-
1.
公开(公告)号:US20240243131A1
公开(公告)日:2024-07-18
申请号:US18098633
申请日:2023-01-18
发明人: Ming-Huei LIN , Haining YANG , Junjing BAO
IPC分类号: H01L27/092 , H01L21/8238
CPC分类号: H01L27/0924 , H01L21/823821 , H01L21/823828 , H01L21/823878 , H01L21/31155
摘要: A fin field effect transistor (FinFET) is described. The FinFET includes a substrate and a shallow trench isolation (STI) region on the substrate. The FinFET also includes a first fin structure on the substrate and extending through the STI region. The FinFET further includes a second fin structure on the substrate and extending through the STI region. The FinFET also includes a metal gate on the STI region, on the first fin structure, and on the second fin structure. The metal gate is composed of a first sub-metal gate cut line filled with a first stressor material, and a second sub-metal gate cut line filled with a second stressor material different from the first stressor material.
-
公开(公告)号:US20220262723A1
公开(公告)日:2022-08-18
申请号:US17176969
申请日:2021-02-16
发明人: Junjing BAO , John Jianhong ZHU , Haining YANG
IPC分类号: H01L23/522 , H01L23/532 , H01L23/528 , H01L21/768
摘要: An integrated circuit (IC) having an interconnect structure with metal lines with different conductive materials for different widths and a method for fabricating such an IC. An example IC generally includes an active layer and an interconnect structure disposed thereabove and comprising a plurality of metal layers and one or more vias landing on metal lines. At least one of the plurality of metal layers comprises one or more first metal lines and one or more second metal lines. The one or more first metal lines have one or more first widths and comprise a first conductive material including copper. The one or more second metal lines have one or more second widths and comprise a second conductive material different from the first conductive material, where the second widths are narrower than the first widths. The vias have one or more third widths and comprise a third conductive material.
-
公开(公告)号:US20210280684A1
公开(公告)日:2021-09-09
申请号:US16812292
申请日:2020-03-07
发明人: Ye LU , Haining YANG , Junjing BAO
IPC分类号: H01L29/423 , H01L29/786 , H01L29/51 , H01L29/66
摘要: A gate all around transistor may be improved to provide better transistor circuits performance. In one example, a transistor circuit may include a dielectric or air gap as an insulator between the channels of the transistors in the circuit. In another example, a transistor may include a first channel surrounded by a first metal, a second channel surrounded by a second metal proximate to the first channel, and an insulator, such as a dielectric or air gap, between the first metal and the second metal. The insulator helps reduce the parasitic capacitance between the source/drain regions and the metal fill regions of the transistor.
-
公开(公告)号:US20210020643A1
公开(公告)日:2021-01-21
申请号:US16511153
申请日:2019-07-15
发明人: Haining YANG
IPC分类号: H01L27/11 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/786 , H01L29/78
摘要: Certain aspects of the present disclosure generally relate to a static random-access memory (SRAM) implemented using both a gate-all-around (GAA)-type transistor and a fin field-effect transistor (FinFET). For example, certain aspects are directed to an SRAM memory cell having a flip-flop (FF) having a pull-up (PU) transistor and a pull-down (PD) transistor, and a pass-gate (PG) transistor coupled between a bit line of the SRAM memory cell and the FF, a gate of the PG transistor being coupled to a word line (WL) of the SRAM memory cell. In certain aspects, at least one of the PU transistor, the PD transistor, or the PG transistor comprises a GAA transistor, and at least another one of the PU transistor, the PD transistor, or the PG transistor comprises a FinFET.
-
公开(公告)号:US20170040324A1
公开(公告)日:2017-02-09
申请号:US14817441
申请日:2015-08-04
发明人: Haining YANG , Yanxiang LIU
IPC分类号: H01L27/092 , H01L29/06 , H01L29/66 , H01L21/02 , H01L21/265 , H01L27/088 , H01L21/8238
CPC分类号: H01L27/0924 , H01L21/02164 , H01L21/26513 , H01L21/823821 , H01L21/823828 , H01L21/823892 , H01L21/845 , H01L27/0886 , H01L27/1211 , H01L29/0649 , H01L29/66545 , H01L29/6681 , H01L29/7845
摘要: A finFET device according to some examples herein may include an active gate element above an active fin element and a dummy fin element that partially breaks the active gate element. In another example, a dummy gate element adjacent to an active gate element contains a dummy fin element that partially breaks the dummy gate element. In another example, a first dummy fin element partially breaks an active gate element and a second dummy fin element partially breaks a dummy gate element. In another example, the dummy fin element is of the same material as the active fin element. In another example, the dummy fin element partially breaks a gate element but does not extend to the substrate like the active fin element.
