Surface measurement apparatus and method using depth of field
    1.
    发明申请
    Surface measurement apparatus and method using depth of field 有权
    表面测量装置和使用景深的方法

    公开(公告)号:US20080204697A1

    公开(公告)日:2008-08-28

    申请号:US12005471

    申请日:2007-12-27

    IPC分类号: G01C11/12

    CPC分类号: G01C11/12

    摘要: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and a moveable stage on which a subject animal for in-vivo imaging is placed. Images are taken and the stage is moved by known amounts along the optical axis, and the heights of individual features on the subject are determined through analysis of focus, given the known stage displacement. Alternatively, height of sub-regions of the subject are determined through analysis of focus. A mesh or other surface can be constructed from individual features, to provide a surface map of the subject. Accuracy of 0.5 mm or better can be attained for mice and similarly sized subjects.

    摘要翻译: 本发明提供了使用单个照相机和放置用于体内成像的受试动物的可移动阶段的体内成像对象的表面映射。 拍摄图像并且沿着光轴移动已知量的阶段,并且考虑已知的阶段位移,通过对焦点的分析来确定对象上的个体特征的高度。 或者,通过对焦点的分析确定受试者的子区域的高度。 网格或其他表面可以从各个特征构造,以提供主体的表面图。 对于小鼠和类似大小的受试者,可以获得0.5mm或更好的精度。

    Surface measurement apparatus and method using depth of field
    2.
    发明授权
    Surface measurement apparatus and method using depth of field 有权
    表面测量装置和使用景深的方法

    公开(公告)号:US07782470B2

    公开(公告)日:2010-08-24

    申请号:US12005471

    申请日:2007-12-27

    IPC分类号: G01B11/14

    CPC分类号: G01C11/12

    摘要: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and a moveable stage on which a subject animal for in-vivo imaging is placed. Images are taken and the stage is moved by known amounts along the optical axis, and the heights of individual features on the subject are determined through analysis of focus, given the known stage displacement. Alternatively, height of sub-regions of the subject are determined through analysis of focus. A mesh or other surface can be constructed from individual features, to provide a surface map of the subject. Accuracy of 0.5 mm or better can be attained for mice and similarly sized subjects.

    摘要翻译: 本发明提供了使用单个照相机和放置用于体内成像的受试动物的可移动阶段的体内成像对象的表面映射。 拍摄图像并且沿着光轴移动已知量的阶段,并且考虑已知的阶段位移,通过对焦点的分析来确定对象上的个体特征的高度。 或者,通过对焦点的分析确定受试者的子区域的高度。 网格或其他表面可以从各个特征构造,以提供主体的表面图。 对于小鼠和类似大小的受试者,可以获得0.5mm或更好的精度。

    Surface measurement of in-vivo subjects using spot projector
    3.
    发明授权
    Surface measurement of in-vivo subjects using spot projector 有权
    使用投影仪进行体内受试者的表面测量

    公开(公告)号:US07990545B2

    公开(公告)日:2011-08-02

    申请号:US12005510

    申请日:2007-12-27

    IPC分类号: G01B11/24

    摘要: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and an illuminator that projects a plurality of targets such as spots on the subject. By limiting the depth-of-field of the camera lens, or of the illuminator optics, or both, a spatial plane is defined in which the spots are most sharply in focus. Controlled displacement of this plane relative to the subject is achieved through movement of the mechanical stage on which a subject is placed; or through movement of the best-focus plane by adjustment of the camera, lens, or illuminator optics. Images are taken at several relative positions of the best-focus plane and the subject, and the height of individual points on the subject is determined through analysis of focus, given the known displacements. A mesh or other surface can be constructed from individual point locations, to provide a surface map of the subject. Accuracy of 0.5 mm can be readily attained for mice and similarly sized subjects.

    摘要翻译: 本发明提供使用单个照相机和照射器的体内成像对象的表面映射,所述照相机将多个目标(例如斑点)投射在对象上。 通过限制照相机镜头或照明器光学器件或两者的景深,定义了一个空间平面,其中斑点最为突出。 该平面相对于被摄体的受控位移通过放置被摄体的机械台的移动来实现; 或者通过相机,透镜或照明器光学元件的调整来移动最佳对焦平面。 在最佳聚焦平面和被摄体的几个相对位置摄取图像,并且在给定已知位移的情况下,通过分析焦点来确定被摄体上各个点的高度。 可以从各个点位置构建网格或其他表面,以提供对象的表面图。 对于小鼠和类似大小的受试者,可以容易地获得0.5mm的精度。

    Surface measurement of in-vivo subjects using spot projector
    4.
    发明申请
    Surface measurement of in-vivo subjects using spot projector 有权
    使用投影仪进行体内受试者的表面测量

