公开(公告)号：US6099386A

公开(公告)日：2000-08-08

申请号：US340404

申请日：1999-06-28

申请人： Pei-Wei Tsai ,  Huan-Jen Tseng ,  Chih-Hsien Chang ,  Yi-Hua Chin

发明人： Pei-Wei Tsai ,  Huan-Jen Tseng ,  Chih-Hsien Chang ,  Yi-Hua Chin

IPC分类号： B24B37/04 ,  B24B49/10 ,  B24B57/02 ,  H01L21/00 ,  B24B29/00

CPC分类号： H01L21/67253 ,  B24B37/04 ,  B24B49/10 ,  B24B57/02

摘要： The present invention provides a control device for maintaining a chemical mechanical polishing (CMP) machine in a wet mode, the CMP machine comprising a polishing pad, a slurry sprinkler for sprinkling liquid or deionized water, and at least one carrier head, the control device comprising a sensor positioned on the CMP machine for sensing the operational status of the slurry sprinkler and generating a corresponding sensing signal; and a control unit electrically connected to the sensor for measuring the time period over which the slurry sprinkler is closed wherein when the measured time period exceeds a predetermined length, the control unit will either send a warning signal or turn on the slurry sprinkler to sprinkle liquid onto the polishing pad according to a predetermined process so as to maintain the polishing pad in a wet mode.

摘要翻译： 本发明提供了一种用于在湿模式下保持化学机械抛光（CMP）机器的控制装置，所述CMP机器包括抛光垫，用于喷洒液体或去离子水的浆料喷洒器，以及至少一个载体头，所述控制装置 包括位于所述CMP机器上的用于感测所述浆料喷洒器的操作状态并产生相应感测信号的传感器; 以及控制单元，电连接到所述传感器，用于测量所述浆料喷洒器关闭的时间段，其中当所测量的时间段超过预定长度时，所述控制单元将发送警告信号或者打开所述浆料喷洒器以喷洒液体 按照预定的处理在抛光垫上，以便将抛光垫保持在湿模式。

公开(公告)号：US6130433A

公开(公告)日：2000-10-10

申请号：US303598

申请日：1999-05-03

申请人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Dong-Tay Tsai ,  Chih-Hsien Chang

发明人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Dong-Tay Tsai ,  Chih-Hsien Chang

IPC分类号： H01J37/00 ,  H01J37/317

CPC分类号： H01J37/08 ,  H01J37/18 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/1825 ,  H01J2237/31701

摘要： The present invention relates to an ion source chamber of a high energy implanter. The ion source chamber comprises a main chamber for generating ions for ion implantation, a vent-pipe having two open ends, one end of the vent-pipe being connected to the main chamber for releasing air from the main chamber, a releasing valve connected to another end of the vent-pipe for releasing the air in the main chamber when the pressure of the air in the main chamber exceeds a predetermined pressure, and a filtering device installed between the vent-pipe and the releasing valve for filtering impurities contained in the air carried by the vent-pipe so as to prevent the impurities from falling into the releasing valve.

摘要翻译： 本发明涉及高能注入机的离子源室。 离子源室包括用于产生用于离子注入的离子的主室，具有两个开放端的排气管，排气管的一端连接到主室，用于从主室释放空气，释放阀连接到 当主室中的空气的压力超过预定压力时，用于释放主室中的空气的排气管的另一端;以及安装在通气管和释放阀之间的过滤装置，用于过滤包含在主室中的杂质 由排气管携带的空气，以防止杂质落入释放阀。

公开(公告)号：US5892232A

公开(公告)日：1999-04-06

申请号：US735981

申请日：1996-10-25

申请人： Pei-Wei Tsai ,  Tzu-Hsin Huang ,  Hua-Jen Tseng ,  Min-Huei Lin

发明人： Pei-Wei Tsai ,  Tzu-Hsin Huang ,  Hua-Jen Tseng ,  Min-Huei Lin

IPC分类号： H01J27/08 ,  H01J27/00

CPC分类号： H01J27/08

摘要： An arc chamber including a reaction chamber, a filament element used to generate electrons, a first power supply means set for providing power to the filament element, a second power supply means utilized for creating a potential to increase the ionization efficiency, a plurality of gas injected openings set to inject suitable gas into the reaction chamber and be ionized in a gaseous plasma by impact from electrons, a first filament insulator, and three second filament insulators used for isolation. The first filament insulator includes a truncated corn portion and a ring portion. The truncated corn portion has a hole formed threrethrough itself. The ring portion is coaxially connected to the smaller surface of the truncated corn portion. The second filament insulator includes a truncated corn portion and two ring portions. Similarily, the truncated corn portion has a hole through formed therethrough. The ring portions are respectively coaxially connected to the two surfaces of the truncated corn portion. In the preferred embodiment, three first filament insulators and one second filament insulator are set on the filament element for isolation. The filament insulators are screwed into the filament element and exactly attached on the side wall of the reaction chamber.

