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公开(公告)号：US5493177A
公开(公告)日：1996-02-20
申请号：US143220
申请日：1993-10-26
IPC分类号： G01J3/10 , G01P15/08 , G03F7/00 , H01J3/00 , H01J5/00 , H01J9/02 , H01J21/10 , H01J61/30 , H01K1/04 , H01K1/12 , H01K1/28 , H01K3/00 , H01K7/04 , H01K13/00 , H01K1/50
CPC分类号： G01J3/108 , G01P15/0894 , G03F7/00 , H01J21/105 , H01J3/00 , H01J5/00 , H01J61/30 , H01J9/02 , H01K1/04 , H01K1/12 , H01K1/28 , H01K13/00 , H01K3/00 , H01K7/04
摘要： A surface and/or bulk micromachined hermetically sealed cavity containing at least one suspended structure in a low pressure ambient, and the associated fabrication method. The cavity is bounded by a thin-film membrane and a substrate which may have a recess. The method can be used for the production, for example, of thermionic-emission vacuum tubes, gas filled tubes and electromechanical devices. In vacuum tubes the cathode is a suspended refractory filament. Other electrodes may also be suspended. In electromechanical devices the suspended members may be cantilever beams capable of low friction motion.
摘要翻译： 在低压环境中包含至少一个悬挂结构的表面和/或体积微加工的气密腔，以及相关的制造方法。 空腔由可能具有凹部的薄膜膜和基底界定。 该方法可用于生产例如热离子发射真空管，充气管和机电装置。 在真空管中，阴极是悬浮的耐火长丝。 其他电极也可以被悬挂。 在机电装置中，悬挂构件可以是能够低摩擦运动的悬臂梁。
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公开(公告)号：US5285131A
公开(公告)日：1994-02-08
申请号：US621678
申请日：1990-12-03
IPC分类号： G01J3/10 , G01P15/08 , G03F7/00 , H01J9/02 , H01J21/10 , H01J61/30 , H01K1/04 , H01K1/12 , H01K1/28 , H01K3/00 , H01K7/04 , H01K13/00 , H01K1/02 , H01K1/50
CPC分类号： H01J9/02 , G01J3/108 , G01P15/0894 , G03F7/00 , H01J21/105 , H01J61/30 , H01K1/04 , H01K1/12 , H01K1/28 , H01K13/00 , H01K3/00 , H01K7/04
摘要： A microlamp including a polysilicon filament coated with a protective layer and enclosed by a window in a vacuum-sealed cavity.
摘要翻译： 包括涂覆有保护层并由真空密封空腔中的窗户包围的多晶硅细丝的微型灯。
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3.发明申请公开(公告)号：US20090322365A1
公开(公告)日：2009-12-31
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01R31/02
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译： 本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。 监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于将电位施加到梳齿驱动器以移位梭子的结构，用于测量来自该对的电位的结构 梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。 每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。 梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。
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公开(公告)号：US4849695A
公开(公告)日：1989-07-18
申请号：US259128
申请日：1988-10-18
IPC分类号： G01R33/06 , H01L27/22 , H03K19/0175
CPC分类号： G01R33/06 , H01L27/22 , H03K19/017545
摘要： An integrated-circuit one-way isolation-coupler for a controlling electrical circuit and a controlled electrical circuit and improvements in carrier-domain magnetometers and other applications thereof. In the isolator a magnetic-field source, such as a flat coil, produces a magnetic field from current applied from the controlling circuit, while a detector such as a carrier-domain-magnetometer detects the magnetic field so produced and produces a signal therefrom. A dielectric medium, such as silicon dioxide or silicon nitride separates the source from the detector. The source, the detector, and the dielectric medium, are all incorporated on a single IC chip, such as silicon, or gallium arsenide, or semiconductor material. An amplifier may also be incorporated and may deliver the amplified signal to the controlled circuit. Preferably there are two carrier-domain-magnetometers located so that they are symmetrical with respect to the flat coil.
摘要翻译： 一种用于控制电路和受控电路的集成电路单向隔离耦合器，以及载波磁强计及其它应用的改进。 在隔离器中，诸如扁平线圈的磁场源由来自控制电路的电流产生磁场，而诸如载流子域磁强计之类的检测器检测如此产生的磁场并从其产生信号。 诸如二氧化硅或氮化硅的介电介质将源与检测器分离。 源，检测器和电介质都被并入单个IC芯片，例如硅或砷化镓或半导体材料。 还可以并入放大器，并且可以将放大的信号传送到受控电路。 优选地，存在两个载流子域磁强计，使得它们相对于扁平线圈对称。
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公开(公告)号：US4816125A
公开(公告)日：1989-03-28
申请号：US217826
申请日：1988-08-19
申请人： Richard S. Muller , Eun S. Kim
发明人： Richard S. Muller , Eun S. Kim
CPC分类号： H04R19/005 , H04R17/00 , Y10T29/49005
摘要： A miniature diaphragm pressure transducer. A thin diaphragm of silicon nitride has an upper face covered by a zinc-oxide piezoelectric film encapsulated in chemical vapor deposited silicon dioxide. A series of annular, basically conentric, polysilicon electrodes are provided in the silicon dioxide between the piezoelectric film and the diaphragm and in contact with the piezoelectric film. A series of annular, basically concentric, aluminum electrodes are on the opposite side of the piezoelectric film from the polysilicon electrodes and are aligned with the polysilicon electrodes; they lie over the silicon dioxide, and are in contact with the piezoelectric film.
