Manufacturing process and apparatus therefor utilizing reducing gas
    3.
    发明授权
    Manufacturing process and apparatus therefor utilizing reducing gas 有权
    利用还原气的制造方法及其装置

    公开(公告)号:US07648901B2

    公开(公告)日:2010-01-19

    申请号:US11536051

    申请日:2006-09-28

    IPC分类号: H01L21/44

    CPC分类号: B23K1/008 B23K2101/40

    摘要: A manufacturing process and apparatus therefore are provided for processing an electronic device comprising oxidizable material during processing. The electronic device is located inside a chamber and is heated a processing temperature with a heater. A reductive atmosphere is created in the chamber by supplying a gas comprising glycolic acid vapor while processing the electronic device at the processing temperature.

    摘要翻译: 因此,提供了一种制造工艺和装置,用于在加工期间处理包括可氧化材料的电子装置。 电子设备位于室内并用加热器加热处理温度。 通过在加工温度下处理电子装置的同时供应包含乙醇酸蒸汽的气体,在室中产生还原性气氛。