公开(公告)号：US20110157673A1

公开(公告)日：2011-06-30

申请号：US13022896

申请日：2011-02-08

申请人： Osamu MITOMI ,  Yasunori Iwasaki ,  Yuji Hori ,  Kenji Aoki ,  Jungo Kondo

发明人： Osamu MITOMI ,  Yasunori Iwasaki ,  Yuji Hori ,  Kenji Aoki ,  Jungo Kondo

IPC分类号： G02F1/01

CPC分类号： G02F1/2255

摘要： An optical modulator includes an optical modulation substrate, an electrical length adjusting substrate, a package containing the substrates, and a plurality of input ports for inputting high frequency electrical signals. The optical modulation substrate includes a substrate body made of an electro-optic material, a ground electrode and a plurality of signal electrodes provided on the substrate body, optical waveguides propagating lights interacting with the signal electrodes, respectively, and electrode input ports inputting the high frequency electrical signals into the signal electrodes, respectively. The signal electrode includes an interacting part, an input end part provided between the electrode input port and interacting part, and a terminal part. The electrical length adjusting substrate includes conductive lines connected to the input ports for inputting the high frequency electrical signals, respectively. The conductive lines have electrical lengths different from each other for adjusting the phase differences among the ports.

摘要翻译： 光调制器包括光调制基板，电长度调节基板，包含基板的封装以及用于输入高频电信号的多个输入端口。 光调制基板包括由电光材料制成的基板主体，接地电极和设置在基板主体上的多个信号电极，分别与信号电极相互作用的光波导传播光和输入高电平的电极输入端 频率电信号分别进入信号电极。 信号电极包括相互作用部分，设置在电极输入端口和相互作用部分之间的输入端部分和端子部分。 电长度调节基板包括分别连接到用于输入高频电信号的输入端口的导线。 导线具有彼此不同的电长度，用于调节端口之间的相位差。

公开(公告)号：US08411349B2

公开(公告)日：2013-04-02

申请号：US13022896

申请日：2011-02-08

申请人： Osamu Mitomi ,  Yasunori Iwasaki ,  Yuji Hori ,  Kenji Aoki ,  Jungo Kondo

发明人： Osamu Mitomi ,  Yasunori Iwasaki ,  Yuji Hori ,  Kenji Aoki ,  Jungo Kondo

IPC分类号： G02F1/01 ,  G02F1/03 ,  H04B10/04

CPC分类号： G02F1/2255

摘要： An optical modulator includes an optical modulation substrate, an electrical length adjusting substrate, a package containing the substrates, and a plurality of input ports for inputting high frequency electrical signals. The optical modulation substrate includes a substrate body made of an electro-optic material, a ground electrode and a plurality of signal electrodes provided on the substrate body, optical waveguides propagating lights interacting with the signal electrodes, respectively, and electrode input ports inputting the high frequency electrical signals into the signal electrodes, respectively. The signal electrode includes an interacting part, an input end part provided between the electrode input port and interacting part, and a terminal part. The electrical length adjusting substrate includes conductive lines connected to the input ports for inputting the high frequency electrical signals, respectively. The conductive lines have electrical lengths different from each other for adjusting the phase differences among the ports.

摘要翻译： 光调制器包括光调制基板，电长度调节基板，包含基板的封装以及用于输入高频电信号的多个输入端口。 光调制基板包括由电光材料制成的基板主体，接地电极和设置在基板主体上的多个信号电极，分别与信号电极相互作用的光波导传播光和输入高电平的电极输入端 频率电信号分别进入信号电极。 信号电极包括相互作用部分，设置在电极输入端口和相互作用部分之间的输入端部分和端子部分。 电长度调节基板包括分别连接到用于输入高频电信号的输入端口的导线。 导线具有彼此不同的电长度，用于调节端口之间的相位差。

