摘要:
According to a composite substrate manufacturing method of the present invention, (a) a piezoelectric substrate having minute asperities formed in a rear surface thereof, and a support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate are prepared, (b) a filler is applied to the rear surface 11a to fill the minute asperities, thereby forming a filling layer, (c) a surface of the filling layer is mirror-polished to such an extent that an arithmetic mean roughness Ra of the surface of the filling layer is smaller than an arithmetic mean roughness Ra of the rear surface 11a in a state of above (a), and (d) the surface of the filling layer and a surface of the support substrate are bonded to each other with an adhesive layer interposed therebetween, thereby forming a composite substrate.
摘要:
A supporting substrate and a piezoelectric substrate are prepared. A surface of the supporting substrate is bonded to the backside of the piezoelectric substrate with an organic adhesive layer interposed therebetween to form a laminated substrate. Subsequently, a peripheral surface of the laminated substrate is ground such that a peripheral surface of the piezoelectric substrate, a peripheral surface of the organic adhesive layer, and a peripheral surface of the supporting substrate on the side of the organic adhesive layer are made flush with each other. Subsequently, the surface of the piezoelectric substrate is polished to reduce the thickness of the piezoelectric substrate and performing mirror polishing of the surface.
摘要:
A light controlling means includes a shutter member and an actuator. The shutter member is disposed in a slit and has a function to shut off signal light propagated in the light path of an optical fiber array. The actuator is constructed to drive and move the shutter member in a vertical direction. The shutter member is fixed to one end of the actuator and positioned substantially in alignment with an inclination angle of the slit. Further, a base member of the shutter member is made from transparent quartz glass. A light reflecting film is formed on a portion of one of the plate surfaces of the shutter member, on a surface opposite the optical axis of a light exit portion.
摘要:
When a surface of a filter member on a multilayer film is defined as a first surface, a surface of the filter member on an quartz substrate as a second surface, an inner wall surface of a slit which faces the first surface of the filter member as a first inner wall surface, and an inner wall surface of the slit which faces the second surface of the filter member as a second inner wall surface, one or more of the first inner wall surface and the second inner wall surface of the slit, and the second surface of the filter member do not lie parallel to the first surface of the filter member.
摘要:
An oil hose comprised of (i) an inner layer made of a vulcanized hydrogenated nitrile rubber composition, an intermediate layer made of a vulcanized unsaturated nitrile-conjugated diene copolymer rubber composition, and an outer layer made of a vulcanized ozone-resistant rubber composition, or (ii) an inner layer made of a vulcanized rubber composition comprising a hydrogenated copolymer rubber composed of an unsaturated nitrile, a conjugated diene and a copolymerizable ethylenically unsaturated monomer, and an outer layer made of a vulcanized ozone-resistant rubber composition. This hose has good oil resistance, thermal resistance and copper ion resistance, and caulking in the portion thereof connected to a copper pipe is strong and oil leakage at a low temperature is prevented.
摘要:
A method for forming a polycrystalline silicon film includes the steps of: forming at least one step on a surface of an insulating substrate; depositing a first amorphous silicon film on the substrate; annealing the first amorphous silicon film so as to change the first amorphous silicon film into a first polycrystalline silicon film; patterning the first polycrystalline silicon film to form a patterned film at the at least one step of the insulating substrate, the patterned film having at least one side face; depositing a second amorphous silicon film on the insulating substrate so as to cover the patterned film; and annealing the second amorphous silicon film so as to change the second amorphous silicon film into a second polycrystalline silicon film by using the at least one side face of the pattered film as a seed crystal for lateral solid-phase crystallization.
摘要:
A composite substrate is a piezoelectric substrate that is transparent to light used for photolithography, and a supporting substrate for supporting the piezoelectric substrate are bonded together via an organic adhesive layer. Where at least one of the supporting substrate and the organic adhesive layer of the composite substrate absorbs light used for photolithography.
摘要:
A supporting substrate and a piezoelectric substrate are prepared. A surface of the supporting substrate is bonded to the backside of the piezoelectric substrate with an organic adhesive layer interposed therebetween to form a laminated substrate. Subsequently, a peripheral surface of the laminated substrate is ground such that a peripheral surface of the piezoelectric substrate, a peripheral surface of the organic adhesive layer, and a peripheral surface of the supporting substrate on the side of the organic adhesive layer are made flush with each other. Subsequently, the surface of the piezoelectric substrate is polished to reduce the thickness of the piezoelectric substrate and performing mirror polishing of the surface.
摘要:
An optical waveguide is formed on a ferroelectric substrate having a thickness of 20 μm or less by diffusion of a dopant or ion exchange. The optical waveguide has a non-branched section 2a operating on single mode and a pair of branched sections branched from the non-branched section 2a. Each of the branched sections has a connecting part 7 extending from a branching end 10 and a multi mode propagating part 8 continuously formed from the connecting part 7. The multi mode propagating part 8 has a width “m” larger than a width “t” of the non-branched section. A width “p” of the connecting part increases from the non-branched section 2a toward the multi mode propagating part 8.
摘要:
An optical waveguide device includes a substrate of a ferroelectric material, at least a pair of electrodes 4A, 4B provided on one main face of the substrate, and a channel-type optical waveguide 5A formed in a gap 1 of the pair of the electrodes. The optical waveguide 5A has a curved part 15. A central line C of the gap 1 is provided outside of a center line WC of the optical waveguide with respect to the center O of curvature of the curved part 15.