公开(公告)号：US20090322365A1

公开(公告)日：2009-12-31

申请号：US11737532

申请日：2007-04-19

申请人： David Garmire ,  Hyuck Choo ,  Richard S. Muller ,  James Demmel ,  Sanjay Govindjee

发明人： David Garmire ,  Hyuck Choo ,  Richard S. Muller ,  James Demmel ,  Sanjay Govindjee

IPC分类号： G01R31/02

CPC分类号： H02N1/008 ,  B81C99/005 ,  G02B26/0841

摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.

摘要翻译： 本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。 监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于将电位施加到梳齿驱动器以移位梭子的结构，用于测量来自该对的电位的结构 梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。 每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。 梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

公开(公告)号：US5493177A

公开(公告)日：1996-02-20

申请号：US143220

申请日：1993-10-26

申请人： Richard S. Muller ,  Carlos H. Mastrangelo ,  Kirt R. Williams

发明人： Richard S. Muller ,  Carlos H. Mastrangelo ,  Kirt R. Williams

IPC分类号： G01J3/10 ,  G01P15/08 ,  G03F7/00 ,  H01J3/00 ,  H01J5/00 ,  H01J9/02 ,  H01J21/10 ,  H01J61/30 ,  H01K1/04 ,  H01K1/12 ,  H01K1/28 ,  H01K3/00 ,  H01K7/04 ,  H01K13/00 ,  H01K1/50

CPC分类号： G01J3/108 ,  G01P15/0894 ,  G03F7/00 ,  H01J21/105 ,  H01J3/00 ,  H01J5/00 ,  H01J61/30 ,  H01J9/02 ,  H01K1/04 ,  H01K1/12 ,  H01K1/28 ,  H01K13/00 ,  H01K3/00 ,  H01K7/04

摘要： A surface and/or bulk micromachined hermetically sealed cavity containing at least one suspended structure in a low pressure ambient, and the associated fabrication method. The cavity is bounded by a thin-film membrane and a substrate which may have a recess. The method can be used for the production, for example, of thermionic-emission vacuum tubes, gas filled tubes and electromechanical devices. In vacuum tubes the cathode is a suspended refractory filament. Other electrodes may also be suspended. In electromechanical devices the suspended members may be cantilever beams capable of low friction motion.

摘要翻译： 在低压环境中包含至少一个悬挂结构的表面和/或体积微加工的气密腔，以及相关的制造方法。 空腔由可能具有凹部的薄膜膜和基底界定。 该方法可用于生产例如热离子发射真空管，充气管和机电装置。 在真空管中，阴极是悬浮的耐火长丝。 其他电极也可以被悬挂。 在机电装置中，悬挂构件可以是能够低摩擦运动的悬臂梁。

公开(公告)号：US4849695A

公开(公告)日：1989-07-18

申请号：US259128

申请日：1988-10-18

申请人： Richard S. Muller ,  Juan I. Coicolea

发明人： Richard S. Muller ,  Juan I. Coicolea

IPC分类号： G01R33/06 ,  H01L27/22 ,  H03K19/0175

CPC分类号： G01R33/06 ,  H01L27/22 ,  H03K19/017545

摘要： An integrated-circuit one-way isolation-coupler for a controlling electrical circuit and a controlled electrical circuit and improvements in carrier-domain magnetometers and other applications thereof. In the isolator a magnetic-field source, such as a flat coil, produces a magnetic field from current applied from the controlling circuit, while a detector such as a carrier-domain-magnetometer detects the magnetic field so produced and produces a signal therefrom. A dielectric medium, such as silicon dioxide or silicon nitride separates the source from the detector. The source, the detector, and the dielectric medium, are all incorporated on a single IC chip, such as silicon, or gallium arsenide, or semiconductor material. An amplifier may also be incorporated and may deliver the amplified signal to the controlled circuit. Preferably there are two carrier-domain-magnetometers located so that they are symmetrical with respect to the flat coil.

摘要翻译： 一种用于控制电路和受控电路的集成电路单向隔离耦合器，以及载波磁强计及其它应用的改进。 在隔离器中，诸如扁平线圈的磁场源由来自控制电路的电流产生磁场，而诸如载流子域磁强计之类的检测器检测如此产生的磁场并从其产生信号。 诸如二氧化硅或氮化硅的介电介质将源与检测器分离。 源，检测器和电介质都被并入单个IC芯片，例如硅或砷化镓或半导体材料。 还可以并入放大器，并且可以将放大的信号传送到受控电路。 优选地，存在两个载流子域磁强计，使得它们相对于扁平线圈对称。

公开(公告)号：US4816125A

公开(公告)日：1989-03-28

申请号：US217826

申请日：1988-08-19

申请人： Richard S. Muller ,  Eun S. Kim

发明人： Richard S. Muller ,  Eun S. Kim

IPC分类号： C23C14/34 ,  C23C16/34 ,  H04R17/00 ,  H04R17/02 ,  H04R19/00 ,  H04R31/00

CPC分类号： H04R19/005 ,  H04R17/00 ,  Y10T29/49005

摘要： A miniature diaphragm pressure transducer. A thin diaphragm of silicon nitride has an upper face covered by a zinc-oxide piezoelectric film encapsulated in chemical vapor deposited silicon dioxide. A series of annular, basically conentric, polysilicon electrodes are provided in the silicon dioxide between the piezoelectric film and the diaphragm and in contact with the piezoelectric film. A series of annular, basically concentric, aluminum electrodes are on the opposite side of the piezoelectric film from the polysilicon electrodes and are aligned with the polysilicon electrodes; they lie over the silicon dioxide, and are in contact with the piezoelectric film.