公开(公告)号：US20110262071A1

公开(公告)日：2011-10-27

申请号：US13178964

申请日：2011-07-08

申请人： Osamu Mitomi ,  Kenji Aoki ,  Yuji Hori ,  Jungo Kondo ,  Yasunori Iwasaki

发明人： Osamu Mitomi ,  Kenji Aoki ,  Yuji Hori ,  Jungo Kondo ,  Yasunori Iwasaki

IPC分类号： G02F1/035 ,  G02B6/125

CPC分类号： G02B6/125 ,  G02B6/1228 ,  G02B6/29352 ,  G02B2006/12159 ,  G02F1/0508

摘要： An optical waveguide is formed on a ferroelectric substrate having a thickness of 20 μm or less by diffusion of a dopant or ion exchange. The optical waveguide has a non-branched section 2a operating on single mode and a pair of branched sections branched from the non-branched section 2a. Each of the branched sections has a connecting part 7 extending from a branching end 10 and a multi mode propagating part 8 continuously formed from the connecting part 7. The multi mode propagating part 8 has a width “m” larger than a width “t” of the non-branched section. A width “p” of the connecting part increases from the non-branched section 2a toward the multi mode propagating part 8.

摘要翻译： 通过掺杂剂或离子交换剂的扩散，在厚度为20μm以下的强电介质基板上形成光波导。 光波导具有在单模上工作的非分支部分2a和从非分支部分2a分支的一对分支部分。 每个分支部分具有从分支端10延伸的连接部分7和从连接部分7连续形成的多模传播部分8.多模传播部分8具有大于宽度“t”的宽度“m” 的非支化部分。 连接部的宽度“p”从非分支部2a向多模传播部8增大。

公开(公告)号：US08233752B2

公开(公告)日：2012-07-31

申请号：US12846076

申请日：2010-07-29

申请人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Kenji Aoki

发明人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Kenji Aoki

IPC分类号： G02F1/35 ,  G02B6/42 ,  G02B6/10

CPC分类号： G02B6/125 ,  G02F1/225 ,  G02F2001/212

摘要： An optical waveguide device includes a substrate of a ferroelectric material, at least a pair of electrodes 4A, 4B provided on one main face of the substrate, and a channel-type optical waveguide 5A formed in a gap 1 of the pair of the electrodes. The optical waveguide 5A has a curved part 15. A central line C of the gap 1 is provided outside of a center line WC of the optical waveguide with respect to the center O of curvature of the curved part 15.

摘要翻译： 光波导器件包括铁电材料的基板，设置在基板的一个主面上的至少一对电极4A，4B，以及形成在该对电极的间隙1中的沟道型光波导5A。 光波导5A具有弯曲部15.间隙1的中心线C相对于弯曲部15的曲率中心O设置在光波导的中心线WC的外侧。

公开(公告)号：US20100329601A1

公开(公告)日：2010-12-30

申请号：US12846076

申请日：2010-07-29

申请人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Kenji Aoki

发明人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Kenji Aoki

IPC分类号： G02F1/035

CPC分类号： G02B6/125 ,  G02F1/225 ,  G02F2001/212

摘要： An optical waveguide device includes a substrate of a ferroelectric material, at least a pair of electrodes 4A, 4B provided on one main face of the substrate, and a channel-type optical waveguide 5A formed in a gap 1 of the pair of the electrodes. The optical waveguide 5A has a curved part 15. A central line C of the gap 1 is provided outside of a center line WC of the optical waveguide with respect to the center O of curvature of the curved part 15.

摘要翻译： 光波导器件包括铁电材料的基板，设置在基板的一个主面上的至少一对电极4A，4B，以及形成在该对电极的间隙1中的沟道型光波导5A。 光波导5A具有弯曲部15.间隙1的中心线C相对于弯曲部15的曲率中心O设置在光波导的中心线WC的外侧。

