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9 条记录 (耗时 0.025 秒)

    Method of Deposition with Reduction of Contaminants in An Ion Assist Beam and Associated Apparatus
    3.
    发明申请
    Method of Deposition with Reduction of Contaminants in An Ion Assist Beam and Associated Apparatus 审中-公开
    在离子辅助束和相关装置中减少污染物的沉积方法

    公开(公告)号：US20080257715A1

    公开(公告)日：2008-10-23

    申请号：US11664343

    申请日：2004-10-13

    申请人： Peter Hoghoj ,  Paraskevi Ntova ,  Claude Montcalm ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Paraskevi Ntova ,  Claude Montcalm ,  Sergio Rodrigues

    IPC分类号： C23C14/34

    CPC分类号： C23C14/46 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/68

    摘要： The invention relates to a dual Ion Beam Sputtering method for depositing onto a substrate (S) material generated by the sputtering of a target (121-123) by a sputtering ion beam (110), said method comprising the operation of an assistance ion beam (130) directed onto said substrate in order to assist the deposition of material, said method being characterized in that during the operation of said assistance beam said sputtering beam is also operated in association with said assistance beam, and during said operation of the sputtering beam in association with the assistance beam the sputtering beam crosses a desired part of the assistance beam in order to transport contaminants associated to said desired part of the assistance beam away from said substrate.

    摘要翻译： 本发明涉及一种用于沉积到通过溅射离子束（110）溅射靶（121-123）而产生的衬底（S）上的双离子束溅射方法，所述方法包括辅助离子束 （130），以便辅助沉积材料，所述方法的特征在于，在所述辅助束的操作期间，所述溅射束还与所述辅助光束相关联地操作，并且在溅射束的所述操作期间 与辅助束相关联，溅射束与辅助光束的期望部分交叉，以便将与所述辅助光束的所需部分相关联的污染物输送离开所述衬底。

    Method for producing a replication master, replication method and replication master
    4.
    发明授权
    Method for producing a replication master, replication method and replication master 有权
    生成复制主机，复制方法和复制主机的方法

    公开(公告)号：US08496863B2

    公开(公告)日：2013-07-30

    申请号：US10577522

    申请日：2004-11-29

    申请人： Peter Hoghoj ,  Ralf Siebrecht ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Ralf Siebrecht ,  Sergio Rodrigues

    IPC分类号： B29C41/46

    CPC分类号： B29C33/56 ,  B29C33/3878 ,  B29C33/58 ,  B29C33/62 ,  B29C39/126 ,  B29K2995/0073

    摘要： In a method for producing a replication master (10) having a surface with low roughness, comprising the steps of forming said master (10) such as to have a desired external surface shape corresponding to a counterform of a surface of an object (18, 20) to be produced by replication and treating said external surface of said master (10) to obtain a predetermined surface roughness value, it is proposed that said method furthermore comprises the step of coating at least a part of said master (10) with a soluble smoothening layer (16). The invention further relates to a replication master (10) for producing a smooth object (18, 20) having a low surface roughness, wherein at least a part of said master (10) is coated with a soluble smoothening layer (16).

    摘要翻译： 在制造具有低粗糙度的表面的复制主体（10）的方法中，包括以下步骤：形成所述主体（10），以便具有对应于物体表面（18,18）的反面形状的期望的外表面形状， 20）通过复制和处理所述母盘（10）的所述外表面以获得预定的表面粗糙度值来产生，所以提出所述方法还包括以下步骤：将所述母版（10）的至少一部分涂覆到所述母版 可溶性平滑层（16）。 本发明还涉及一种用于生产具有低表面粗糙度的光滑物体（18,20）的复制主体（10），其中所述主体（10）的至少一部分涂覆有可溶平滑层（16）。

    Optical device for X-ray applications
    5.
    发明授权
    Optical device for X-ray applications 有权
    用于X射线应用的光学装置

    公开(公告)号：US07430277B2

    公开(公告)日：2008-09-30

    申请号：US10518284

    申请日：2003-06-19

    申请人： Peter Hoghoj ,  Aurélien Dariel ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Aurélien Dariel ,  Sergio Rodrigues

    IPC分类号： G21K1/06

    CPC分类号： B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

    摘要： The invention relates to an optical device intended to treat an incident X-ray beam. The optical device comprises a monochromator and an optical element for conditioning the incident beam. The reflective surface of the optical element is able to produce a two-dimensional optical effect in order to adapt a beam in destination of the monochromator. The reflective surface of the optical element comprises a multilayer structure type surface that is reflective to X-rays. In particular, the reflective surface consists of a single surface shaped according to two curvatures corresponding to two different directions.

