公开(公告)号：US20050173644A1

公开(公告)日：2005-08-11

申请号：US10500951

申请日：2001-06-29

申请人： Peter Gnauck ,  Volker Drexel ,  Erik Essers

发明人： Peter Gnauck ,  Volker Drexel ,  Erik Essers

IPC分类号： H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  G01J1/00

CPC分类号： H01J37/244

摘要： A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

摘要翻译： 用于扫描电子显微镜的检测器，其可以在电子显微镜的样品室中在不同压力条件下使用，被设计用于检测电子和光。 为此目的，检测器具有光电检测器和用于在光电检测器之前连接的可见光透射的材料的闪烁体。 闪烁体可以具有对可见光透明的涂层。 通过应用不同的电位，检测器适用于检测高真空中的电子和检测样品室中高压的光。

公开(公告)号：US07462839B2

公开(公告)日：2008-12-09

申请号：US10500951

申请日：2001-06-29

申请人： Peter Gnauck ,  Volker Drexel ,  David Bate ,  Eric Essers

发明人： Peter Gnauck ,  Volker Drexel ,  David Bate ,  Eric Essers

IPC分类号： H01J37/28

CPC分类号： H01J37/244

摘要： A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

摘要翻译： 用于扫描电子显微镜的检测器，其可以在电子显微镜的样品室中在不同压力条件下使用，被设计用于检测电子和光。 为此目的，检测器具有光电检测器和用于在光电检测器之前连接的可见光透射的材料的闪烁体。 闪烁体可以具有对可见光透明的涂层。 通过应用不同的电位，检测器适用于检测高真空中的电子和检测样品室中高压的光。

公开(公告)号：US06872956B2

公开(公告)日：2005-03-29

申请号：US10337795

申请日：2003-01-06

申请人： Peter Gnauck ,  Volker Drexel

发明人： Peter Gnauck ,  Volker Drexel

IPC分类号： F04D19/04 ,  F04D25/00 ,  H01J37/18 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/18 ,  F04D19/046 ,  F04D25/00 ,  H01J2237/188 ,  H01J2237/2605

摘要： A cascade type pump arrangement for a particle beam device has first and second turbomolecular pumps, wherein an outlet of the second turbomolecular pump is forepumped by an intermediate pressure region situated between a main pump port and an outlet of the first turbomolecular pump. The particle beam device has a particle beam source operated in ultra high vacuum and a specimen chamber operated at pressures from high vacuum at least up to 1 hPa.

摘要翻译： 用于粒子束装置的级联型泵装置具有第一和第二涡轮分子泵，其中第二涡轮分子泵的出口通过位于第一涡轮分子泵的主泵口和出口之间的中间压力区域前进。 粒子束装置具有在超高真空下操作的粒子束源和在高真空至少高达1hPa的压力下操作的试样室。

公开(公告)号：US06218663B1

公开(公告)日：2001-04-17

申请号：US09011594

申请日：1998-01-23

申请人： Wilfried Nisch ,  Peter Gnauck

发明人： Wilfried Nisch ,  Peter Gnauck

IPC分类号： H01J3730

CPC分类号： H01J37/3005 ,  G01N1/32 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/2067

摘要： The invention concerns an “in situ” ion-etching device for local thinning of a sample in a transmission electron microscope (1) with simultaneous electron microscopic observation. Towards this end, an ion beam device (2) is arranged in such a way that the finest possible ion probe is produced at the sample location and can be scanned over the sample surface. The ion beam (16) and sample (10) thereby enclose the flattest possible angle. To compensate for the magnetic field of the objective lens (5), the ion beam (16) is defected along a curved path onto the sample (10). In a preferred embodiment, an electrostatic cylinder capacitor sector field effects double focusing. The ion probe can be positioned, via the scanned ion image, onto a selected region of the sample by the secondary electrons (22) released from the sample (10). The sample location can be observed during the ion thinning process in electron transmission or electron diffraction. It is thereby possible to carry out target preparations under high-resolution observing conditions and to eliminate contaminant or reactive layers.

摘要翻译： 本发明涉及一种用于透射电子显微镜（1）中同时进行电子显微镜观察的样品局部变薄的“原位”离子蚀刻装置。 为此，离子束装置（2）被布置成使得最佳可能的离子探针在样品位置处产生并且可以在样品表面上扫描。 离子束（16）和样品（10）由此包围最平坦的可能角度。 为了补偿物镜（5）的磁场，离子束（16）沿着弯曲路径被缺陷到样品（10）上。 在优选实施例中，静电筒电容器扇区场效应双重聚焦。 离子探针可以通过扫描的离子图像通过从样品（10）释放的二次电子（22）定位在样品的选定区域上。 在电子传输或电子衍射的离子稀化过程中可以观察样品位置。 因此，可以在高分辨率观察条件下进行目标制备并消除污染物或反应层。

公开(公告)号：US06855938B2

公开(公告)日：2005-02-15

申请号：US10619475

申请日：2003-07-16

申请人： Dirk Preikszas ,  Michael Steigerwald ,  Peter Hoffrogge ,  Peter Gnauck

发明人： Dirk Preikszas ,  Michael Steigerwald ,  Peter Hoffrogge ,  Peter Gnauck

IPC分类号： H01J37/141 ,  H01J37/145 ,  H01J37/28 ,  H01J37/317

CPC分类号： H01J37/145 ,  H01J2237/2817 ,  H01J2237/31745 ,  H01J2237/31749

摘要： An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.

摘要翻译： 提供了一种用于电子显微镜系统的具有磁性和静电聚焦的物镜，其至少部分为圆锥形的外部形状允许相对于电子束以大角度范围定向要成像的物体，所述物镜同时展现 ，光学参数好。 这可以通过镜头元件的特定几何形状来实现。 此外，提出了一种用于同时成像和处理物体的检查，除了具有上述物镜的电子显微镜系统之外，还包括离子束处理系统和物体支撑。