公开(公告)号：US08418556B2

公开(公告)日：2013-04-16

申请号：US12703516

申请日：2010-02-10

申请人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

发明人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

IPC分类号： G01P15/125

CPC分类号： G01R33/0286 ,  Y10T29/49002

摘要： A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

摘要翻译： 公开了一种微机电系统（MEMS）。 MEMS包括基板，从基板向上延伸的第一枢轴，第一杠杆臂，第一纵向轴线在基板上方延伸并且可枢转地安装到第一枢轴上，用于围绕第一枢转轴线枢转，第一电容器层形成在第一枢转轴上 基板，位于第一杠杆臂的第一电容器部分下方的位置处;第二电容器层，形成在第一杠杆臂的第二电容器部分下方的位置处的基板上，其中第一枢轴在第一杠杆臂之间的位置处支撑第一杠杆臂， 所述第一电容器部分和所述第二电容器部分沿着所述第一纵向轴线延伸，以及第一导体部件，其延伸穿过所述第一纵向轴线并与所述第一枢转轴线间隔开。

公开(公告)号：US20110192229A1

公开(公告)日：2011-08-11

申请号：US12703516

申请日：2010-02-10

申请人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

发明人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

IPC分类号： G01P15/125 ,  H05K13/00

CPC分类号： G01R33/0286 ,  Y10T29/49002

摘要： A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

摘要翻译： 公开了一种微机电系统（MEMS）。 MEMS包括基板，从基板向上延伸的第一枢轴，第一杠杆臂，第一纵向轴线在基板上方延伸并且可枢转地安装到第一枢轴上，用于围绕第一枢转轴线枢转，第一电容器层形成在第一枢转轴上 基板，位于第一杠杆臂的第一电容器部分下方的位置处;第二电容器层，形成在第一杠杆臂的第二电容器部分下方的位置处的基板上，其中第一枢轴在第一杠杆臂之间的位置处支撑第一杠杆臂， 所述第一电容器部分和所述第二电容器部分沿着所述第一纵向轴线延伸，以及第一导体部件，其延伸穿过所述第一纵向轴线并与所述第一枢转轴线间隔开。

公开(公告)号：US08556504B2

公开(公告)日：2013-10-15

申请号：US13061670

申请日：2009-07-02

申请人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

发明人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

IPC分类号： G01K7/00 ,  B32B3/00

CPC分类号： H01L27/14669 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/06 ,  G01J5/20 ,  H01L31/09

摘要： A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.

摘要翻译： 一种用于具有基底和电介质膜的传感器中的微结构参考元件。 参考元件具有基于温度改变其值的电性质。 参考元件相对于衬底布置，使得参考元件（i）与衬底电绝缘，和（ii）热耦合到衬底。 参考元件布置在电介质膜的下侧。 衬底的参考元件和侧壁在它们之间限定周向的洞穴，它们也被布置在它们之间的电介质膜界定。 电介质膜与基板连接。 由电介质膜覆盖的参考元件的表面积大于或等于可能可覆盖表面积的10％且小于或等于100％。 由电介质膜覆盖的洞穴的表面大于或等于可能可覆盖表面的50％且小于或等于100％。 面向电介质膜的参考元件的边缘具有大于或等于其与电介质膜接触的程度的50％且小于或等于100％。 面向电介质膜的洞穴的侧壁的截面具有大于或等于电介质膜接触的可能尺寸的50％且小于或等于100％。

公开(公告)号：US20110211613A1

公开(公告)日：2011-09-01

申请号：US13061670

申请日：2009-07-02

申请人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

发明人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

IPC分类号： G01K7/01

CPC分类号： H01L27/14669 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/06 ,  G01J5/20 ,  H01L31/09

摘要： A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.