公开(公告)号：US07764851B2

公开(公告)日：2010-07-27

申请号：US12260276

申请日：2008-10-29

申请人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Hiroki Kobayashi

发明人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Hiroki Kobayashi

IPC分类号： G02F1/295

CPC分类号： G02F1/2255 ,  G02B6/4214 ,  G02B2006/12104 ,  G02B2006/12142 ,  G02F2203/21

摘要： An optical modulator has an optical waveguide substrate having a pair of principal surfaces, a pair of side surfaces an incident face and exit face of light, the substrate being composed of a ferroelectric material; a channel optical waveguide having at least a pair of branch sections, a multiplexing section of the branch sections and an exit section provided on the downstream of the multiplexing section, the waveguide being formed on the principal surface of the optical waveguide substrate; a modulation electrode electrodes for applying a signal voltage for modulating light propagating in the branch sections; and a reflective groove for reflecting leaked light of off-mode emitted from the multiplexing section and emitting the light from a principal surface of the optical waveguide substrate. An operating point of the optical modulator is controlled by changing a DC bias applied on the modulation electrode based on optical output of the leaked light of off-mode.

摘要翻译： 光调制器具有光波导基板，其具有一对主表面，一对侧表面，入射面和光出射面，该基板由铁电材料构成; 具有至少一对分支部分的通道光波导，分支部分的复用部分和设置在复用部分的下游的出口部分，波导形成在光波导基板的主表面上; 用于施加用于调制在所述分支部分中传播的光的信号电压的调制电极电极; 以及反射槽，用于反射从多路复用部分发射的偏离模式的泄漏光，并从光波导基板的主表面发射光。 通过根据偏离模式的泄漏光的光输出改变施加在调制电极上的直流偏压来控制光调制器的工作点。

公开(公告)号：US20090142015A1

公开(公告)日：2009-06-04

申请号：US12260276

申请日：2008-10-29

申请人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Hiroki Kobayashi

发明人： Akiyoshi Ide ,  Jungo Kondo ,  Osamu Mitomi ,  Yasunori Iwasaki ,  Hiroki Kobayashi

IPC分类号： G02F1/035

CPC分类号： G02F1/2255 ,  G02B6/4214 ,  G02B2006/12104 ,  G02B2006/12142 ,  G02F2203/21

摘要： An optical modulator 20 has an optical waveguide substrate 1 having a pair of principal surfaces 1a, 1c, a pair of side surfaces 1b and an incident face 1d and exit face 1e of light, the substrate being composed of a ferroelectric material; a channel optical waveguide 4 having at least a pair of branch sections 4b, a multiplexing section 6 of the branch sections and an exit section 4c provided on the downstream of the multiplexing section, the waveguide being formed on the principal surface 1a; a modulation electrode 2, 3 for applying a signal voltage for modulating light propagating in the branch sections; and a reflective groove 7 for reflecting leaked light of off-mode emitted from the multiplexing section 6 and emitting the light from the one principal surface 1a. An operating point of the optical modulator is controlled by changing a DC bias applied on the modulation electrode based on optical output of the leaked light of off-mode.

摘要翻译： 光调制器20具有光波导基板1，该光波导基板1具有一对主表面1a，1c，一对侧表面1b和入射面1d和光出射面1e，该基板由铁电材料构成; 具有至少一对分支部分4b的通道光波导4，分支部分的多路复用部分6和设置在多路复用部分下游的出口部分4c，波导形成在主表面1a上; 调制电极2,3，用于施加用于调制在分支部分中传播的光的信号电压; 以及反射槽7，用于反射从多路复用部分6发射的偏离模式的泄漏光，并从一个主表面1a发射光。 通过根据偏离模式的泄漏光的光输出改变施加在调制电极上的直流偏压来控制光调制器的工作点。

公开(公告)号：US08686622B2

公开(公告)日：2014-04-01

申请号：US13386854

申请日：2010-07-21

申请人： Hiroki Kobayashi ,  Yuji Hori ,  Yasunori Iwasaki

发明人： Hiroki Kobayashi ,  Yuji Hori ,  Yasunori Iwasaki

IPC分类号： H01L41/09 ,  H01L41/22

CPC分类号： H03H3/08 ,  Y10T29/42

摘要： The composite substrate is a substrate used to manufacture an acoustic wave device, and includes a support substrate, a piezoelectric substrate, and a adhesive layer with which the support substrate and the piezoelectric substrate are bonded to each other. In the composite substrate, assuming that a surface of the piezoelectric substrate that is bonded to the support substrate is defined as a first surface and a surface at the side opposite to the first surface is defined as a second surface, the piezoelectric substrate is formed such that the first surface is inside the second surface when the first surface is projected onto the second surface in a direction perpendicular to the second surface. In other words, the composite substrate has an outer peripheral surface that is formed such that the circumference thereof increases toward the top surface of the piezoelectric substrate.

