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公开(公告)号：US08526137B2
公开(公告)日：2013-09-03
申请号：US12761394
申请日：2010-04-16
IPC分类号： G11B5/187
CPC分类号： G11B5/255 , G11B5/127 , G11B5/3106 , G11B5/3133
摘要： A magnetic head produced at low ambient temperatures that comprise a crystalline alumina layer for increasing the durability of the head is provided. According to one embodiment, a magnetic head for at least one of reading and writing data on to a magnetic data storage media. The magnetic head comprises a substrate, an at least partially crystalline alumina layer formed on the substrate, at least one of a write transducer and a read transducer formed on the substrate, and a surface for engaging the magnetic data storage media. In another embodiment, a method for forming an at least partially crystalline alumina film. The method comprises providing a substrate, and depositing alumina onto the substrate at an ambient temperature to form the at least partially crystalline alumina film.
摘要翻译： 提供了一种在低环境温度下产生的包含结晶氧化铝层以提高头部耐用性的磁头。 根据一个实施例，一种用于读取和写入数据到磁数据存储介质中的至少一个的磁头。 磁头包括衬底，形成在衬底上的至少部分结晶的氧化铝层，形成在衬底上的写换能器和读换能器中的至少一个以及用于接合磁数据存储介质的表面。 在另一个实施方案中，形成至少部分结晶的氧化铝膜的方法。 该方法包括在环境温度下提供衬底和将氧化铝沉积到衬底上以形成至少部分结晶的氧化铝膜。
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公开(公告)号：US09349395B2
公开(公告)日：2016-05-24
申请号：US13601739
申请日：2012-08-31
CPC分类号： H01J37/32825 , G11B5/3163 , H01J37/32816 , H01J37/3411 , H01J2237/334
摘要： A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.
摘要翻译： 根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底，其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。 根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。
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公开(公告)号：US20140061033A1
公开(公告)日：2014-03-06
申请号：US13601739
申请日：2012-08-31
CPC分类号： H01J37/32825 , G11B5/3163 , H01J37/32816 , H01J37/3411 , H01J2237/334
摘要： A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.
摘要翻译： 根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底，其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。 根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。
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公开(公告)号：US20110256423A1
公开(公告)日：2011-10-20
申请号：US12761394
申请日：2010-04-16
CPC分类号： G11B5/255 , G11B5/127 , G11B5/3106 , G11B5/3133
摘要： A magnetic head produced at low ambient temperatures that comprise a crystalline alumina layer for increasing the durability of the head is provided. According to one embodiment, a magnetic head for at least one of reading and writing data on to a magnetic data storage media. The magnetic head comprises a substrate, an at least partially crystalline alumina layer formed on the substrate, at least one of a write transducer and a read transducer formed on the substrate, and a surface for engaging the magnetic data storage media. In another embodiment, a method for forming an at least partially crystalline alumina film. The method comprises providing a substrate, and depositing alumina onto the substrate at an ambient temperature to form the at least partially crystalline alumina film.
摘要翻译： 提供了一种在低环境温度下产生的包含结晶氧化铝层以提高头部耐久性的磁头。 根据一个实施例，一种用于读取和写入数据到磁数据存储介质中的至少一个的磁头。 磁头包括衬底，形成在衬底上的至少部分结晶的氧化铝层，形成在衬底上的写换能器和读换能器中的至少一个以及用于接合磁数据存储介质的表面。 在另一个实施方案中，形成至少部分结晶的氧化铝膜的方法。 该方法包括在环境温度下提供衬底和将氧化铝沉积到衬底上以形成至少部分结晶的氧化铝膜。
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5.发明授权Magnetic recording head having protected reader sensors and near zero recessed write poles 有权磁记录头具有受保护的读取器传感器和接近零的凹入写入磁极公开(公告)号：US09001463B2
公开(公告)日：2015-04-07
申请号：US13601117
申请日：2012-08-31
申请人： Robert G. Biskeborn , Jason Liang , Calvin S. Lo , Andrew C. Ting
发明人： Robert G. Biskeborn , Jason Liang , Calvin S. Lo , Andrew C. Ting
IPC分类号： G11B5/265 , G11B5/29 , G11B5/255 , G11B5/31 , G11B5/39 , G11B5/008 , G11B5/187 , G11B5/48 , G11B5/60
CPC分类号： G11B5/265 , G11B5/0083 , G11B5/11 , G11B5/1871 , G11B5/255 , G11B5/29 , G11B5/3109 , G11B5/3912 , G11B5/3967 , G11B5/4893 , G11B5/60
摘要： A magnetic head according to one embodiment includes a module, the module having both read and write transducers positioned towards a media facing side of the module, wherein the read and write transducers are selected from a group consisting of piggyback read-write transducers, merged read-write transducers, interleaved read and write transducers, and an array of write transducers flanked by servo read transducers; wherein the write transducers include write poles having media facing sides with negative, zero or near-zero recession from a plane extending along the media facing side of a substrate of the module; wherein the read transducers each have at least one shield, wherein a media facing side of the at least one shield is more recessed from the plane than the write poles.
