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公开(公告)号：US09790620B1
公开(公告)日：2017-10-17
申请号：US15400427
申请日：2017-01-06
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
Abstract: A method to reduce the work function of a carbon-coated lanthanum hexaboride (LaB6) cathode wherein the exposed tip of the cathode is exposed to moisture between two heat treatments is provided. The work function may be reduced by 0.01 eV or more.
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2.发明申请公开(公告)号：US20140097736A1
公开(公告)日：2014-04-10
申请号：US13644281
申请日：2012-10-04
Applicant: NUFLARE TECHNOLOGY, INC.
Inventor： Victor Katsap
CPC classification number: H01J1/14 , H01J1/148 , H01J9/04 , H01J37/065 , H01J2237/06308
Abstract: An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.
Abstract translation: 改进的阴极包括锥形发射器，其具有施加到发射体锥表面的碳基涂层，其中在发射体和碳涂层之间存在窄的环形间隙。 间隙防止碳涂层和结晶发射材料之间的直接接触，从而防止损坏相互作用并延长阴极的使用寿命。
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公开(公告)号：US20240290594A1
公开(公告)日：2024-08-29
申请号：US18176195
申请日：2023-02-28
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
Abstract: A method of assessing thermionic electron emitter quality, comprising heating a thermionic electron emitter to an emission temperature thereby causing the emitter to emit electrons, forming the electrons emitted by the emitter into an electron beam, directing the electron beam to an image detector thereby forming an image corresponding to electron emission from a surface of the emitter, and detecting a presence or absence in the image of a pair of intersecting bright band features, each band feature being formed from two parallel lines, the band features corresponding to crystal lattice planes of the emitter. The presence of one pair of intersecting bright band features indicates a single-crystal emitter. The absence of a pair of intersecting band features indicates an amorphous or contaminated emitter. The presence of more than a single pair of intersecting bright band features indicates a polycrystalline emitter. The method is particularly useful for rare-earth hexaboride emitters.
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4.发明授权公开(公告)号：US11823862B2
公开(公告)日：2023-11-21
申请号：US17565014
申请日：2021-12-29
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap , Chising Lai
CPC classification number: H01J37/265 , H01J37/28
Abstract: The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.
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公开(公告)号：US10714311B2
公开(公告)日：2020-07-14
申请号：US16179731
申请日：2018-11-02
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Yoshikuni Goshima , Victor Katsap , Rodney Kendall
IPC: H01J37/00 , H01J37/304 , G03F7/20 , H01J37/317 , H01J37/244
Abstract: An individual beam detector for multiple beams includes a thin film in which a passage hole smaller than a pitch between beams of multiple beams and larger than the diameter of a beam is formed and through which the multiple beams can penetrate, a support base to support the thin film in which an opening is formed under the region including the passage hole, and the width size of the opening is formed to have a temperature of the periphery of the passage hole higher than an evaporation temperature of impurities adhering to the periphery in the case that the thin film is irradiated with the multiple beams, and a sensor arranged, at the position away from the thin film by a distance based on which a detection target beam having passed the passage hole can be detected by the sensor as a detection value with contrast discernible.
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Patent Agency Ranking
6.发明授权公开(公告)号：US09165737B2
公开(公告)日：2015-10-20
申请号：US13644281
申请日：2012-10-04
Applicant: NuFlare Technology, Inc.
Inventor： Victor Katsap
CPC classification number: H01J1/14 , H01J1/148 , H01J9/04 , H01J37/065 , H01J2237/06308
Abstract: An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.
Abstract translation: 改进的阴极包括锥形发射器，其具有施加到发射体锥表面的碳基涂层，其中在发射体和碳涂层之间存在窄的环形间隙。 间隙防止碳涂层和结晶发射材料之间的直接接触，从而防止损坏相互作用并延长阴极的使用寿命。
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公开(公告)号：US12165834B2
公开(公告)日：2024-12-10
申请号：US18187966
申请日：2023-03-22
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
IPC: H01J37/22 , G01N23/2251 , H01J37/073 , H01J37/12 , H01J37/26
Abstract: The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
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公开(公告)号：US11562879B2
公开(公告)日：2023-01-24
申请号：US17021553
申请日：2020-09-15
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
IPC: H01J37/12 , H01J37/30 , H01J29/51 , H01J37/317
Abstract: An electrostatic beam transfer lens for a multi-beam apparatus that includes a series of multiple, successive electrodes, such that an aperture bore of each electrode is aligned along an electron gun axis and is configured to allow multiple beams to pass therethrough. The first electrode in the series is a cylindrical electrode configured to receive the multiple beams at an entrance plane. The first electrode has a bore length and a bore diameter such that a ratio of bore diameter/bore length
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公开(公告)号：US11901154B1
公开(公告)日：2024-02-13
申请号：US18178249
申请日：2023-03-03
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
IPC: H01J1/15 , H01J37/065 , H01J37/075
CPC classification number: H01J37/065 , H01J37/075
Abstract: An electron emission cathode which includes a base, a heater connected to the base, an electron emitter connected to the heater at a mounting location distal to the base, and a conical heat shield surrounding a portion of the heater, having a truncated cone shape comprising a narrow end oriented toward the base and a wide end oriented toward the electron emitter. The conical heat shield is configured to reflect heat radiated by the heater toward the electron emitter. The conical heat shield reduces an overheating required to bring the electron emitter to an emission temperature and reduces a heating power required to operate the cathode.
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公开(公告)号：US11640896B2
公开(公告)日：2023-05-02
申请号：US17319208
申请日：2021-05-13
Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
Inventor： Victor Katsap
IPC: H01J37/22 , H01J37/12 , G01N23/2251 , H01J37/073 , H01J37/26
Abstract: The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
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