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公开(公告)号：US11784000B2
公开(公告)日：2023-10-10
申请号：US17472490
申请日：2021-09-10
Inventor： Kazushi Yoshida , Yosuke Hagihara , Takumi Taura
IPC: H01G4/008
CPC classification number: H01G4/008
Abstract: A capacitor includes a silicon substrate, a conductor layer, and a dielectric layer. The silicon substrate has a principal surface including a capacitance generation region and a non-capacitance generation region. The silicon substrate has a porous part provided in a thickness direction in the capacitance generation region. The conductor layer has a surface layer part at least covering part of a surface of the capacitance generation region and a filling part filled in at least part of fine pores of the porous part. The dielectric layer is provided between an inner surface of the fine pores and the filling part.
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公开(公告)号：US09550663B2
公开(公告)日：2017-01-24
申请号：US14764572
申请日：2014-02-03
Inventor： Kazuo Goda , Takumi Taura , Shinichi Kishimoto , Hideki Ueda , Takeshi Mori
IPC: H01L29/84 , B81B3/00 , G01P15/125 , G01P15/08
CPC classification number: B81B3/0008 , B81B2201/0235 , G01P15/125 , G01P2015/0834 , H01L29/84
Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.
Abstract translation: MEMS器件包括可移动部分，框架，光束和电极基板。 框架围绕可动部分的周围。 梁从框架的至少一部分延伸，并连接到可移动部分。 电极基板包括固定电极，延伸电极和基板部分。 在面向摆动部的区域的至少一部分中，在电极基板上形成固定电极。 延伸电极连接到固定电极，并且在面向轴的区域的至少一部分中形成在电极基板上。
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公开(公告)号：US20210407734A1
公开(公告)日：2021-12-30
申请号：US17472490
申请日：2021-09-10
Inventor： Kazushi Yoshida , Yosuke Hagihara , Takumi Taura
IPC: H01G4/008
Abstract: A capacitor includes a silicon substrate, a conductor layer, and a dielectric layer. The silicon substrate has a principal surface including a capacitance generation region and a non-capacitance generation region. The silicon substrate has a porous part provided in a thickness direction in the capacitance generation region. The conductor layer has a surface layer part at least covering part of a surface of the capacitance generation region and a filling part filled in at least part of fine pores of the porous part. The dielectric layer is provided between an inner surface of the fine pores and the filling part.
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公开(公告)号：US10088497B2
公开(公告)日：2018-10-02
申请号：US15073645
申请日：2016-03-18
Inventor： Takeshi Mori , Keisuke Kuroda , Hitoshi Yoshida , Kazuo Goda , Takumi Taura , Hideki Ueda
IPC: G01P21/00 , G01P15/08 , G01P15/125 , G01P15/18
Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.
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