    公开(公告)号:US20080198355A1

    公开(公告)日:2008-08-21

    申请号:US12005510

    申请日:2007-12-27

    IPC分类号: G01C11/12

    摘要: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and an illuminator that projects a plurality of targets such as spots on the subject. By limiting the depth-of-field of the camera lens, or of the illuminator optics, or both, a spatial plane is defined in which the spots are most sharply in focus. Controlled displacement of this plane relative to the subject is achieved through movement of the mechanical stage on which a subject is placed; or through movement of the best-focus plane by adjustment of the camera, lens, or illuminator optics. Images are taken at several relative positions of the best-focus plane and the subject, and the height of individual points on the subject is determined through analysis of focus, given the known displacements. A mesh or other surface can be constructed from individual point locations, to provide a surface map of the subject. Accuracy of 0.5 mm can be readily attained for mice and similarly sized subjects.

    摘要翻译: 本发明提供使用单个照相机和照射器的体内成像对象的表面映射,所述照相机将多个目标(例如斑点)投射在对象上。 通过限制照相机镜头或照明器光学器件或两者的景深,定义了一个空间平面,其中斑点最为突出。 该平面相对于被摄体的受控位移通过放置被摄体的机械台的移动来实现; 或者通过相机,透镜或照明器光学元件的调整来移动最佳对焦平面。 在最佳聚焦平面和被摄体的几个相对位置摄取图像,并且在给定已知位移的情况下,通过分析焦点来确定被摄体上各个点的高度。 可以从各个点位置构建网格或其他表面,以提供对象的表面图。 对于小鼠和类似大小的受试者,可以容易地获得0.5mm的精度。

    Systems and methods for in-vivo optical imaging and measurement
    5.
    发明申请
    Systems and methods for in-vivo optical imaging and measurement 有权
    体内光学成像和测量的系统和方法

    公开(公告)号:US20060119865A1

    公开(公告)日:2006-06-08

    申请号:US11295698

    申请日:2005-12-06

    IPC分类号: G01N21/25 G01B11/14

    摘要: Disclosed are methods and systems for: (i) sequentially illuminating a specimen with different spatial distributions of light, wherein each illumination causes an object embedded in the specimen to emit radiation in response to the light; (ii) for each different spatial distribution of illumination light, imaging the radiation emitted from the specimen from each of multiple sides of the specimen; and (iii) determining information about the object in the specimen based on the imaged radiation from each of the multiple sides for each of the different spatial distributions of illumination light.

    摘要翻译: 公开了以下方法和系统:(i)顺序地照射具有不同的光的空间分布的样本,其中每个照明使得嵌入在样本中的物体响应于光而发射辐射; (ii)对于照明光的每个不同的空间分布,对来自样本的多个侧面的样本进行成像; 以及(iii)基于来自照明光的不同空间分布中的每一个的多个侧面的成像的辐射来确定关于样本中的物体的信息。

    Wafer testing and self-calibration system
    7.
    发明授权
    Wafer testing and self-calibration system 失效
    晶圆测试和自校准系统

    公开(公告)号:US5642298A

    公开(公告)日:1997-06-24

    申请号:US613820

    申请日:1996-02-26

    IPC分类号: H01L21/66 G01R1/04

    摘要: A measurement station which rotates a wafer in a vertical plane and moves a scanning sensor linearly along an axis which is parallel to the wafer rotation plane, thus providing a spiral, or other, scan path across the wafer. The vertical orientation reduces errors from weight induced sagging, especially of large, e.g. 300 mm wafers. The measurement station includes wafer grippers which move in the wafer's plane for securing the wafer in position for rotation. The measurement station also includes master calibration gauges which simplify calibration and obviate the need for calibration test wafers. A technique for reducing vibration and assuring scan repeatability includes coasting of the wafer in rotation and coordinated linear probe motions for scanning. Probe measurement data obtained is digitized early and calibration, demodulation, filtering and other processing is done digitally.

    摘要翻译: 测量台,其使垂直平面中的晶片旋转并沿着平行于晶片旋转平面的轴线直线地移动扫描传感器,从而在晶片上提供螺旋或其它扫描路径。 垂直方向减少了重量引起的下垂的误差,特别是大的例如。 300毫米晶圆。 测量站包括晶片夹持器,其在晶片的平面中移动,以将晶片固定就位以进行旋转。 测量站还包括主校准仪,可简化校准并避免校准测试晶片的需要。 用于减少振动并确保扫描重复性的技术包括旋转中的晶片的滑动和用于扫描的协调的线性探针运动。 获得的探头测量数据可以早期数字化,数字化进行校准,解调,滤波等处理。