摘要翻译： 包括反应室，用于产生电子的灯丝元件的电弧室，用于向灯丝元件供电的第一电源装置，用于产生提高电离效率的电位的第二电源装置，多个气体 注入的开口设置成将合适的气体注入反应室，并通过来自电子的冲击，第一细丝绝缘体和用于隔离的三个第二长丝绝缘体在气态等离子体中离子化。 第一长丝绝缘体包括截顶玉米部分和环部分。 截断的玉米部分具有自身形成的孔。 环部分同轴连接到截顶玉米部分的较小表面。 第二长丝绝缘体包括截顶玉米部分和两个环部分。 类似地，截头玉米部分具有通过其形成的孔。 环部分别同轴地连接到截顶玉米部分的两个表面。 在优选实施例中，将三个第一灯丝绝缘体和一个第二灯丝绝缘体设置在灯丝元件上用于隔离。 灯丝绝缘子拧入灯丝元件并精确地附着在反应室的侧壁上。

公开(公告)号：US06299218B1

公开(公告)日：2001-10-09

申请号：US09262065

申请日：1999-03-04

申请人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Chun-Chieh Lee ,  Gwo-Yuh Yang

发明人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Chun-Chieh Lee ,  Gwo-Yuh Yang

IPC分类号： F16L2700

CPC分类号： H01L21/67017 ,  F16L27/02

摘要： A structure for connecting fluid channel of fluid delivery system is disclosed. This connecting structure limits the length of the flow-guiding pipe extending into the delivery channel, to reduce particle contaminates and the probability of crack. The present pipe union connecting structure comprises a first pipe, a second pipe mounted to the first pipe, and an inner pipe extending from the first pipe into the second pipe with a certain extending length. The extending length of the inner pipe is less than the proportion of the minimum distance between the inner wall of the second pipe and the outlet of the inner pipe when standstill, to the tangent value of a certain angle &thgr;, which is the maximum inclined angle between the second pipe and the inner pipe.

摘要翻译： 公开了一种用于连接流体输送系统的流体通道的结构。 这种连接结构限制了延伸到输送通道中的导流管的长度，以减少颗粒污染和裂纹的可能性。 本管接头连接结构包括第一管，安装到第一管的第二管和从第一管延伸到具有一定延伸长度的第二管中的内管。 内管的延伸长度小于当静止时第二管的内壁和内管的出口之间的最小距离与一定角度θ（其是最大倾斜角度）的切线值的比例 在第二管和内管之间。

公开(公告)号：US6019664A

公开(公告)日：2000-02-01

申请号：US281944

申请日：1999-03-31

申请人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Chun-Chieh Lee ,  Dong-Tay Tsai

发明人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Chun-Chieh Lee ,  Dong-Tay Tsai

IPC分类号： G01B5/06 ,  B24B49/00

CPC分类号： G01B5/06

摘要： A height gauge device for wafer, which is mounted under a cooling water pipe of a back-grinding machine; the device comprises a height gauge box, a measuring rod, a L-shaped linking rod and a resilient member; a signal sensor is mounted inside the height gauge box for measuring the height of a wafer; both ends of the measuring rod are connected with the signal sensor and the L-shaped linking rod respectively; the L-shaped linking rod is mounted with a probing needle; the resilient member is mounted between the L-shaped linking and the cooling water pipe; in height gauging operation, the probing needle on the L-shaped linking needle should be raised first so as to put a wafer under the probing needle, and to have the probing needle pressed against the wafer by means of the resilient force of the resilient member; consequently, the resilient member is subject to elastic fatigue or break; the resilient member of the height gauge device can be replaced directly without opening the height box so as to save time and maintenance cost.

摘要翻译： 一种用于晶片的高度计装置，安装在背磨机的冷却水管下; 该装置包括高度计箱，测量杆，L形连杆和弹性构件; 信号传感器安装在高度计盒内部，用于测量晶片的高度; 测量杆的两端分别与信号传感器和L形连杆相连; L型连杆安装有探针; 弹性件安装在L形连接件和冷却水管之间; 在高度测量操作中，应首先抬起L形连接针上的探针，以将晶片放置在探针下方，并使探针通过弹性构件的弹力将其推压到晶片上 ; 因此，弹性构件遭受弹性疲劳或断裂; 可以直接更换高度计装置的弹性构件而不打开高度盒，以节省时间和维护成本。

