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1.发明申请Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US20110188040A1
公开(公告)日：2011-08-04
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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2.发明授权Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US08462341B2
公开(公告)日：2013-06-11
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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3.发明授权公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统 补偿光谱椭偏仪和/或偏振计系统。
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4.发明申请公开(公告)号：US20090091758A1
公开(公告)日：2009-04-09
申请号：US12290787
申请日：2008-11-04
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统 补偿光谱椭偏仪和/或偏振计系统。
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5.发明授权Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译： 光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统 的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。
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公开(公告)号：US07623237B1
公开(公告)日：2009-11-24
申请号：US11452483
申请日：2006-06-14
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。
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公开(公告)号：US07336361B1
公开(公告)日：2008-02-26
申请号：US11256891
申请日：2005-10-25
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J4/00 , G01N21/211 , G01N2021/213
摘要： A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.
摘要翻译： 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统还具有至少一个多元件透镜，并且可选地存在于环境控制室中。
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8.发明授权Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems 有权分光光度计，椭偏仪，偏光计等样品进样清洗系统公开(公告)号：US07274450B1
公开(公告)日：2007-09-25
申请号：US10857774
申请日：2004-05-28
申请人： Steven E. Green , Ping He , Galen L. Pfeiffer , Brian D. Guenther , Gerald T. Cooney , John A. Woollam , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger
发明人： Steven E. Green , Ping He , Galen L. Pfeiffer , Brian D. Guenther , Gerald T. Cooney , John A. Woollam , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/211
摘要： A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the subspace. Contained within the generally enclosed space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are adversely affected, (eg. absorbed), by typical atmospheric contents.
摘要翻译： 允许进入腔室中的子空间的样本隔离系统，其包围大致封闭的空间，用于在子空间向大气开放时用于进入和移除样品。 足够的净化气体从通常封闭的空间内流入子空间，阻止大气污染物进入子空间。 包含在通常封闭的空间内的是分光光度计，椭偏仪或偏振计等，其工作波长（例如UV），通过典型的大气含量受到不利影响（例如吸收）。
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公开(公告)号：US07327456B1
公开(公告)日：2008-02-05
申请号：US11145470
申请日：2005-06-06
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J1/02 , G01J1/0266 , G01J3/0202 , G01J3/0224 , G01J3/0235 , G01J3/0237 , G01J3/0289 , G01J3/04 , G01J3/18 , G01J4/00 , G01N21/211
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译： 公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。
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10.发明授权Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter 有权旋转补偿器椭圆计/偏振计中的组合空间滤波器和继电器系统公开(公告)号：US07245376B2
公开(公告)日：2007-07-17
申请号：US11284213
申请日：2005-11-22
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
摘要翻译： 改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。
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