USE OF PERFLUOROALKANES IN VACUUM ULTRAVIOLET APPLICATIONS
    9.
    发明申请
    USE OF PERFLUOROALKANES IN VACUUM ULTRAVIOLET APPLICATIONS 审中-公开
    在真空紫外线应用中使用全氟烷烃

    公开(公告)号:US20090079953A1

    公开(公告)日:2009-03-26

    申请号:US12117256

    申请日:2008-05-08

    IPC分类号: G03B27/72

    摘要: This invention concerns liquid perfluoro-n-alkanes for use in applications demanding high transparency at UV wavelengths ranging from about 150 to 165 nm, especially 157 nm. Uses include optical couplants, optical cements, optical elements, optical inspection media for photolithography at 157 nm exposure wavelength.

    摘要翻译: 本发明涉及用于在约150至165nm,特别是157nm的UV波长下要求高透明度的应用中的液体全氟正烷烃。 用途包括光学耦合剂,光学水泥,光学元件,用于157nm曝光波长的光刻的光学检查介质。