摘要翻译： 微型隔膜压力传感器。 氮化硅的薄膜具有被封装在化学气相沉积二氧化硅中的氧化锌压电薄膜覆盖的上表面。 在压电膜和膜片之间的二氧化硅中设置有一系列环形，基本上是中心的多晶硅电极，并与压电膜接触。 一系列环形，基本同心的铝电极位于压电薄膜与多晶硅电极相反的一侧，并与多晶硅电极对准; 它们位于二氧化硅上，并与压电膜接触。
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公开(公告)号：US4740410A
公开(公告)日：1988-04-26
申请号：US55027
申请日：1987-05-28
申请人： Richard S. Muller , Longsheng Fan , Yu C. Tai
发明人： Richard S. Muller , Longsheng Fan , Yu C. Tai
IPC分类号： B23P11/00 , B23P15/00 , B29C67/00 , G03F7/00 , H01H1/00 , H01L21/306 , B44C1/22 , C03C15/00 , C23F1/02
CPC分类号： B81C1/00198 , B23P11/00 , B23P15/00 , B23P15/003 , B29C67/00 , G03F7/00 , H01H1/0036 , B81B2201/035 , Y10T428/12368 , Y10T428/1241 , Y10T428/24289 , Y10T428/24331 , Y10T428/24628
摘要： A method and the product resulting from the method, for making a microminiature structure with two or more members measuring less than 1000 micrometers in any linear dimension and relatively movable to each other, comprising the steps of (a) providing a first sacrificial coating over a substrate having openings therethrough to expose a portion of the substrate, (b) depositing a first structural layer over the first sacrificial coating and the exposed portion of the substrate, with openings therethrough to expose a second portion of the substrate, (c) providing a second sacrificial coating over the second exposed portion of the substrate and said first structural layer, with openings through both the first and second sacrificial layers to expose a third portion of the substrate, (d) adding a second structural layer thereover and defining it, (e) possibly adding alternately other sacrificial coatings and other structural layers, and (f) etching the first and second and other sacrificial layers to remove them completely so that the two or more structural layers become movable relative to each other.
摘要翻译： 一种方法和由该方法产生的产品，用于制造具有两个或多个在任何线性尺寸上测量小于1000微米并且彼此相对移动的两个或更多个构件的微型结构，包括以下步骤：（a）提供第一牺牲涂层， 衬底，其具有穿过其中的开口以暴露所述衬底的一部分，（b）在所述第一牺牲涂层和所述衬底的所述暴露部分上沉积第一结构层，所述第一结构层与所述衬底的所述暴露部分之间形成开口，以暴露所述衬底的第二部分，（c） 第二牺牲涂层位于衬底和所述第一结构层的第二暴露部分上，具有穿过第一和第二牺牲层的开口以暴露衬底的第三部分，（d）在其上添加第二结构层并限定其， e）可能交替地添加其它牺牲涂层和其它结构层，以及（f）蚀刻第一和第二和其它牺牲层 以完全移除它们，使得两个或更多个结构层相对于彼此可移动。
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7.发明授权Optical switch using frequency-based addressing in a microelectromechanical systems array 有权在微机电系统阵列中使用基于频率寻址的光开关公开(公告)号：US07656568B2
公开(公告)日：2010-02-02
申请号：US11436231
申请日：2006-05-17
申请人： Hyuck Choo , Richard S. Muller
发明人： Hyuck Choo , Richard S. Muller
CPC分类号： H01H1/0036 , G02B6/353 , G02B6/3552 , G02B6/356 , G02B6/3566 , G02B6/3568 , G02B6/358 , G02B6/3584 , G02B26/04
摘要： Embodiments of the present invention provide structures for microelectromechanical systems (MEMS) that can be sensed, activated, controlled or otherwise addressed or made to respond by the application of forcing functions. In particular, an optical shutter structure suitable for use in an optical switch arrangement is disclosed. In one embodiment, an optical shutter or switch can be scaled and/or arranged to form arbitrary switch, multiplexer and/or demultiplexer configurations. In another embodiment of the present invention, an optical switch can include: a shutter; and a flexure coupled to the shutter, whereupon a vibration transmitted to the flexure when in the presence of a resonant frequency causes the shutter to move across an opening for the passage of an optical signal.