摘要翻译： 根据一个实施例的磁头包括模块，所述模块具有朝向所述模块的面向介质侧的读取和写入换能器，其中所述读取和写入换能器选自由搭载读写换能器，合并读取 写传感器，交错读和读换能器，以及伺服读取传感器侧面的写入传感器阵列; 其中所述写入换能器包括写入磁极，所述写入磁极具有面向介质的侧面，所述写入磁极从沿着所述模块的基板的面向介质的一侧延伸的平面的负的零或近零退退; 其中所述读取换能器每个都具有至少一个屏蔽件，其中所述至少一个屏蔽件的面向介质的侧面比所述写入极多于所述平面凹陷。
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6.发明申请MAGNETIC RECORDING HEAD HAVING PROTECTED READER SENSORS AND NEAR ZERO RECESSED WRITE POLES 有权具有受保护的读取器传感器和零点记录的写波导的磁记录头公开(公告)号：US20140063646A1
公开(公告)日：2014-03-06
申请号：US13601117
申请日：2012-08-31
申请人： Robert G. Biskeborn , Jason Liang , Calvin S. Lo , Andrew C. Ting
发明人： Robert G. Biskeborn , Jason Liang , Calvin S. Lo , Andrew C. Ting
CPC分类号： G11B5/265 , G11B5/0083 , G11B5/11 , G11B5/1871 , G11B5/255 , G11B5/29 , G11B5/3109 , G11B5/3912 , G11B5/3967 , G11B5/4893 , G11B5/60
摘要： A magnetic head according to one embodiment includes a module, the module having both read and write transducers positioned towards a media facing side of the module, wherein the read and write transducers are selected from a group consisting of piggyback read-write transducers, merged read-write transducers, interleaved read and write transducers, and an array of write transducers flanked by servo read transducers; wherein the write transducers include write poles having media facing sides with negative, zero or near-zero recession from a plane extending along the media facing side of a substrate of the module; wherein the read transducers each have at least one shield, wherein a media facing side of the at least one shield is more recessed from the plane than the write poles.
摘要翻译： 根据一个实施例的磁头包括模块，所述模块具有朝向所述模块的面向介质侧的读取和写入换能器，其中所述读取和写入换能器选自由搭载读写换能器，合并读取 写传感器，交错读和读换能器，以及伺服读取传感器侧面的写入传感器阵列; 其中所述写入换能器包括写入磁极，所述写入磁极具有面向介质的侧面，所述写入磁极从沿着所述模块的基板的面向介质的一侧延伸的平面的负的零或近零退退; 其中所述读取换能器每个都具有至少一个屏蔽件，其中所述至少一个屏蔽件的面向介质的侧面比所述写入极多于所述平面凹陷。
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公开(公告)号：US07883607B2
公开(公告)日：2011-02-08
申请号：US12193834
申请日：2008-08-19
IPC分类号： C23C14/34
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A method according to one embodiment includes ion milling at a first angle of greater than about 25 degrees from normal relative to a media facing side of a thin film region of a magnetic head or component thereof for recessing the thin film region at about a constant rate for films of interest of the thin film region, planes of deposition of the films being oriented about perpendicular to the media facing side; and ion milling or plasma sputtering at a second angle of less than about 25 degrees from normal relative to the media facing side of the thin film region for recessing magnetic films therein faster than insulating films therein, the second angle being smaller than the first angle.
