Coating apparatus with pattern width control
    1.
    发明授权
    Coating apparatus with pattern width control 失效
    涂装设备图案宽度控制

    公开(公告)号:US5316219A

    公开(公告)日:1994-05-31

    申请号:US910670

    申请日:1992-07-08

    CPC分类号: B05B13/0431 H05K3/0091

    摘要: An apparatus for manipulating a spray device having a spray nozzle relative to a target substrate, which apparatus includes drive mechanisms for moving the spray device in the X, Y and Z directions, and separate mechanisms for rotating the spray nozzle relative to the spray device and for tilting the spray nozzle relative to the spray device and including a pressure regulator to vary the width of the spray pattern as the spray device moves relative to the target substrate.

    摘要翻译: 一种用于操纵具有相对于目标衬底的喷嘴的喷射装置的装置,该装置包括用于在X,Y和Z方向上移动喷射装置的驱动机构,以及用于相对于喷雾装置旋转喷嘴的分离机构, 用于相对于喷雾装置倾斜喷嘴并且包括压力调节器以随着喷射装置相对于目标基板移动而改变喷射图案的宽度。