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公开(公告)号：US06398920B1
公开(公告)日：2002-06-04
申请号：US09790357
申请日：2001-02-21
IPC分类号： B01J1908
CPC分类号： H01J49/328
摘要： A filter and a method for separating ions in a partially ionized plasma according to their mass includes a chamber with crossed electric and magnetic fields established therein. A feed, including metal atoms having ionization potentials in a low range, and gas atoms having an ionization potential in a high range, is introduced into the chamber. An electron temperature below the low range is generated to partially ionize the feed by dissociating the metal atoms from the gas atoms, and by ionizing the metal atoms into light and heavy ions according to their mass to charge ratio. The light and heavy ions are then influenced by the crossed electric and magnetic fields to separate the light ions from the heavy ions.
摘要翻译： 根据其质量的用于分离部分电离等离子体中的离子的过滤器和方法包括在其中建立了交叉的电场和磁场的腔室。 将包含电离电位低范围的金属原子和高电离电位的气体原料引入室内。 产生低于低范围的电子温度，通过使金属原子与气体原子分离，并通过根据其质荷比将金属原子离子化成轻质和重离子来使进料部分离子化。 轻离子和重离子然后被交叉的电场和磁场影响，以将轻离子与重离子分离。
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公开(公告)号：US06386374B1
公开(公告)日：2002-05-14
申请号：US09860161
申请日：2001-05-17
IPC分类号： B03C130
CPC分类号： H01J49/28
摘要： A multi-mass filter for separating particles of a multi-species plasma includes a chamber, which defines an axis. A radial electric field is crossed with a magnetic field (E×B) to move the particles of different mass (M1, M2 and M3) on respective trajectories into respective first, second and third regions. Specifically, particles M1 are confined in the first region, while both particles M3 and M2 are ejected from the first region into the second region and only the particles M3 are ejected from the second region into the third region.
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公开(公告)号：US06787044B1
公开(公告)日：2004-09-07
申请号：US10385073
申请日：2003-03-10
IPC分类号： B03C100
CPC分类号： H01J49/328
摘要： A material separator includes a chamber and electrode(s) to create a radially oriented electric field in the chamber. Coils are provided to generate a magnetic field in the chamber. The separator further includes a launcher to propagate a high-frequency electromagnetic wave into the chamber to convert the material into a multi-species plasma. With the crossed electric and magnetic fields, low mass ions in the multi-species plasma are placed on small orbit trajectories and exit through the end of the chamber while high mass ions are placed on large orbit trajectories for capture at the wall of the chamber.
摘要翻译： 材料分离器包括腔室和电极，以在腔室中产生径向取向的电场。 提供线圈以在腔室中产生磁场。 分离器还包括发射器，用于将高频电磁波传播到腔室中以将材料转换成多种类的等离子体。 在交叉的电场和磁场中，多种类等离子体中的低质量离子被放置在小轨道轨迹上，并通过腔室的端部离开，同时将高质量离子放置在大轨道轨迹上以在腔室的壁处捕获。
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公开(公告)号：US06293406B1
公开(公告)日：2001-09-25
申请号：US09643204
申请日：2000-08-21
IPC分类号： B03C130
CPC分类号： H01J49/28
摘要： A multi-mass filter for separating particles according to their mass-charge ratio includes a chamber for receiving a multi-species plasma that includes particles therein having different mass-charge ratios (with M1 Mc3) and only the intermediate particles M2 are ejected into the second region (M2>Mc2). In another embodiment, the radial electrical field is increased outwardly from the axis to a radial distance a2 (r2) at a first rate. The electrical field is then increased radially outward between a2 (r2) and a radial distance a3 (r3) at a lower rate. This electric field configuration defines the first region between the axis and a2 (r2), and the second region between a2 (r2) and a3 (r3). The third region is located radially beyond the second region. Accordingly, with Mc2=er22B2/(8*(Vctr−V2)) and Mc3=e(r32−r22)B2/(8*V2), particles M1 are confined in the first region, while both particles M3 and M2 are ejected from the first region into the second region. The particles M2 are, however, confined in the second region and only the particles M3 are ejected from the second region into the third region.