摘要翻译: 根据这里的一些示例的finFET器件可以包括有源鳍元件上方的有源栅极元件和部分地断开有源栅极元件的虚设鳍元件。 在另一示例中,与有源栅极元件相邻的伪栅极元件包含部分地断开伪栅极元件的虚设鳍元件。 在另一个示例中,第一虚拟翅片元件部分地中断有源栅极元件,并且第二虚设鳍元件部分地断开伪栅极元件。 在另一个示例中,虚拟翅片元件具有与活动翅片元件相同的材料。 在另一个示例中,虚拟鳍片元件部分地打破栅极元件,但是不像活性鳍片元件那样延伸到衬底。
-
公开(公告)号:US20220293513A1
公开(公告)日:2022-09-15
申请号:US17198941
申请日:2021-03-11
发明人: Xia LI , Bin YANG , Haining YANG
IPC分类号: H01L23/522 , H01L21/8234 , H02J50/05 , H01L27/06 , H01L49/02 , H01L23/528
摘要: Disclosed are examples of a device including a front side metallization portion having a front side BEOL. The device also includes a backside BEOL. The device also includes a substrate, where the substrate is disposed between the backside BEOL and the front side metallization portion. The device also includes a metal-insulator-metal (MIM) capacitor embedded in the backside BEOL.
-
公开(公告)号:US20220123101A1
公开(公告)日:2022-04-21
申请号:US17074026
申请日:2020-10-19
发明人: Xia LI , Jun YUAN , Haining YANG , Bin YANG
IPC分类号: H01L49/02 , H01L23/522
摘要: Disclosed are examples of 3D metal-insulator-metal (MIM) capacitor structures, e.g., in semiconductor packages. The disclosed 3D MIM capacitors provide high capacitance in small areas. As such, the disclosed 3D MIM capacitors may be used as decoupling capacities for high performance computing (HPC) processors.
-
公开(公告)号:US20210359108A1
公开(公告)日:2021-11-18
申请号:US16875668
申请日:2020-05-15
发明人: Haining YANG , Xia LI , Bin YANG
IPC分类号: H01L29/66 , H01L29/78 , H01L29/417 , H01L21/8234
摘要: Certain aspects of the present disclosure generally relate to a semiconductor device having an insulator region disposed on at least one edge of a semiconductor fin structure. An example semiconductor device generally includes a first semiconductor region, an insulator region, a double diffusion break, and a first gate region. The first semiconductor region comprises a first fin structure and a second fin structure separated by a cavity. The insulator region is disposed along an edge of the first fin structure. The double diffusion break is disposed adjacent to the insulator region in the cavity. The first gate region is disposed around a portion of the first fin structure.
-
公开(公告)号:US20210280722A1
公开(公告)日:2021-09-09
申请号:US16809534
申请日:2020-03-04
发明人: Haining YANG , Bin YANG , Xia LI
IPC分类号: H01L29/786 , H01L27/092 , H01L29/06 , H01L29/423 , H01L21/02 , H01L21/306 , H01L21/308 , H01L21/8238 , H01L29/66
摘要: Strained silicon transistor, such as GAA transistors, allow for both good PMOS mobility and NMOS mobility on the same substrate. In one example, a GAA circuit may include a NMOS device on a tensile strained Si channel and a PMOS device on a compressive strained SiGe channel. In another example, a GAA circuit may include a NMOS device on a strained Si channel and a PMOS device on a relaxed SiGe channel on (110) crystalline substrate.
-
公开(公告)号:US20210183852A1
公开(公告)日:2021-06-17
申请号:US16712222
申请日:2019-12-12
发明人: Xia LI , Haining YANG , Bin YANG
IPC分类号: H01L27/06 , H01L29/04 , H01L29/06 , H01L29/66 , H01L29/78 , H01L21/762 , H01L21/8238
摘要: Certain aspects of the present disclosure are directed to a semiconductor device. The semiconductor device generally includes a substrate, at least one silicon-on-insulator (SOI) transistor disposed above the substrate, a gate-all-around (GAA) transistor disposed above the substrate, and a fin field-effect transistor (FinFET) disposed above the substrate.
-
-
-
-
-
-
-
-
-