System and method for differential etching
    1.
    发明授权
    System and method for differential etching 有权
    差分蚀刻的系统和方法

    公开(公告)号:US09349395B2

    公开(公告)日:2016-05-24

    申请号:US13601739

    申请日:2012-08-31

    IPC分类号: G11B5/31 H01J37/32

    摘要: A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.

    摘要翻译: 根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底,其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。 根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。

    SYSTEM AND METHOD FOR DIFFERENTIAL ETCHING
    2.
    发明申请
    SYSTEM AND METHOD FOR DIFFERENTIAL ETCHING 有权
    用于差异蚀刻的系统和方法

    公开(公告)号:US20140061033A1

    公开(公告)日:2014-03-06

    申请号:US13601739

    申请日:2012-08-31

    IPC分类号: C23F1/00 C23F1/08

    摘要: A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.

    摘要翻译: 根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底,其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。 根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。

    Magnetic heads having magnetic films that are more recessed than insulating films, and systems having such heads
    3.
    发明授权
    Magnetic heads having magnetic films that are more recessed than insulating films, and systems having such heads 失效
    具有比绝缘膜更凹陷的磁性膜的磁头以及具有这种磁头的系统

    公开(公告)号:US08611049B2

    公开(公告)日:2013-12-17

    申请号:US12975208

    申请日:2010-12-21

    IPC分类号: G11B5/127

    摘要: A structure according to one embodiment includes a substrate having a media facing side; and a thin film stack formed on the substrate, the thin film stack including magnetic films and insulating films, wherein the thin film stack is recessed from a plane extending along the media facing side of the substrate, wherein the magnetic films are recessed more than the insulating films, wherein the magnetic films each have a substantially flat media facing surface, wherein the insulating films each have a substantially flat media facing surface.

    摘要翻译: 根据一个实施例的结构包括具有介质面向侧的基板; 以及形成在所述基板上的薄膜叠层,所述薄膜叠层包括磁性膜和绝缘膜,其中所述薄膜叠层从沿着所述基板的面向介质侧延伸的平面凹陷,其中所述磁性膜比所述 绝缘膜,其中所述磁性膜各自具有基本上平坦的介质面向表面,其中所述绝缘膜各自具有基本平坦的介质面向表面。

    HEAD COMPRISING A CRYSTALLINE ALUMINA LAYER
    4.
    发明申请
    HEAD COMPRISING A CRYSTALLINE ALUMINA LAYER 有权
    包括结晶铝氧化铝层的头

    公开(公告)号:US20110256423A1

    公开(公告)日:2011-10-20

    申请号:US12761394

    申请日:2010-04-16

    IPC分类号: G11B5/33 C23C14/00 B05D5/00

    摘要: A magnetic head produced at low ambient temperatures that comprise a crystalline alumina layer for increasing the durability of the head is provided. According to one embodiment, a magnetic head for at least one of reading and writing data on to a magnetic data storage media. The magnetic head comprises a substrate, an at least partially crystalline alumina layer formed on the substrate, at least one of a write transducer and a read transducer formed on the substrate, and a surface for engaging the magnetic data storage media. In another embodiment, a method for forming an at least partially crystalline alumina film. The method comprises providing a substrate, and depositing alumina onto the substrate at an ambient temperature to form the at least partially crystalline alumina film.

    摘要翻译: 提供了一种在低环境温度下产生的包含结晶氧化铝层以提高头部耐久性的磁头。 根据一个实施例,一种用于读取和写入数据到磁数据存储介质中的至少一个的磁头。 磁头包括衬底,形成在衬底上的至少部分结晶的氧化铝层,形成在衬底上的写换能器和读换能器中的至少一个以及用于接合磁数据存储介质的表面。 在另一个实施方案中,形成至少部分结晶的氧化铝膜的方法。 该方法包括在环境温度下提供衬底和将氧化铝沉积到衬底上以形成至少部分结晶的氧化铝膜。

    IN SITU RADIO FREQUENCY SHIELD FOR A MAGNETIC LINEAR RECORDINGMEDIA HEAD
    6.
    发明申请
    IN SITU RADIO FREQUENCY SHIELD FOR A MAGNETIC LINEAR RECORDINGMEDIA HEAD 失效
    用于磁线性记录头的现场无线电频率屏蔽

    公开(公告)号:US20080170335A1

    公开(公告)日:2008-07-17

    申请号:US11623276

    申请日:2007-01-15

    IPC分类号: G11B5/33

    CPC分类号: G11B5/11 G11B5/008

    摘要: A read/write head for magnetic tapes configured with an in situ radio frequency (RF) shield is provided. The RF shield of the invention inhibits device elements reading data from reading RF radiation irradiated by other device elements writing data. The RF shield may be situated between the device elements of one module and the device elements of a second module. The dimensions and materials of the RF shield may be selected depending upon the operating frequencies of the head and skin depth of materials comprising the RF shield. The data cable may be bonded to device element pads of a module using ACF bonding. AFC bonding the cable to the module may allow a metal ground plane on the cable to be extended to provide additional RF shielding.

