on the diamond monocrystal plate. On the diamond monocrystal plate are piled a titanium film, a platinum film, and a gold film, in sequence. The gold film is joined to the diaphragm by brazing.
摘要:
A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the leading end of the machining electrode. The apparatus guides a reactive gas into the plasma zone to activate the gas. The activated gas is adsorbed by the surface of the workpiece that faces the leading end of the machining electrode. The adsorbed gas reacts with the material of the workpiece and locally etches off the surface of the workpiece. A feed mechanism of the apparatus feeds the machining electrode toward the workpiece according to the progress of the etching, thereby forming a trench in the workpiece. Reaction products of the workpiece and reactive gas produced by the etching adhere to and deposit on the sidewall of the trench and form a protective film for protecting the sidewall from being etched, thereby providing the trench with a high aspect ratio.
摘要:
A spark plug includes a body of dielectric substance mounted on one of central and earth electrodes and having polarization effects. A gap for capacitive discharge is defined between the body of dielectric substance and the other of the electrodes, and a gap for inductive discharge is defined between the electrodes, which gap for inductive discharge is larger in dimension than the gap for capacitive discharge. With the arrangement, capacitive discharge to be produced in the early stage of discharge is caused at low discharge breakdown voltage due to polarization effects of the body of dielectric substance, and inductive discharge taking the main part of discharge for ignition is produced by utilizing the capacitive discharge of low voltage as trigger, thereby lowering discharge breakdown voltage to improve ignition performance of the spark plug.
摘要:
A spark plug comprises a center electrode fixed to a leg portion which is exposed into the combustion chamber of an engine and comprises a ground electrode which is bent so that its end opposes the forward end of the center electrode whereby discharge is produced between the ground electrode and the center electrode. The ground electrode includes a discharging surface not opposing a first side end portion of the center electrode which is near the bent portion, but opposing a second side end portion of the center electrode which is remote from the bent portion of the ground electrode. The discharging surface of the ground electrode may be provided by forming a projection or groove at the opposing end of the ground electrode.
摘要:
Method and apparatus is provided for calculating an optimum ignition timing for an internal combustion engine on the basis of values set in dependence on operating conditions of the engine. With a view to prevent ignition times in two successive cycles from differing remarkably from each other, the ignition time or angle for the current cycle is controlled with reference to the ignition time or angle in the just preceding cycle. As one example of the control, in the case where the ignition time electronically anticipated for the current cycle appears to have deviated from the preceding ignition time by more than a predetermined value, the anticipated ignition time is modified to result in the optimum ignition time by adding to or subtracting from the anticipated ignition time a predetermined value. Alternatively, the optimum ignition time may be given by a mean value of the anticipated ignition time and a plurality of the preceding ignition times.
摘要:
An ignition system for an internal combustion engine comprises knock detecting means for detecting knocking of the engine, and ignition timing control means for controlling the ignition timing of the engine in response to the presence or absence of the knocking condition. The knock detecting means detects the pressure in the cylinders of the engine to detect the occurrence of knocking by the fact that the detected pressure includes a high frequency pressure variation. The ignition timing control means is responsive to the output of the knock detecting means, whereby as long as no knocking is detected the ignition timing is controlled to provide the minimum advance for best torque (MBT) and ensure improved engine power efficiency and fuel consumption, whereas when knocking is detected the ignition timing is retarded in relation to the minimum advance for maximum torque (MBT) to prevent the engine from knocking.
摘要:
The pressure sensor has a housing, a sensing body mounted inside an internal space of the housing and having a cavity, one end thereof being open and other end thereof being closed, to form a pressure introducing portion therein, the closed end thereof having a thin thickness forming a diaphragm for receiving a pressure, and a semiconductor chip mounted on one surface of the closed end opposite to the diaphragm for receiving a pressure. The pressure sensor is characterized in that the sensing body is attenuated at a portion including at least the closed end thereof and has a diameter smaller than that of the remaining portion thereof, and a shoulder is provided therebetween, whereby the sensing body is fixedly connected to the internal space of said housing by abutting the shoulder thereof against a stopper portion provided in the internal space of the housing and the external surface thereof is placed in contact with the inner surface of the internal space of the housing. The pressure sensor having the above construction is highly sensitive and can accurately measure a pressure of a high pressure fluid, as the sensing body is firmly fixed to the inner surface of the housing and has a simple construction.