摘要翻译： 一种用于具有基底和电介质膜的传感器中的微结构参考元件。 参考元件具有基于温度改变其值的电性质。 参考元件相对于衬底布置，使得参考元件（i）与衬底电绝缘，和（ii）热耦合到衬底。 参考元件布置在电介质膜的下侧。 衬底的参考元件和侧壁在它们之间限定周向的洞穴，它们也被布置在它们之间的电介质膜界定。 电介质膜与基板连接。 由电介质膜覆盖的参考元件的表面积大于或等于可能可覆盖表面积的10％且小于或等于100％。 由电介质膜覆盖的洞穴的表面大于或等于可能可覆盖表面的50％且小于或等于100％。 面向电介质膜的参考元件的边缘具有大于或等于其与电介质膜接触的程度的50％且小于或等于100％。 面向电介质膜的洞穴的侧壁的截面具有大于或等于电介质膜接触的可能尺寸的50％且小于或等于100％。

公开(公告)号：US20130247648A1

公开(公告)日：2013-09-26

申请号：US13700567

申请日：2011-04-15

申请人： Martin Eckardt

发明人： Martin Eckardt

IPC分类号： G01M15/10

CPC分类号： G01M15/102 ,  F01N2560/05 ,  F02D41/1466 ,  G01N15/0266 ,  G01N15/0656

摘要： A method for detecting particles, for example in an exhaust gas stream of a vehicle in which the exhaust gas stream is guided along a duct, includes using a particle sensor that has at least two electrodes arranged in the duct. The method includes applying a first voltage and a second voltage to the electrodes to produce a first electric field and a second electric field between the electrodes. The method also includes ascertaining a first capacitance value corresponding to the first electric field and a second capacitance value corresponding to the second electric field of a capacitor formed by the electrodes. Information relating to the particles contained in the exhaust gas stream is ascertained from the first capacitance value and the second capacitance value.

摘要翻译： 一种用于检测颗粒的方法，例如在排气流沿导管引导的排气流中，包括使用具有布置在管道中的至少两个电极的颗粒传感器。 该方法包括向电极施加第一电压和第二电压以在电极之间产生第一电场和第二电场。 该方法还包括确定对应于第一电场的第一电容值和对应于由电极形成的电容器的第二电场的第二电容值。 从第一电容值和第二电容值确定与废气流中所含的粒子有关的信息。

公开(公告)号：US09267865B2

公开(公告)日：2016-02-23

申请号：US13700567

申请日：2011-04-15

申请人： Martin Eckardt

发明人： Martin Eckardt

IPC分类号： G01N7/00 ,  G01M15/10 ,  G01N15/02 ,  G01N15/06 ,  F02D41/14

CPC分类号： G01M15/102 ,  F01N2560/05 ,  F02D41/1466 ,  G01N15/0266 ,  G01N15/0656

摘要： A method for detecting particles, for example in an exhaust gas stream of a vehicle in which the exhaust gas stream is guided along a duct, includes using a particle sensor that has at least two electrodes arranged in the duct. The method includes applying a first voltage and a second voltage to the electrodes to produce a first electric field and a second electric field between the electrodes. The method also includes ascertaining a first capacitance value corresponding to the first electric field and a second capacitance value corresponding to the second electric field of a capacitor formed by the electrodes. Information relating to the particles contained in the exhaust gas stream is ascertained from the first capacitance value and the second capacitance value.

摘要翻译： 一种用于检测颗粒的方法，例如在排气流沿导管引导的排气流中，包括使用具有布置在管道中的至少两个电极的颗粒传感器。 该方法包括向电极施加第一电压和第二电压以在电极之间产生第一电场和第二电场。 该方法还包括确定对应于第一电场的第一电容值和对应于由电极形成的电容器的第二电场的第二电容值。 从第一电容值和第二电容值确定与废气流中所含的粒子有关的信息。

公开(公告)号：US20100051810A1

公开(公告)日：2010-03-04

申请号：US12541745

申请日：2009-08-14

申请人： Ingo Herrmann ,  Karl-Franz Reinhart ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

发明人： Ingo Herrmann ,  Karl-Franz Reinhart ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

IPC分类号： G01J5/00 ,  B23K31/02

CPC分类号： B81C1/00293 ,  B81C2203/019

摘要： A micromechanical component and a corresponding production method. The micromechanical component includes a first component and a second component, with which the first component is connected by an alloy region; the first and second components enclosing a vacuum region or residual gas region, which is sealed by the alloy region.

摘要翻译： 微机械部件和相应的生产方法。 微机械部件包括第一部件和第二部件，第一部件通过第一部件和第二部件通过合金区域连接; 第一和第二部件包围由合金区域密封的真空区域或残余气体区域。