摘要翻译： 复合衬底是用于制造声波器件的衬底，并且包括支撑衬底，压电衬底和支撑衬底和压电衬底彼此结合的粘合层。 在复合基板中，假定将与支撑基板接合的压电基板的表面定义为第一表面，将与第一表面相反的一侧的表面定义为第二表面，则形成压电基板 当第一表面在垂直于第二表面的方向上投影到第二表面上时，第一表面在第二表面内。 换句话说，复合基板具有外周面，其形成为使得其周向朝向压电基板的顶面增大。

公开(公告)号：US08729771B2

公开(公告)日：2014-05-20

申请号：US13253156

申请日：2011-10-05

申请人： Hiroki Kobayashi ,  Takanori Sakurai ,  Yuji Hori ,  Yasunori Iwasaki

发明人： Hiroki Kobayashi ,  Takanori Sakurai ,  Yuji Hori ,  Yasunori Iwasaki

IPC分类号： H03H9/05 ,  H03H9/02

CPC分类号： H03H9/0585 ,  H03H3/10 ,  H03H9/02574 ,  H03H9/02622 ,  Y10T29/42

摘要： According to a composite substrate manufacturing method of the present invention, (a) a piezoelectric substrate having minute asperities formed in a rear surface thereof, and a support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate are prepared, (b) a filler is applied to the rear surface 11a to fill the minute asperities, thereby forming a filling layer, (c) a surface of the filling layer is mirror-polished to such an extent that an arithmetic mean roughness Ra of the surface of the filling layer is smaller than an arithmetic mean roughness Ra of the rear surface 11a in a state of above (a), and (d) the surface of the filling layer and a surface of the support substrate are bonded to each other with an adhesive layer interposed therebetween, thereby forming a composite substrate.

摘要翻译： 根据本发明的复合基板的制造方法，（a）在其后表面形成有微小的凹凸的压电基板和具有比压电基板的热膨胀系数小的支撑基板，（b）填料 施加到后表面11a以填充微小的凹凸，从而形成填充层，（c）将填充层的表面镜面抛光至使填充层的表面的算术平均粗糙度Ra为 小于上述（a）的状态下的后表面11a的算术平均粗糙度Ra，（d）填充层的表面和支撑基板的表面之间粘合层彼此接合， 从而形成复合基板。

公开(公告)号：US08421314B2

公开(公告)日：2013-04-16

申请号：US12714666

申请日：2010-03-01

申请人： Hiroki Kobayashi ,  Yuji Hori ,  Yasunori Iwasaki

发明人： Hiroki Kobayashi ,  Yuji Hori ,  Yasunori Iwasaki

IPC分类号： H01L41/04

CPC分类号： H03H9/02015 ,  H03H3/02 ,  H03H9/02574 ,  Y10T29/42

摘要： A composite substrate is provided, including a piezoelectric substrate which is capable of transmitting an elastic wave, and a support substrate, which has a smaller thermal expansion coefficient than that of the piezoelectric substrate, bonded to each other. The in-plane maximum thermal strain amount, which is the largest thermal strain amount in the plane of the composite substrate, has a minimum value and a maximum value when the piezoelectric substrate and the support substrate are relatively rotated 0° to 360°, and the piezoelectric substrate and the support substrate are bonded to each other so that the in-plane maximum thermal strain amount has the minimum value or a value in the vicinity thereof.

摘要翻译： 提供一种复合基板，包括能够传递弹性波的压电基板和具有比压电基板的热膨胀系数小的热膨胀系数的支撑基板。 当压电基板和支撑基板相对旋转0°至360°时，作为复合基板的平面中最大热应变量的面内最大热应变量具有最小值和最大值，以及 压电基板和支撑基板彼此接合，使得面内最大热应变量具有最小值或其附近的值。