公开(公告)号：US11867646B2

公开(公告)日：2024-01-09

申请号：US18034886

申请日：2021-11-01

申请人： Rigaku Corporation

发明人： Makoto Kambe ,  Kazuhiko Omote ,  Toshifumi Higuchi ,  Tsutomu Tada ,  Hajime Fujimura ,  Masahiro Nonoguchi ,  Licai Jiang ,  Boris Verman ,  Yuriy Platonov

IPC分类号： G01N23/223

CPC分类号： G01N23/223

摘要： Provided is a total reflection X-ray fluorescence spectrometer which has high analysis sensitivity and analysis speed. The total reflection X-ray fluorescence spectrometer includes: an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the irradiation direction; a reflective optic that has an effective width in the orthogonal direction that is larger than that of the electron beam focal point, and has a curved surface in the irradiation direction; and a plurality of detectors that are arranged in a row in the orthogonal direction, and are configured to measure intensities of fluorescent X-rays emitted from the sample irradiated with primary X-rays focused by the reflective optic.

公开(公告)号：US10436723B2

公开(公告)日：2019-10-08

申请号：US15312881

申请日：2015-01-14

申请人： RIGAKU CORPORATION

发明人： Takeshi Osakabe ,  Tetsuya Ozawa ,  Kazuhiko Omote ,  Licai Jiang ,  Boris Verman ,  Yuriy Platonov

IPC分类号： G01N23/20008 ,  G21K1/04 ,  G21K1/06 ,  G02B7/00 ,  G02B27/42 ,  G02B27/09 ,  G01N23/207

摘要： Only X-rays having a specific wavelength, selected from a group of focusing X-rays diffracted from a sample, are reflected from a monochromator based on a Bragg's condition, passed through a receiving slit and detected by an X-ray detector. The monochromator is configured to be freely removable, and arranged between the sample and a focal point at which the wavelength-selected focusing X-rays diffracted from the sample are directly focused. At this time, the monochromator is moved so as to position the monochromator as close to the focal point as possible. The monochromator comprises a multilayer mirror having an internal interplanar spacing, wherein said internal interplanar spacing varies continuously from one end of the monochromator to the other end.

公开(公告)号：US11885753B2

公开(公告)日：2024-01-30

申请号：US17501378

申请日：2021-10-14

申请人： Rigaku Corporation

发明人： Kazuhiko Omote ,  Raita Hirose ,  Shuichi Kato ,  Yuriy Platonov

IPC分类号： G01N23/04

CPC分类号： G01N23/04 ,  G01N2223/30

摘要： An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.