公开(公告)号：US08660322B2

公开(公告)日：2014-02-25

申请号：US13218411

申请日：2011-08-25

申请人： Pei-Wei Tsai ,  Muhammad Khurram Khan

发明人： Pei-Wei Tsai ,  Muhammad Khurram Khan

IPC分类号： G06K9/62

CPC分类号： G06K9/00892 ,  G06K9/685 ,  H04L63/0861 ,  H04L2463/082

摘要： The passive continuous authentication method uses biometric feedback to perform the authentication processes. Computer software and sensors are provided to acquire, memorize, and authenticate both the user's hard (facial) and soft (clothing) biometric information. A registration phase compels the user to register his/her face image into a registration database. Subsequently, the system permits the user to login the system based on facial recognition of the image presented by an attached webcam of the system. During a computing session the system repetitively authenticates the user's identity by comparing the user's acquired face image (hard biometric) to the registered face image in the database. A clothes color histogram (soft biometric) is also computed. The hard biometric recognition mainly decides the authentication result. Otherwise, clothes color histogram matching takes place to decide the result. When the user leaves the terminal the screen locks up. Successful authentication unlocks the screen upon user return.

摘要翻译： 被动连续认证方法使用生物特征反馈来执行认证过程。 提供计算机软件和传感器来获取，记忆和认证用户的硬（面部）和软（服装）生物特征信息。 注册阶段迫使用户将他/她的脸部图像注册到注册数据库中。 随后，系统允许用户基于由系统的附属网络摄像机呈现的图像的面部识别来登录系统。 在计算会话期间，系统通过将用户获取的面部图像（硬生物测定）与数据库中登记的面部图像进行比较来重复地认证用户的身份。 还计算了衣服颜色直方图（软生物特征）。 硬生物识别主要决定认证结果。 否则，衣服颜色直方图匹配发生以决定结果。 当用户离开终端时屏幕锁定。 成功的认证在用户返回时解锁屏幕。

公开(公告)号：US06291827B1

公开(公告)日：2001-09-18

申请号：US09276865

申请日：1999-03-26

申请人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Dong-Tay Tsai ,  Fu-Chih Huang

发明人： Pei-Wei Tsai ,  Hua-Jen Tseng ,  Dong-Tay Tsai ,  Fu-Chih Huang

IPC分类号： H01J37317

CPC分类号： H01J37/3171 ,  H01J2237/08

摘要： A novel insulating apparatus for a conductive line is disclosed. The proposed insulating apparatus can be applied to various conductive lines with different shapes. The problem of short circuit can be solved by the present insulating apparatus with the novel connecting configuration. The present invention comprises a plurality of insulator rings worn on the conductive line in series, wherein the insulator rings are annular cylinders. Each of the annular cylinders has an outer diameter larger than the inner diameter of the ones next to it. In addition, each of the annular cylinders has a length sized according to the desired flexibility of the conductive line.

摘要翻译： 公开了一种用于导线的新型绝缘装置。 所提出的绝缘装置可以应用于具有不同形状的各种导线。 本发明的绝缘装置具有新颖的连接结构，可以解决短路问题。 本发明包括串联在导线上的多个绝缘体环，其中绝缘环是环形圆筒。 每个环形圆柱体的外径大于其旁边的内径。 此外，每个环形圆柱体具有根据导电线的期望的柔性来定尺寸的长度。

公开(公告)号：US5942041A

公开(公告)日：1999-08-24

申请号：US714217

申请日：1996-09-16

申请人： Yung-Tsun Lo ,  Tzu-Hsin Huang ,  Hua-Jen Tseng ,  Pei-Wei Tsai

发明人： Yung-Tsun Lo ,  Tzu-Hsin Huang ,  Hua-Jen Tseng ,  Pei-Wei Tsai

IPC分类号： C23C14/50 ,  C23C16/458 ,  H01L21/687 ,  C23C16/00

CPC分类号： H01L21/68721 ,  C23C14/50 ,  C23C16/4585 ,  H01L21/68757

摘要： A clamp used in clamping semi-conductor wafers during processing operations permits ready release of the wafer and avoids adherence of the clamp to materials deposited onto the wafer which otherwise tend to stick the wafer to the clamp. Adhesion of the deposited materials to the clamp is avoided by providing the clamping surfaces of the clamp with a minimum surface roughness achieved by machining, grinding, etching or other techniques.

摘要翻译： 在处理操作期间用于夹紧半导体晶片的夹具允许晶片的准备释放，并避免夹具粘附到沉积到晶片上的材料，否则倾向于将晶片粘贴到夹具上。 通过提供具有通过机械加工，研磨，蚀刻或其它技术实现的最小表面粗糙度的夹具的夹紧表面来避免将沉积的材料粘合到夹具上。