摘要翻译： 根据一个实施例的方法包括离开正常相对于磁头或其部件的薄膜区域的介质相对侧大于约25度的第一角度的离子铣削，以以恒定速率凹陷薄膜区域 对于薄膜区域感兴趣的薄膜，膜的沉积平面定向成垂直于介质面侧; 以及相对于薄膜区域相对于介质相对侧的法线小于约25度的第二角度的离子铣削或等离子体溅射，用于比其中的绝缘膜更快地使磁性膜凹陷，第二角度小于第一角度。
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公开(公告)号：US20100047628A1
公开(公告)日：2010-02-25
申请号：US12193834
申请日：2008-08-19
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A method according to one embodiment includes ion milling at a first angle of greater than about 25 degrees from normal relative to a media facing side of a thin film region of a magnetic head or component thereof for recessing the thin film region at about a constant rate for films of interest of the thin film region, planes of deposition of the films being oriented about perpendicular to the media facing side; and ion milling or plasma sputtering at a second angle of less than about 25 degrees from normal relative to the media facing side of the thin film region for recessing magnetic films therein faster than insulating films therein, the second angle being smaller than the first angle.
摘要翻译： 根据一个实施例的方法包括离开正常相对于磁头或其部件的薄膜区域的介质相对侧大于约25度的第一角度的离子铣削，以以恒定速率凹陷薄膜区域 对于薄膜区域感兴趣的薄膜，膜的沉积平面定向成垂直于介质面侧; 以及相对于薄膜区域相对于介质相对侧的法线小于约25度的第二角度的离子铣削或等离子体溅射，用于比其中的绝缘膜更快地使磁性膜凹陷，第二角度小于第一角度。
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9.发明授权Magnetic heads having magnetic films that are more recessed than insulating films, and systems having such heads 失效具有比绝缘膜更凹陷的磁性膜的磁头以及具有这种磁头的系统公开(公告)号：US08611049B2
公开(公告)日：2013-12-17
申请号：US12975208
申请日：2010-12-21
IPC分类号： G11B5/127
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A structure according to one embodiment includes a substrate having a media facing side; and a thin film stack formed on the substrate, the thin film stack including magnetic films and insulating films, wherein the thin film stack is recessed from a plane extending along the media facing side of the substrate, wherein the magnetic films are recessed more than the insulating films, wherein the magnetic films each have a substantially flat media facing surface, wherein the insulating films each have a substantially flat media facing surface.
摘要翻译： 根据一个实施例的结构包括具有介质面向侧的基板; 以及形成在所述基板上的薄膜叠层，所述薄膜叠层包括磁性膜和绝缘膜，其中所述薄膜叠层从沿着所述基板的面向介质侧延伸的平面凹陷，其中所述磁性膜比所述 绝缘膜，其中所述磁性膜各自具有基本上平坦的介质面向表面，其中所述绝缘膜各自具有基本平坦的介质面向表面。
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10.发明申请MAGNETIC HEADS HAVING MAGNETIC FILMS THAT ARE MORE RECESSED THAN INSULATING FILMS, AND SYSTEMS HAVING SUCH HEADS 失效具有比绝缘膜更多的磁性膜的磁头和具有这种头的系统公开(公告)号：US20110090589A1
公开(公告)日：2011-04-21
申请号：US12975208
申请日：2010-12-21
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A structure according to one embodiment includes a substrate having a media facing side; and a thin film stack formed on the substrate, the thin film stack including magnetic films and insulating films, wherein the thin film stack is recessed from a plane extending along the media facing side of the substrate, wherein the magnetic films are recessed more than the insulating films, wherein the magnetic films each have a substantially flat media facing surface, wherein the insulating films each have a substantially flat media facing surface.
摘要翻译： 根据一个实施例的结构包括具有介质面向侧的基板; 以及形成在所述基板上的薄膜叠层，所述薄膜叠层包括磁性膜和绝缘膜，其中所述薄膜叠层从沿着所述基板的面向介质侧延伸的平面凹陷，其中所述磁性膜比所述 绝缘膜，其中所述磁性膜各自具有基本上平坦的介质面向表面，其中所述绝缘膜各自具有基本上平坦的介质相对表面。
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