    摘要翻译： 本发明涉及一种旨在处理入射的X射线束的光学装置。 光学装置包括单色器和用于调节入射光束的光学元件。 光学元件的反射表面能够产生二维光学效果，以使光束适应单色仪的目的地。 光学元件的反射表面包括反射X射线的多层结构型表面。 特别地，反射表面由根据对应于两个不同方向的两个曲率成形的单个表面组成。

    Optical unit and associated method
    6.
    发明授权
    Optical unit and associated method 有权
    光学单元及相关方法

    公开(公告)号：US07248670B2

    公开(公告)日：2007-07-24

    申请号：US10506716

    申请日：2003-06-19

    申请人： Peter Hoghoj ,  Aurélien Dariel ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Aurélien Dariel ,  Sergio Rodrigues

    IPC分类号： G21K1/06

    CPC分类号： B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

    摘要： The invention relates to an optical assembly with a laterally graded reflective multilayer whose reflecting surface reflects incident X-rays under low incidence angles to produce a two-dimensional optical effect. The reflecting surface comprises a single surface conformed along two curvatures corresponding to two different directions. The invention also relates to a manufacturing method of such an optical assembly. The method includes coating a substrate already having a curvature. The invention also relates to a device for generating and conditioning X-rays for applications for angle-dispersive X-ray reflectometry. The device includes the optical assembly connected to an X-ray source so that X-rays emitted by the source are conditioned along two dimensions so as to adapt the beam emitted by the source to the sample, with the X-rays having different angles of incidence on the sample under consideration.

    摘要翻译： 本发明涉及具有横向渐变反射多层的光学组件，其反射表面在低入射角下反射入射的X射线以产生二维光学效应。 反射表面包括沿对应于两个不同方向的两个曲率形成的单个表面。 本发明还涉及这种光学组件的制造方法。 该方法包括涂覆已经具有曲率的基底。 本发明还涉及一种用于产生和调节用于角度分散X射线反射测量的X射线的装置。 该装置包括连接到X射线源的光学组件，使得由源发射的X射线沿着二维调节，以便将源发射的光束适应于样品，X射线具有不同的角度 正在考虑的样品发生率。

    Method for producing a replication master, replication method and replication master
    7.
    发明申请
    Method for producing a replication master, replication method and replication master 有权
    生成复制主机，复制方法和复制主机的方法

    公开(公告)号：US20070035068A1

    公开(公告)日：2007-02-15

    申请号：US10577522

    申请日：2004-11-29

    申请人： Peter Hoghoj ,  Ralf Siebrecht ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Ralf Siebrecht ,  Sergio Rodrigues

    IPC分类号： B29C33/40 ,  B29C33/56

    CPC分类号： B29C33/56 ,  B29C33/3878 ,  B29C33/58 ,  B29C33/62 ,  B29C39/126 ,  B29K2995/0073

    摘要： In a method for producing a replication master (10) having a surface with low roughness, comprising the steps of forming said master (10) such as to have a desired external surface shape corresponding to a counterform of a surface of an object (18, 20) to be produced by replication and treating said external surface of said master (10) to obtain a predetermined surface roughness value, it is proposed that said method furthermore comprises the step of coating at least a part of said master (10) with a soluble smoothening layer (16). The invention further relates to a replication master (10) for producing a smooth object (18, 20) having a low surface roughness, wherein at least a part of said master (10) is coated with a soluble smoothening layer (16).