摘要翻译： 微型隔膜压力传感器。 氮化硅的薄膜具有被封装在化学气相沉积二氧化硅中的氧化锌压电薄膜覆盖的上表面。 在压电膜和膜片之间的二氧化硅中设置有一系列环形，基本上是中心的多晶硅电极，并与压电膜接触。 一系列环形，基本同心的铝电极位于压电薄膜与多晶硅电极相反的一侧，并与多晶硅电极对准; 它们位于二氧化硅上，并与压电膜接触。

公开(公告)号：US4740410A

公开(公告)日：1988-04-26

申请号：US55027

申请日：1987-05-28

申请人： Richard S. Muller ,  Longsheng Fan ,  Yu C. Tai

发明人： Richard S. Muller ,  Longsheng Fan ,  Yu C. Tai

IPC分类号： B23P11/00 ,  B23P15/00 ,  B29C67/00 ,  G03F7/00 ,  H01H1/00 ,  H01L21/306 ,  B44C1/22 ,  C03C15/00 ,  C23F1/02

CPC分类号： B81C1/00198 ,  B23P11/00 ,  B23P15/00 ,  B23P15/003 ,  B29C67/00 ,  G03F7/00 ,  H01H1/0036 ,  B81B2201/035 ,  Y10T428/12368 ,  Y10T428/1241 ,  Y10T428/24289 ,  Y10T428/24331 ,  Y10T428/24628

摘要： A method and the product resulting from the method, for making a microminiature structure with two or more members measuring less than 1000 micrometers in any linear dimension and relatively movable to each other, comprising the steps of (a) providing a first sacrificial coating over a substrate having openings therethrough to expose a portion of the substrate, (b) depositing a first structural layer over the first sacrificial coating and the exposed portion of the substrate, with openings therethrough to expose a second portion of the substrate, (c) providing a second sacrificial coating over the second exposed portion of the substrate and said first structural layer, with openings through both the first and second sacrificial layers to expose a third portion of the substrate, (d) adding a second structural layer thereover and defining it, (e) possibly adding alternately other sacrificial coatings and other structural layers, and (f) etching the first and second and other sacrificial layers to remove them completely so that the two or more structural layers become movable relative to each other.

摘要翻译： 一种方法和由该方法产生的产品，用于制造具有两个或多个在任何线性尺寸上测量小于1000微米并且彼此相对移动的两个或更多个构件的微型结构，包括以下步骤：（a）提供第一牺牲涂层， 衬底，其具有穿过其中的开口以暴露所述衬底的一部分，（b）在所述第一牺牲涂层和所述衬底的所述暴露部分上沉积第一结构层，所述第一结构层与所述衬底的所述暴露部分之间形成开口，以暴露所述衬底的第二部分，（c） 第二牺牲涂层位于衬底和所述第一结构层的第二暴露部分上，具有穿过第一和第二牺牲层的开口以暴露衬底的第三部分，（d）在其上添加第二结构层并限定其， e）可能交替地添加其它牺牲涂层和其它结构层，以及（f）蚀刻第一和第二和其它牺牲层 以完全移除它们，使得两个或更多个结构层相对于彼此可移动。

公开(公告)号：US08079246B2

公开(公告)日：2011-12-20

申请号：US11737532

申请日：2007-04-19

申请人： David Garmire ,  Hyuck Choo ,  Richard S. Muller ,  James Demmel ,  Sanjay Govindjee

发明人： David Garmire ,  Hyuck Choo ,  Richard S. Muller ,  James Demmel ,  Sanjay Govindjee

IPC分类号： G01P21/00

CPC分类号： H02N1/008 ,  B81C99/005 ,  G02B26/0841

摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.

摘要翻译： 本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。 监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于向梳状驱动器施加电势以移位梭子的结构，用于测量来自该对的电位的结构 梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。 每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。 梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

公开(公告)号：US20070279638A1

公开(公告)日：2007-12-06

申请号：US11446552

申请日：2006-06-02

申请人： Hyuck Choo ,  Richard S. Muller ,  David Garmire ,  James W. Demmel ,  Rishi Kant

发明人： Hyuck Choo ,  Richard S. Muller ,  David Garmire ,  James W. Demmel ,  Rishi Kant

IPC分类号： G01B11/02

CPC分类号： G01B9/02069 ,  G01B9/02014 ,  G01B11/2441 ,  G01B2290/70 ,  G01J3/4532 ,  G01J9/02

摘要： In general, the invention relates to the design and fabrication of optical devices suitable for use in methods and systems associated with phase-shift interferometry.

