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公开(公告)号：US09790620B1
公开(公告)日：2017-10-17
申请号：US15400427
申请日：2017-01-06
发明人： Victor Katsap
摘要： A method to reduce the work function of a carbon-coated lanthanum hexaboride (LaB6) cathode wherein the exposed tip of the cathode is exposed to moisture between two heat treatments is provided. The work function may be reduced by 0.01 eV or more.
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公开(公告)号：US11562879B2
公开(公告)日：2023-01-24
申请号：US17021553
申请日：2020-09-15
发明人： Victor Katsap
IPC分类号： H01J37/12 , H01J37/30 , H01J29/51 , H01J37/317
摘要： An electrostatic beam transfer lens for a multi-beam apparatus that includes a series of multiple, successive electrodes, such that an aperture bore of each electrode is aligned along an electron gun axis and is configured to allow multiple beams to pass therethrough. The first electrode in the series is a cylindrical electrode configured to receive the multiple beams at an entrance plane. The first electrode has a bore length and a bore diameter such that a ratio of bore diameter/bore length
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公开(公告)号：US20240290594A1
公开(公告)日：2024-08-29
申请号：US18176195
申请日：2023-02-28
发明人： Victor Katsap
摘要： A method of assessing thermionic electron emitter quality, comprising heating a thermionic electron emitter to an emission temperature thereby causing the emitter to emit electrons, forming the electrons emitted by the emitter into an electron beam, directing the electron beam to an image detector thereby forming an image corresponding to electron emission from a surface of the emitter, and detecting a presence or absence in the image of a pair of intersecting bright band features, each band feature being formed from two parallel lines, the band features corresponding to crystal lattice planes of the emitter. The presence of one pair of intersecting bright band features indicates a single-crystal emitter. The absence of a pair of intersecting band features indicates an amorphous or contaminated emitter. The presence of more than a single pair of intersecting bright band features indicates a polycrystalline emitter. The method is particularly useful for rare-earth hexaboride emitters.
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4.发明授权公开(公告)号：US11823862B2
公开(公告)日：2023-11-21
申请号：US17565014
申请日：2021-12-29
发明人： Victor Katsap , Chising Lai
CPC分类号： H01J37/265 , H01J37/28
摘要： The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.
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公开(公告)号：US10714311B2
公开(公告)日：2020-07-14
申请号：US16179731
申请日：2018-11-02
发明人： Yoshikuni Goshima , Victor Katsap , Rodney Kendall
IPC分类号： H01J37/00 , H01J37/304 , G03F7/20 , H01J37/317 , H01J37/244
摘要： An individual beam detector for multiple beams includes a thin film in which a passage hole smaller than a pitch between beams of multiple beams and larger than the diameter of a beam is formed and through which the multiple beams can penetrate, a support base to support the thin film in which an opening is formed under the region including the passage hole, and the width size of the opening is formed to have a temperature of the periphery of the passage hole higher than an evaporation temperature of impurities adhering to the periphery in the case that the thin film is irradiated with the multiple beams, and a sensor arranged, at the position away from the thin film by a distance based on which a detection target beam having passed the passage hole can be detected by the sensor as a detection value with contrast discernible.
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公开(公告)号：US11901154B1
公开(公告)日：2024-02-13
申请号：US18178249
申请日：2023-03-03
发明人： Victor Katsap
IPC分类号： H01J1/15 , H01J37/065 , H01J37/075
CPC分类号： H01J37/065 , H01J37/075
摘要： An electron emission cathode which includes a base, a heater connected to the base, an electron emitter connected to the heater at a mounting location distal to the base, and a conical heat shield surrounding a portion of the heater, having a truncated cone shape comprising a narrow end oriented toward the base and a wide end oriented toward the electron emitter. The conical heat shield is configured to reflect heat radiated by the heater toward the electron emitter. The conical heat shield reduces an overheating required to bring the electron emitter to an emission temperature and reduces a heating power required to operate the cathode.
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公开(公告)号：US11640896B2
公开(公告)日：2023-05-02
申请号：US17319208
申请日：2021-05-13
发明人： Victor Katsap
IPC分类号： H01J37/22 , H01J37/12 , G01N23/2251 , H01J37/073 , H01J37/26
摘要： The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
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公开(公告)号：US11615938B2
公开(公告)日：2023-03-28
申请号：US16723698
申请日：2019-12-20
发明人： John Hartley , Victor Katsap
摘要： A thermal field emitter, an apparatus, and a method for generating multiple beams for an e-beam tool are provided. The thermal field emitter includes an electron emitting portion configured to emit an electron beam and a nano-aperture array (NAA) having a plurality of openings. The NAA is positioned in a path of the electron beam. The NAA is configured to form multiple beams. The multiple beams include electrons from the electron beam that pass through the plurality of openings.
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公开(公告)号：US10573481B1
公开(公告)日：2020-02-25
申请号：US16203510
申请日：2018-11-28
发明人： Victor Katsap
摘要： An electron emission apparatus, an electron gun, and a method of fabrication of the electron gun are provided. The electron gun includes a cathode, a Wehnelt, and an anode. The cathode is configured to provide an electron beam. The Wehnelt has a bore. The bore is configured to pass the electron beam. The anode is disposed proximate to the cathode. The diameter of the bore of the Wehnelt and the offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship. The predetermined dimensional relationship is at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode.
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10.发明授权公开(公告)号：US12131883B2
公开(公告)日：2024-10-29
申请号：US18456997
申请日：2023-08-28
发明人： Victor Katsap , Chising Lai
CPC分类号： H01J37/265 , H01J37/28
摘要： A system for determining Schottky thermal field emission (TFE) usable current and brightness of a Schottky TFE source is provided, the system including: one or more processors, configured to: acquire and store in a memory a Schottky TFE emission image in a digital format; and determine Schottky TFE usable beam current and brightness for the based on experimentally developed algorithms that utilize usable current criteria and usable emission current density, the usable current criteria being generated based on properties of a central beam component and an outer beam component of Schottky TFE beam current.
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