    Tilt free micromotion translator
    8.
    发明授权
    Tilt free micromotion translator 失效
    无倾斜微移动翻译器

    公开(公告)号:US5721616A

    公开(公告)日:1998-02-24

    申请号:US646126

    申请日:1996-04-24

    申请人: Peter Domenicali

    发明人: Peter Domenicali

    IPC分类号: G01B9/02 G02B7/00 G02B7/182

    摘要: An apparatus for providing tilt-free, linear micromotion translation of an object (12), such as an optical element, relative to a fixed rigid frame member (2) includes a flexural suspension (7) connected to the object (12) for enabling motion of the object (12) along a predetermined translational axis (18). The flexural suspension (7) includes a plurality of flexural links (14, 15) connecting a plurality of points (9) on the fixed rigid frame member (2) to a plurality of points (10) on a moving rigid frame member (11) with the links (14, 15) and the points (9, 10) connected by the links (14, 15) lying in a pair of parallel planes with an arrangement of links (14, 15) and fixed (9) and moving (10) points being disposed in each of the parallel planes and with the translational axis (18) being normal to the pair of parallel planes. The arrangements of the fixed (9) and moving (10) points are, disposed in the parallel planes for minimizing any undesirable cross axis translational motions (16, 17, 18) of the object (12). The apparatus also includes a linear motion transducer (32) and a drive mechanism (31) coupling linear motion transducer (32) to the flexural suspension (7) for enabling the tilt-free, linear micromotion translation of the object (12).

    摘要翻译: 用于相对于固定的刚性框架构件(2)提供诸如光学元件的物体(12)的无倾斜,线性微移动平移的装置包括连接到物体(12)的弯曲悬架(7),用于使能 物体(12)沿着预定的平移轴线(18)的运动。 弯曲悬架(7)包括将固定的刚性框架构件(2)上的多个点(9)连接到移动的刚性框架构件(11)上的多个点(10)的多个弯曲连杆(14,15) ),其中所述连杆(14,15)和通过所述连杆(14,15)连接的点(9,10)位于具有连杆(14,15)和固定(9)的布置的一对平行平面中并且移动 (10)点设置在每个平行平面中,并且平移轴线(18)垂直于该对平行平面。 固定(9)和移动(10)点的布置被布置在平行平面中,以使对象(12)的任何不期望的横轴平移运动(16,17,18)最小化。 该装置还包括线性运动传感器(32)和将线性运动传感器(32)耦合到弯曲悬架(7)的驱动机构(31),以实现物体(12)的无倾斜的线性微运动平移。

    Wafer handling and processing system
    9.
    发明授权
    Wafer handling and processing system 失效
    晶圆处理和处理系统

    公开(公告)号:US5511005A

    公开(公告)日:1996-04-23

    申请号:US197394

    申请日:1994-02-16

    CPC分类号: H01L22/20 H01L22/12

    摘要: A system for semiconductor wafer processing including wafer measurement and characterization having vertical wafer processing apparatus with which only the edge of a wafer is contacted. A wafer processing station is provided having a support bridge to which a rotor subassembly is attached. The rotor subassembly includes a housing and a rotor having a central aperture and a retention mechanism for retaining a wafer in a measurement position. A pair of pivotable probe arms includes one probe arm positioned on either side of the wafer. A sensor provides an image of a wafer prior to its retention by the retention mechanism in the measurement position in order to permit the retention mechanism to avoid any flat on the wafer. Additional sensors eliminate the effect of wobble or vibration of the rotor on wafer measurement results. Artifact removal processors are provided for removing errors in the measured wafer data and a database stores the uncorrupted and corrected data. The system couples with a data network to allow global viewing of wafer processing trouble spots. A correlation of information from actual data and wafer processing simulation is provided for allowing the application of corrective measures before processes deviate beyond control or specification limits.

    摘要翻译: 一种用于半导体晶片处理的系统,包括晶片测量和表征,其具有仅与晶片的边缘接触的垂直晶片处理设备。 提供具有支撑桥的晶片处理站,转子子组件附接到支撑桥。 转子子组件包括壳体和具有中心孔的转子和用于将晶片保持在测量位置的保持机构。 一对可枢转的探针臂包括位于晶片两侧的一个探针臂。 传感器在保持机构在测量位置之前提供晶片的图像,以便允许保持机构避免晶片上的任何平面。 额外的传感器消除了转子摆动或振动对晶圆测量结果的影响。 人工除去处理器被提供用于去除测量的晶片数据中的错误,并且数据库存储未被破坏和校正的数据。 该系统与数据网络耦合,以便全局观察晶圆处理故障点。 提供来自实际数据和晶片处理模拟的信息的相关性,以允许在处理之前应用校正措施偏离超出控制或规范限制。