GATHERING AND SAMPLING DEVICE AND INSPECTION APPARATUS

    公开(公告)号:US20180188138A1

    公开(公告)日:2018-07-05

    申请号:US15858829

    申请日:2017-12-29

    Abstract: A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.

    GAS ANALYSIS DEVICE AND METHOD FOR DETECTING SAMPLE GAS

    公开(公告)号:US20220404312A1

    公开(公告)日:2022-12-22

    申请号:US17806805

    申请日:2022-06-14

    Abstract: The present disclosure provides a gas analysis device and a method for detecting sample gas. The gas analysis device includes: an ion mobility spectrometer including an ion mobility tube, an ion gate, a plurality of electrodes, a suppression grid, and a Faraday plate sequentially disposed in the ion mobility tube, wherein the Faraday plate is configured to receive sample ions discharged from the suppression grid, and the Faraday plate is provided with a through hole; a mass spectrometer; a gate valve disposed between the Faraday plate and an ion inlet of the mass spectrometer; and a controller configured to control an opening or closing of the gate valve to allow the sample ions discharged from the suppression grid to flow into the mass spectrometer through the through hole of the Faraday plate when the gate valve is opened.

    Gathering and sampling device and inspection apparatus

    公开(公告)号:US10782211B2

    公开(公告)日:2020-09-22

    申请号:US15858829

    申请日:2017-12-29

    Abstract: A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.

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