SIC SEMICONDUCTOR DEVICE HAVING CJFET AND METHOD FOR MANUFACTURING THE SAME
    1.
    发明申请
    SIC SEMICONDUCTOR DEVICE HAVING CJFET AND METHOD FOR MANUFACTURING THE SAME 有权
    具有CJFET的SIC半导体器件及其制造方法

    公开(公告)号:US20110198612A1

    公开(公告)日:2011-08-18

    申请号:US13012123

    申请日:2011-01-24

    Abstract: A SiC semiconductor device includes: a SiC substrate made of intrinsic SiC having semi-insulating property; first and second conductive type SiC layers disposed in the substrate; an insulation separation layer made of intrinsic SiC for isolating the first conductive type SiC layer from the second conductive type SiC layer; first and second conductive type channel JFETs disposed in the first and second conductive type SiC layers, respectively. The first and second conductive type channel JFETs provide a complementary junction field effect transistor. Since an electric element is formed on a flat surface, a manufacturing method is simplified. Further, noise propagation at high frequency and current leakage at high temperature are restricted.

    Abstract translation: SiC半导体器件包括:由具有半绝缘性的本征SiC制成的SiC衬底; 设置在基板中的第一和第二导电型SiC层; 由本征SiC制成的绝缘分离层,用于将第一导电型SiC层与第二导电型SiC层隔离; 分别设置在第一和第二导电型SiC层中的第一和第二导电型沟道JFET。 第一和第二导电型沟道JFET提供互补结型场效应晶体管。 由于电气元件形成在平坦表面上,所以制造方法简单。 此外,高频下的噪声传播和高温下的电流泄漏受到限制。

    SEMICONDUCTOR DEVICE WITH JUNCTION FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD OF THE SAME
    2.
    发明申请
    SEMICONDUCTOR DEVICE WITH JUNCTION FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD OF THE SAME 有权
    具有连接场效应晶体管的半导体器件及其制造方法

    公开(公告)号:US20120080728A1

    公开(公告)日:2012-04-05

    申请号:US13248173

    申请日:2011-09-29

    Abstract: A semiconductor device with a JFET is disclosed. The semiconductor device includes a trench and a contact embedded layer formed in the trench. A gate wire is connected to the contact embedded layer, so that the gate wire is connected to an embedded gate layer via the contact embedded layer. In this configuration, it is possible to downsize a contact structure between the embedded gate layer and the gate wire.

    Abstract translation: 公开了一种具有JFET的半导体器件。 半导体器件包括形成在沟槽中的沟槽和接触嵌入层。 栅极线连接到触点嵌入层,使得栅极线经由接触嵌入层连接到嵌入式栅极层。 在这种结构中,可以减小嵌入式栅极层与栅极线之间的接触结构。

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    半导体器件及其制造方法

    公开(公告)号:US20110133211A1

    公开(公告)日:2011-06-09

    申请号:US12956152

    申请日:2010-11-30

    Abstract: A wide band gap semiconductor device having a JFET, a MESFET, or a MOSFET mainly includes a semiconductor substrate, a first conductivity type semiconductor layer, and a first conductivity type channel layer. The semiconductor layer is formed on a main surface of the substrate. A recess is formed in the semiconductor layer in such a manner that the semiconductor layer is divided into a source region and a drain region. The recess has a bottom defined by the main surface of the substrate and a side wall defined by the semiconductor layer. The channel layer has an impurity concentration lower than an impurity concentration of the semiconductor layer. The channel layer is formed on the bottom and the side wall of the recess by epitaxial growth.

    Abstract translation: 具有JFET,MESFET或MOSFET的宽带隙半导体器件主要包括半导体衬底,第一导电类型半导体层和第一导电型沟道层。 半导体层形成在基板的主表面上。 在半导体层中以半导体层被分成源极区和漏极区的方式形成凹部。 凹部具有由基板的主表面和由半导体层限定的侧壁限定的底部。 沟道层的杂质浓度低于半导体层的杂质浓度。 沟槽层通过外延生长形成在凹部的底部和侧壁上。

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    5.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20110186861A1

    公开(公告)日:2011-08-04

    申请号:US13014037

    申请日:2011-01-26

    CPC classification number: H01L29/12 H01L29/812

    Abstract: A semiconductor device having a JFET or a MESFET mainly includes a semiconductor substrate, a first conductivity type semiconductor channel layer on the substrate, a first conductivity type semiconductor layer on the channel layer, and an i-type sidewall layer on a sidewall of a recess that penetrates the semiconductor layer to divide the semiconductor layer into a source region and a drain region. The semiconductor layer has an impurity concentration greater than an impurity concentration of the channel layer. The semiconductor device further includes a second conductivity type gate region that is located on the channel layer in the recess and on the i-type sidewall layer. The gate region is spaced from the source region and the drain region by the i-type sidewall layer.

    Abstract translation: 具有JFET或MESFET的半导体器件主要包括半导体衬底,衬底上的第一导电类型半导体沟道层,沟道层上的第一导电类型半导体层以及凹槽侧壁上的i型侧壁层 其穿透半导体层以将半导体层分成源极区和漏极区。 半导体层的杂质浓度大于沟道层的杂质浓度。 半导体器件还包括位于凹槽中和i型侧壁层上的沟道层上的第二导电型栅极区域。 栅极区域通过i型侧壁层与源极区域和漏极区域间隔开。

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