摘要:
This invention generally relates to a process for suppressing silicon self-interstitial diffusion near the substrate/epitaxial layer interface of an epitaxial silicon wafer having a heavily doped silicon substrate and a lightly doped silicon epitaxial layer. Interstitial diffusion into the epitaxial layer is suppressed by a silicon self-interstitial sink layer comprising dislocation loops.
摘要:
This invention generally relates to a process for suppressing oxygen precipitation in epitaxial silicon wafers having a heavily doped silicon substrate and a lightly N-doped silicon epitaxial layer by dissolving existing oxygen clusters and precipitates within the substrate. Furthermore, the formation of oxygen precipitates is prevented upon subsequent oxygen precipitation heat treatment.
摘要:
This invention generally relates to a process for suppressing silicon self-interstitial diffusion near the substrate/epitaxial layer interface of an epitaxial silicon wafer having a heavily doped silicon substrate and a lightly doped silicon epitaxial layer. Interstitial diffusion into the epitaxial layer is suppressed by a silicon self-interstitial sink layer comprising dislocation loops.
摘要:
This invention generally relates to a process for suppressing oxygen precipitation in epitaxial silicon wafers having a heavily doped silicon substrate and a lightly N-doped silicon epitaxial layer by dissolving existing oxygen clusters and precipitates within the substrate. Furthermore, the formation of oxygen precipitates is prevented upon subsequent oxygen precipitation heat treatment.
摘要:
This invention generally relates to a process for suppressing silicon self-interstitial diffusion near the substrate/epitaxial layer interface of an epitaxial silicon wafer having a heavily doped silicon substrate and a lightly doped silicon epitaxial layer. Interstitial diffusion into the epitaxial layer is suppressed by a silicon self-interstitial sink layer comprising dislocation loops.
摘要:
The method comprises the steps of mounting a first wafer (13) on the mounting member (12) and securing the mounting member to the hub (16) by drawing a vacuum at a first vacuum pressure through the hub; rotating the hub about the hub axis (AH), rotating a polishing pad (34) mounted on the turntable (30) about the turntable axis (at), and bringing a surface of the wafer (13) and the polishing pad into contact with each other. The wafer (16) is demounted, and the shape of the polished wafer is determined. A second vacuum pressure is selected using the information obtained. A successive wafer is polished according to the same method as the first wafer except that the second vacuum pressure is substituted for the first vacuum pressure. The second vacuum pressure is sufficient to deform the mounting member (12) thereby deform the wafer to improve the flatness and parallelism of the surfaces of the successive wafer.
摘要:
There is described a receiver of at least one radiofrequency modulated signal deriving from an antenna external to the receiver; the receiver comprises a first stage for the low noise amplification of the radiofrequency modulated signal and a demodulation stage of the above-mentioned signal. The receiver comprises a SAW filter adapted to act as a pass band filter about a predetermined frequency for the signal deriving from the first stage, a logarithmic amplifier adapted to amplify the signal deriving from the SAW filter, a peak detector of the output signal of the logarithmic amplifier, means adapted to control the gain of the first stage for the amplification of the radiofrequency modulated signal as a function of the output signal (Vopeak) of the peak detector.
摘要:
A driving circuit of a surface wave resonator (X1) is described; the resonator comprises a static capacitor (Co) and the driving circuit is adapted to supply a voltage (Vx) to the resonator. The driving circuit comprises reactive means (L3) adapted to resonate in combination with said static capacitor (Co) of the resonator at a predetermined frequency (Fo) in the initial driving period of the resonator at said voltage; the driving circuit comprises passive means (R3) adapted to determine oscillations at said predetermined frequency (Fo).
摘要:
The invention refers to an electronic system for defence against fires in forest areas and more generally for monitoring the territory. The system comprises a network of alarm stations (SA) distributed over the territory being controlled, where each alarm station (SA) is enclosed in an air-scaled mechanically-sealed protective casing and comprises at least one sensor (S1-S3), a microcontroller (MC), a transceiver (RTX) at low power radiofrequency fitted with antenna (A) and a battery (B) for the electric powering of said sensor (S1-S3), said microcontroller (MC) and said transceiver (RTX). The alarm station network (SA) is in wireless communication with at least one intermediate detection unit (CIR) in turn in communication with at least one central control station (SC) controlled by bodies authorised to control and defend the territory.
摘要:
There is described a receiver of at least one radiofrequency modulated signal deriving from an antenna external to the receiver; the receiver comprises a first stage for the low noise amplification of the radiofrequency modulated signal and a demodulation stage of the above-mentioned signal. The receiver comprises a SAW filter adapted to act as a pass band filter about a predetermined frequency for the signal deriving from the first stage, a logarithmic amplifier adapted to amplify the signal deriving from the SAW filter, a peak detector of the output signal of the logarithmic amplifier, means adapted to control the gain of the first stage for the amplification of the radiofrequency modulated signal as a function of the output signal (Vopeak) of the peak detector.