摘要翻译： 通常，本发明涉及适用于与相移干涉测量相关联的方法和系统中的光学装置的设计和制造。

公开(公告)号：US07301177B2

公开(公告)日：2007-11-27

申请号：US10846137

申请日：2004-05-14

申请人： Behrang Behin ,  Kam Yin Lau ,  Richard S. Muller

发明人： Behrang Behin ,  Kam Yin Lau ,  Richard S. Muller

IPC分类号： H01L29/74

CPC分类号： G02B6/3566 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0816

摘要： Methods for directing an optical beam and for making an apparatus for directing an optical beam are described. One such method may include applying a first force to a plate to move the plate from a first angular orientation to a second angular orientation wherein the plate contacts a stop in the second angular orientation. A reflective portion of the plate is stopped from rotating beyond the second angular orientation. A second force can be applied between the plate and the stop to hold the plate against the stop in a plane substantially parallel to a substantially planar surface of the stop. An apparatus for directing an optical beam may be made by coupling an array of plates to a base assembly wherein each plate is movable between a first angular orientation and a second angular orientation.

摘要翻译： 描述用于引导光束和制造用于引导光束的装置的方法。 一种这样的方法可以包括将第一力施加到板以将板从第一角度定向移动到第二角度取向，其中板以第二角度定向接触止动件。 板的反射部分停止转动超过第二角度定向。 可以在板和止挡件之间施加第二力，以在基本上平行于止动件的基本上平坦的表面的平面中将板抵靠止动件。 用于引导光束的装置可以通过将板阵列耦合到基座组件来制造，其中每个板可在第一角度定向和第二角度定向之间移动。

公开(公告)号：US06897539B2

公开(公告)日：2005-05-24

申请号：US10122451

申请日：2002-04-12

申请人： Behrang Behin ,  Kam Yin Lau ,  Richard S. Muller

发明人： Behrang Behin ,  Kam Yin Lau ,  Richard S. Muller

IPC分类号： B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  H01L31/00

CPC分类号： G02B6/3566 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0816

摘要： Methods for directing an optical beam and for making an apparatus for directing an optical beam are described. One such method may include applying a first force to a plate to move the plate from a first angular orientation to a second angular orientation wherein the plate contacts a stop in the second angular orientation. A second force can be applied between the plate and the stop to hold the plate against the stop in a plane substantially parallel to a substantially planar surface of the stop. An apparatus for directing an optical beam may be made by coupling an array of plates to a base assembly wherein each plate is movable between a first angular orientation and a second angular orientation. An array of apertures may be formed in a stop assembly wherein the stop assembly is coupled to the base assembly and each aperture is positioned to contact its respective plate when the plate is in a second angular orientation.

摘要翻译： 描述用于引导光束和制造用于引导光束的装置的方法。 一种这样的方法可以包括将第一力施加到板以将板从第一角度定向移动到第二角度取向，其中板以第二角度定向接触止动件。 可以在板和止挡件之间施加第二力，以在基本上平行于止动件的基本上平坦的表面的平面中将板抵靠止动件。 用于引导光束的装置可以通过将板阵列耦合到基座组件来制造，其中每个板可在第一角度定向和第二角度定向之间移动。 孔的阵列可以形成在止动组件中，其中止动组件联接到基座组件，并且当板处于第二角度取向时，每个孔定位成与其相应的板接触。

公开(公告)号：US4783821A

公开(公告)日：1988-11-08

申请号：US125375

申请日：1987-11-25

申请人： Richard S. Muller ,  Eun S. Kim

发明人： Richard S. Muller ,  Eun S. Kim

IPC分类号： H04R17/00 ,  H04R19/00 ,  H04R7/04

CPC分类号： H04R19/005 ,  H04R17/00 ,  Y10T29/42

摘要： A miniature diaphragm pressure transducer. A thin diaphragm of silicon nitride has an upper face covered by a zinc-oxide piezoelectric film encapsulated in chemical vapor deposited silicon dioxide. A series of annular, basically concentric, polysilicon electrodes are provided in the silicon dioxide between the piezoelectric film and the diaphragm and in contact with the piezoelectric film. A series of annular, basically concentric, aluminum electrodes are on the opposite side of the piezoelectric film from the polysilicon electrodes and are aligned with the polysilicon electrodes; they lie over the silicon dioxide, and are in contact with the piezoelectric film.

摘要翻译： 微型隔膜压力传感器。 氮化硅的薄膜具有被封装在化学气相沉积二氧化硅中的氧化锌压电薄膜覆盖的上表面。 在压电膜和膜片之间的二氧化硅中提供一系列环形的，基本上同心的多晶硅电极，并与压电膜接触。 一系列环形，基本同心的铝电极位于压电薄膜与多晶硅电极相反的一侧，并与多晶硅电极对准; 它们位于二氧化硅上，并与压电膜接触。