摘要翻译： 本发明的实施例提供了用于微机电系统（MEMS）的结构，其可被感测，激活，控制或以其他方式被寻址或通过施加强制功能来做出响应。 特别地，公开了适用于光开关装置的光闸结构。 在一个实施例中，光学快门或开关可以被缩放和/或布置成形成任意的开关，多路复用器和/或解复用器配置。 在本发明的另一实施例中，光开关可以包括：快门; 以及耦合到快门的挠曲件，于是当存在谐振频率时传递到挠曲件的振动导致快门移动穿过开口以使光信号通过。
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公开(公告)号：US07079299B1
公开(公告)日：2006-07-18
申请号：US09584835
申请日：2000-05-31
IPC分类号： G02B26/08
CPC分类号： B81C1/00182 , B81B2201/042 , B81B2203/0136 , B81C2201/0178 , B81C2203/032 , G02B26/0841
摘要： A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.
摘要翻译： 交错的扭转静电梳状驱动器包括固定的组合组件和具有反射镜和扭转铰链的移动梳状组件。 在梳状驱动状态期间，运动的组合组件完全位于固定的组合组件上方预定的垂直位移。 制造交错扭转静电梳齿驱动器的方法包括在第一晶片中深沟槽蚀刻静止梳组件的步骤。 第二晶片结合到第一晶片以形成包括第一晶片，氧化物层和第二晶片的夹层。 在第二晶片中形成移动的组合组件。 移动的组合组件包括反射镜和扭转铰链。 移动的组合组件通过氧化物层与第一晶片分离。 随后去除氧化物层以释放交错的扭转静电梳状驱动。
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公开(公告)号：US5945898A
公开(公告)日：1999-08-31
申请号：US657815
申请日：1996-05-31
申请人： Jack W. Judy , Richard S. Muller
发明人： Jack W. Judy , Richard S. Muller
CPC分类号： G02B26/0841 , G02B26/085 , H01H1/0036
摘要： A selectively actuatable microstructure is provided having a base, a cantilevered element supported by at least one mechanical attachment attached to the base which permits the element to change its orientation, and at least one layer of magnetically-active material placed on one or more regions of a surface of the cantilevered element. A selectively applied magnetic field can apply torque to the cantilevered element and cause it to move. A voltage source causes a Coulombic attractive force for holding the cantilevered element against movement in the presence of an applied magnetic field. A number of the selectively actuatable microstructures may be provided in an array so that each of the microstructures may be individually actuated by the selective switching of the corresponding voltage sources.
摘要翻译： 提供了一种可选择性致动的微结构，其具有底座，悬臂元件，其由附接到基座的至少一个机械附件支撑，所述至少一个机械附件允许元件改变其取向;以及至少一层磁性活性材料层放置在一个或多个 悬臂元件的表面。 选择性施加的磁场可以向悬臂元件施加扭矩并使其移动。 电压源引起库仑吸引力，以在存在施加的磁场的情况下保持悬臂元件抵抗运动。 多个可选择性致动的微结构可以以阵列形式提供，使得每个微结构可以通过选择性地切换相应的电压源来单独致动。
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10.发明授权Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers 失效集成电路单向隔离耦合器，包含一个或多个载波域磁强计
公开(公告)号：US4801883A
公开(公告)日：1989-01-31
申请号：US869581
申请日：1986-06-02
IPC分类号： G01R33/06 , H01L27/22 , H03K19/0175 , G01R33/02
CPC分类号： G01R33/06 , H01L27/22 , H03K19/017545
摘要： An integrated-circuit one-way isolation-coupler for a controlling electrical circuit and a controlled electrical circuit and improvements in carrier-domain magnetometers and other applications thereof. In the isolator a magnetic-field source, such as a flat coil, produces a magnetic field from current applied from the controlling circuit, while a detector such as a carrier-domain-magnetometer detects the magnetic field so produced and produces a signal therefrom. A dielectric medium, such as silicon dioxide or silicon nitride separates the source from the detector. The source, the detector, and the dielectric medium, are all incorporated on a single IC chip, such as silicon, or gallium arsenide, or semi-conductor material. An amplifier may also be incorporated and may deliver the amplified signal to the controlled circuit. Preferably there are two carrier domain-magnetometers located so that they are symmetrical with respect to the flat coil.
摘要翻译： 一种用于控制电路和受控电路的集成电路单向隔离耦合器，以及载波磁强计及其它应用的改进。 在隔离器中，诸如扁平线圈的磁场源由来自控制电路的电流产生磁场，而诸如载流子域磁强计之类的检测器检测如此产生的磁场并从其产生信号。 诸如二氧化硅或氮化硅的介电介质将源与检测器分离。 源，检测器和电介质都被并入单个IC芯片，例如硅或砷化镓或半导体材料。 还可以并入放大器，并且可以将放大的信号传送到受控电路。 优选地，存在两个载流子域磁强计，使得它们相对于扁平线圈对称。
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