    摘要翻译： 在制造具有低粗糙度的表面的复制主体（10）的方法中，包括以下步骤：形成所述主体（10），以便具有对应于物体表面（18,18）的反面形状的期望的外表面形状， 20）通过复制和处理所述母盘（10）的所述外表面以获得预定的表面粗糙度值来产生，所以提出所述方法还包括以下步骤：将所述母版（10）的至少一部分涂覆到所述母版 可溶性平滑层（16）。 本发明还涉及一种用于生产具有低表面粗糙度的光滑物体（18,20）的复制主体（10），其中所述主体（10）的至少一部分涂覆有可溶平滑层（16）。

    Optical unit and associated method
    8.
    发明申请
    Optical unit and associated method 有权
    光学单元及相关方法

    公开(公告)号：US20050117239A1

    公开(公告)日：2005-06-02

    申请号：US10506716

    申请日：2003-06-19

    申请人： Peter Hoghoj ,  Aurelien Dariel ,  Sergio Rodrigues

    发明人： Peter Hoghoj ,  Aurelien Dariel ,  Sergio Rodrigues

    IPC分类号： G01N23/20 ,  G21K1/06 ,  G21K3/00 ,  G02B5/08 ,  G02B7/182

    CPC分类号： B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

    摘要： This invention relates to an optical assembly (10) with a laterally graded reflective multilayer whose reflecting surface reflects incident X-rays under low incidence angles producing a two-dimensional optical effect, characterized by the fact that said reflecting surface is comprised of a single surface, said reflecting surface being conformed along two curvatures corresponding to two different directions. This invention also relates to a manufacturing method of such an optical assembly, characterized in that the method includes the coating of a substrate already having a curvature, and the curvature of this substrate along a second different direction. The invention relates finally to a device for generating and conditioning X-rays for applications for angle-dispersive X-ray reflectometry including an optical assembly such as mentioned above connected to a source of X-rays in such a way that the X-rays emitted by the source are conditioned along two dimensions so as to adapt the beam emitted by the source to the sample, with the X-rays having different angles of incidence on the sample which is considered.

    摘要翻译： 本发明涉及具有横向渐变反射多层体的光学组件（10），其反射表面在低入射角下反射入射的X射线产生二维光学效应，其特征在于所述反射表面由单个表面 所述反射表面沿对应于两个不同方向的两个曲率相符。 本发明还涉及这种光学组件的制造方法，其特征在于，该方法包括已经具有曲率的基底的涂覆，以及沿着第二不同方向的该基底的曲率。 本发明最终涉及用于产生和调节用于角度分散X射线反射测量的X射线的装置，其包括如上所述的光学组件，其连接到X射线源，使得X射线发射 通过源被调节为沿着两个维度，以便将由源发射的光束适应于样品，其中X射线对所考虑的样品具有不同的入射角。

    ABRASIVE ARTICLE WITH OPEN STRUCTURE
    9.
    发明申请
    ABRASIVE ARTICLE WITH OPEN STRUCTURE 审中-公开
    具有开放结构的磨砂文章

    公开(公告)号：US20110159794A1

    公开(公告)日：2011-06-30

    申请号：US12980174

    申请日：2010-12-28

    申请人： Mervyn Chung-Fat ,  Virginie Vaubert ,  Sergio Rodrigues

    发明人： Mervyn Chung-Fat ,  Virginie Vaubert ,  Sergio Rodrigues

    IPC分类号： B24D11/00

    CPC分类号： B24D3/28 ,  B24B55/06 ,  B24D11/005 ,  B24D11/02 ,  D04B21/10 ,  D10B2403/021 ,  D10B2403/02421 ,  D10B2403/0243 ,  D10B2501/0632

    摘要： An abrasive article includes a fabric comprising a front face and a back face. The front face is formed of first knitted yarns. Each yarn of the first knitted yarns includes a plurality of filaments. A plurality of threads intertwines with the first knitted yarns and extending between the front face and the back face. The plurality of threads defines a hollow space between the front face and the back face. The abrasive article also includes abrasive grains adhered to the front face of the fabric.

    摘要翻译： 磨料制品包括包括前表面和背面的织物。 前表面由第一针织纱线形成。 第一针织纱线的每条纱线包括多根长丝。 多条线与第一针织纱交织在一起，并在前面和后面之间延伸。 多个螺纹限定了前表面和后表面之间的中空空间。 磨料制品还包括粘附到织物前表面的磨料颗粒。