    摘要翻译: 提供了一种配置有原位射频(RF)屏蔽的磁带读/写头。 本发明的RF屏蔽禁止读取数据的装置元件读取由写入数据的其他装置元件照射的RF辐射。 RF屏蔽可以位于一个模块的设备元件和第二模块的设备元件之间。 RF屏蔽的尺寸和材料可以根据包括RF屏蔽的材料的头部和皮肤深度的工作频率来选择。 数据电缆可以使用ACF接合结合到模块的器件元件焊盘。 将电缆连接到模块的AFC可以允许电缆上的金属接地平面被延伸以提供额外的RF屏蔽。

    In situ radio frequency shield for a magnetic linear recording media head
    7.
    发明授权
    In situ radio frequency shield for a magnetic linear recording media head 失效
    用于磁性线性记录介质头的原位射频屏蔽

    公开(公告)号:US08089722B2

    公开(公告)日:2012-01-03

    申请号:US11623276

    申请日:2007-01-15

    IPC分类号: G11B5/127 G11B21/02

    CPC分类号: G11B5/11 G11B5/008

    摘要: A read/write head for magnetic tapes configured with an in situ radio frequency (RF) shield is provided. The RF shield of the invention inhibits device elements reading data from reading RF radiation irradiated by other device elements writing data. The RF shield may be situated between the device elements of one module and the device elements of a second module. The dimensions and materials of the RF shield may be selected depending upon the operating frequencies of the head and skin depth of materials comprising the RF shield. The data cable may be bonded to device element pads of a module using ACF bonding. AFC bonding the cable to the module may allow a metal ground plane on the cable to be extended to provide additional RF shielding.

    摘要翻译: 提供了一种配置有原位射频(RF)屏蔽的磁带读/写头。 本发明的RF屏蔽禁止读取数据的装置元件读取由写入数据的其他装置元件照射的RF辐射。 RF屏蔽可以位于一个模块的设备元件和第二模块的设备元件之间。 RF屏蔽的尺寸和材料可以根据包括RF屏蔽的材料的头部和皮肤深度的工作频率来选择。 数据电缆可以使用ACF接合结合到模块的器件元件焊盘。 将电缆连接到模块的AFC可以允许电缆上的金属接地平面被延伸以提供额外的RF屏蔽。

    Magnetic recording head having protected reader sensors and near zero recessed write poles
    8.
    发明授权
    Magnetic recording head having protected reader sensors and near zero recessed write poles 有权
    磁记录头具有受保护的读取器传感器和接近零的凹入写入磁极

    公开(公告)号:US09001463B2

    公开(公告)日:2015-04-07

    申请号:US13601117

    申请日:2012-08-31

    摘要: A magnetic head according to one embodiment includes a module, the module having both read and write transducers positioned towards a media facing side of the module, wherein the read and write transducers are selected from a group consisting of piggyback read-write transducers, merged read-write transducers, interleaved read and write transducers, and an array of write transducers flanked by servo read transducers; wherein the write transducers include write poles having media facing sides with negative, zero or near-zero recession from a plane extending along the media facing side of a substrate of the module; wherein the read transducers each have at least one shield, wherein a media facing side of the at least one shield is more recessed from the plane than the write poles.

    摘要翻译: 根据一个实施例的磁头包括模块,所述模块具有朝向所述模块的面向介质侧的读取和写入换能器,其中所述读取和写入换能器选自由搭载读写换能器,合并读取 写传感器,交错读和读换能器,以及伺服读取传感器侧面的写入传感器阵列; 其中所述写入换能器包括写入磁极,所述写入磁极具有面向介质的侧面,所述写入磁极从沿着所述模块的基板的面向介质的一侧延伸的平面的负的零或近零退退; 其中所述读取换能器每个都具有至少一个屏蔽件,其中所述至少一个屏蔽件的面向介质的侧面比所述写入极多于所述平面凹陷。

    Methods of ion milling for magnetic heads and systems formed thereby
    10.
    发明授权
    Methods of ion milling for magnetic heads and systems formed thereby 有权
    用于磁头的离子铣削方法和由此形成的系统

    公开(公告)号:US07883607B2

    公开(公告)日:2011-02-08

    申请号:US12193834

    申请日:2008-08-19

    IPC分类号: C23C14/34

    摘要: A method according to one embodiment includes ion milling at a first angle of greater than about 25 degrees from normal relative to a media facing side of a thin film region of a magnetic head or component thereof for recessing the thin film region at about a constant rate for films of interest of the thin film region, planes of deposition of the films being oriented about perpendicular to the media facing side; and ion milling or plasma sputtering at a second angle of less than about 25 degrees from normal relative to the media facing side of the thin film region for recessing magnetic films therein faster than insulating films therein, the second angle being smaller than the first angle.

    摘要翻译: 根据一个实施例的方法包括离开正常相对于磁头或其部件的薄膜区域的介质相对侧大于约25度的第一角度的离子铣削,以以恒定速率凹陷薄膜区域 对于薄膜区域感兴趣的薄膜,膜的沉积平面定向成垂直于介质面侧; 以及相对于薄膜区域相对于介质相对侧的法线小于约25度的第二角度的离子铣削或等离子体溅射,用于比其中的绝缘膜更快地使磁性膜凹陷,第二角度小于第一角度。