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1.发明授权Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems 有权分光光度计，椭偏仪，偏光计等样品进样清洗系统公开(公告)号：US07274450B1
公开(公告)日：2007-09-25
申请号：US10857774
申请日：2004-05-28
申请人： Steven E. Green , Ping He , Galen L. Pfeiffer , Brian D. Guenther , Gerald T. Cooney , John A. Woollam , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger
发明人： Steven E. Green , Ping He , Galen L. Pfeiffer , Brian D. Guenther , Gerald T. Cooney , John A. Woollam , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/211
摘要： A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the subspace. Contained within the generally enclosed space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are adversely affected, (eg. absorbed), by typical atmospheric contents.
摘要翻译： 允许进入腔室中的子空间的样本隔离系统，其包围大致封闭的空间，用于在子空间向大气开放时用于进入和移除样品。 足够的净化气体从通常封闭的空间内流入子空间，阻止大气污染物进入子空间。 包含在通常封闭的空间内的是分光光度计，椭偏仪或偏振计等，其工作波长（例如UV），通过典型的大气含量受到不利影响（例如吸收）。
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公开(公告)号：US07327456B1
公开(公告)日：2008-02-05
申请号：US11145470
申请日：2005-06-06
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J1/02 , G01J1/0266 , G01J3/0202 , G01J3/0224 , G01J3/0235 , G01J3/0237 , G01J3/0289 , G01J3/04 , G01J3/18 , G01J4/00 , G01N21/211
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译： 公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。
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公开(公告)号：US06982792B1
公开(公告)日：2006-01-03
申请号：US10376677
申请日：2003-02-28
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0202 , G01J3/021 , G01J3/0235 , G01J3/0237 , G01J3/0291 , G01J3/04 , G01J3/12 , G01J4/00 , G01N2021/213
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译： 公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。
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公开(公告)号：US07136162B1
公开(公告)日：2006-11-14
申请号：US10684088
申请日：2003-10-12
申请人： Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
发明人： Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
IPC分类号： G01J4/00
CPC分类号： G01N21/211
摘要： Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.
摘要翻译： 公开了一种系统和方法，优选地通过自动化程序对准由其源提供的电磁辐射束，使得其以其已知角度在其表面上的特定位置处接近样品，然后从其反射并进入 数据检测器。
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公开(公告)号：US07535566B1
公开(公告)日：2009-05-19
申请号：US11453656
申请日：2006-06-15
申请人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
发明人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
CPC分类号： G01N21/211 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J2003/1213 , G01J2003/1282 , G01N21/274 , G01N2021/213 , G02B27/141
摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).
摘要翻译： 一种用于反射地引导电磁辐射的分光束同时在第一波长范围（例如可见波长）中强调强度的电磁光束色移和引导装置，同时相对强调另一波长范围内的强度， （例如UV波长）。
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公开(公告)号：US09347768B1
公开(公告)日：2016-05-24
申请号：US13385761
申请日：2012-03-06
CPC分类号： G01B11/14 , G01J1/0242 , G01J3/0278 , G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N21/8901 , G01N2021/8609
摘要： A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
摘要翻译： 一种用于通过椭偏仪或类似系统实时监测相对较大的样本的系统及其使用方法。
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公开(公告)号：US10775298B1
公开(公告)日：2020-09-15
申请号：US16501596
申请日：2019-05-06
申请人： Christopher D. Hassler , Galen L. Pfeiffer , Jeffrey S. Hale , Craig M. Herzinger , Brian D. Guenther , Brooks A. Hitt
发明人： Christopher D. Hassler , Galen L. Pfeiffer , Jeffrey S. Hale , Craig M. Herzinger , Brian D. Guenther , Brooks A. Hitt
摘要： Ellipsometers and polarimeters and the like having at least one rotating element which is driven by a motor that comprises air bearings.
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