High frequency microelectronics package
    8.
    发明授权
    High frequency microelectronics package 有权
    高频微电子封装

    公开(公告)号:US06172412B2

    公开(公告)日:2001-01-09

    申请号:US09220133

    申请日:1998-12-23

    IPC分类号: H01L2940

    摘要: A high frequency microelectronic package suitable for high-frequency microelectronic devices includes a base which is at least partially conductive and attached to an RF substrate with a cavity formed at its center. The base may be metal or ceramic with a metal layer deposited thereon. A pattern of conductive paths for providing interconnection from the inside to the outside of the package are formed on the surface of the RF substrate. These conductive patterns are designed to have a constant impedance when uncovered, regardless of the dielectric property of the material used to cover the conductive patterns. Namely, a sealing cap or a lid, made from a variety of dielectric materials, may be attached to the RF substrate by a non-conductive adhesive, such as a polymer adhesive or low temperature seal glass, to seal the package once the microelectronic device has been mounted inside.

    摘要翻译: 适用于高频微电子器件的高频微电子封装包括至少部分导电并且附接到RF衬底的基底,其中心形成有空腔。 基底可以是金属或陶瓷,其上沉积有金属层。 在RF基板的表面上形成用于从封装的内部向外部提供互连的导电路径的图案。 这些导电图案被设计为当未覆盖时具有恒定的阻抗,而与用于覆盖导电图案的材料的介电性质无关。 也就是说,由各种介电材料制成的密封盖或盖子可以通过非导电粘合剂(例如聚合物粘合剂或低温密封玻璃)附接到RF基板上,以密封包装,一旦微电子器件 已经安装在里面