摘要翻译： 用于根据其质荷比分离颗粒的多质量过滤器包括用于接收多种等离子体的室，其包括具有不同质荷电荷的颗粒（M1
Mc3）中，并且仅中间颗粒M2被喷射到第二区域（M2> Mc2）中。 在另一个实施例中，径向电场以第一速率从轴向外增加到径向距离a2（r2）。 然后电场以较低的速率在a2（r2）和径向距离a3（r3）之间径向向外增加。 该电场配置定义了轴和a2（r2）之间的第一区域，a2（r2）和a3（r3）之间的第二区域。 第三区域径向地位于第二区域之外。 因此，在Mc2 = er22B2 /（8 *（Vctr-V2））和Mc3 = e（r32-r22）B2 /（8 * V2）的情况下，粒子M1被限制在第一区域，同时弹出两个粒子M3和M2 从第一个地区进入第二个地区。 然而，颗粒M2被限制在第二区域中，并且仅颗粒M3从第二区域喷射到第三区域中。 -
公开(公告)号：US06251282B1
公开(公告)日：2001-06-26
申请号：US09456795
申请日：1999-12-08
IPC分类号： B03C100
CPC分类号： B03C1/023 , B03C1/288 , H01J49/328
摘要： A plasma mass filter using a helical magnetic field for separating low-mass particles from high-mass particles in a multi-species plasma includes a cylindrical outer wall located at a distance “a” from a longitudinal axis. Also included is a coaxial cylindrical inner wall positioned to establish a plasma chamber between the inner and outer walls. The magnetic field is generated in this chamber with an axial component (Bz) and an azimuthal component (B&thgr;), which interact together with an electric field to create crossed magnetic and electric fields. The electric field has a positive potential, Vctr, on the inner wall and a zero potential on the outer wall. With these crossed magnetic and electric fields, a multi-species plasma is moved through the chamber with a velocity, vz, high-mass particles in the plasma (M2) are ejected into the outer wall and low-mass particles (M1) are confined in the chamber during transit of the chamber to separate the low-mass particles from the high-mass particles, where M1
摘要翻译： 使用螺旋磁场的等离子体质量过滤器用于从多质量等离子体中的高质量粒子分离低质量粒子包括位于距纵向轴线“a”的圆柱形外壁。 还包括定位成在内壁和外壁之间建立等离子体室的同轴圆柱形内壁。 在该腔室中产生具有轴向分量（Bz）和方位角分量（Btheta）的磁场，其与电场相互作用以产生交叉的磁场和电场。 电场在内壁上具有正电位Vctr，在外壁上具有零电位。 通过这些交叉的磁场和电场，多品种等离子体以等离子体（M2）中的速度，vz，高质量粒子的速度被移动通过室，并且低质量粒子（M1）被限制 在室内运送期间，将低质量颗粒与高质量颗粒分离，其中M1
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公开(公告)号：US06356025B1
公开(公告)日：2002-03-12
申请号：US09678646
申请日：2000-10-03
IPC分类号： H01J724
CPC分类号： H01J37/32082 , H01J37/32559 , H01J37/32633 , H05H1/46 , Y10S422/906
摘要： A device for generating a plasma includes an enclosed chamber and an antenna positioned adjacent the wall of the chamber. A ceramic shield is mounted on the wall, with the antenna located between the wall and the ceramic shield. There is also a barrier that is mounted on the wall with the ceramic shield being between the barrier and the antenna element. An alternating voltage source is provided to energize the antenna element to generate a plasma in the chamber. In operation, the ceramic shield isolates the antenna from the plasma in the chamber, and the barrier prevents the deposition of material components from the plasma on the ceramic shield.
摘要翻译： 用于产生等离子体的装置包括封闭室和邻近室的壁定位的天线。 陶瓷屏蔽安装在墙壁上，天线位于墙壁和陶瓷屏蔽之间。 还有一个屏障被安装在墙壁上，陶瓷屏蔽层位于屏障和天线元件之间。 提供交流电压源以激励天线元件以在腔室中产生等离子体。 在操作中，陶瓷屏蔽将天线与腔室中的等离子体隔离，并且屏障防止材料组分从陶瓷屏蔽上的等离子体沉积。
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公开(公告)号：US06304036B1
公开(公告)日：2001-10-16
申请号：US09634926
申请日：2000-08-08
IPC分类号： H05H146
CPC分类号： H01J37/3211 , H01J37/321 , H05H1/46
摘要： A system and method for initiating and maintaining a plasma in a chamber, in accordance with the helicon dispersion relation, requires an antenna for radiating RF energy into the chamber. An interferometer, or some similar device, is used in the system to monitor the plasma density level in the chamber, as the plasma is being produced. The plasma density level is then used to control the variable characteristics of the RF energy in accordance with the helicon dispersion relation.
摘要翻译： 根据螺旋色散关系，用于启动和维持室中的等离子体的系统和方法需要用于将RF能量辐射到室中的天线。 在制造等离子体时，系统中使用干涉仪或一些相似的装置来监测腔室中的等离子体密度水平。 然后使用等离子体密度水平根据螺旋桨色散关系来控制RF能量的可变特性。
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公开(公告)号：US4564807A
公开(公告)日：1986-01-14
申请号：US593801
申请日：1984-03-27
申请人： Hiroyuki Ikezi , Richard L. Freeman
发明人： Hiroyuki Ikezi , Richard L. Freeman
CPC分类号： G01R31/2831
摘要： A method for judging whether a group of semiconductor devices have sufficiently short carrier lifetimes to make them suitable for use in high speed electronic circuitry. A determination is made as to the satisfactory carrier lifetime for a pn junction in the devices. A capacitance value representative of the pn junction, when reverse biased, is also determined. The pn junction is placed in series with an inductor sized so that the resonant frequency of the inductor and the pn junction, when reversely biased, is substantially equal to the reciprocal of the carrier lifetime. An oscillating voltage is applied to the series combination of the junction and the inductor, the voltage having a fundamental frequency near but above the resonant frequency and an amplitude greater than a predetermined level which is in the range of 3-5 volts. Finally, the device under test is rejected should an output taken across the pn junction show a substantial frequency component below the fundamental frequency.
摘要翻译： 一种用于判断一组半导体器件是否具有足够短的载波寿命以使其适合用于高速电子电路的方法。 确定器件中的pn结的令人满意的载流子寿命。 当确定反向偏置时，表示pn结的电容值也被确定。 pn结与电感器串联布置，使得当反向偏置时，电感器和pn结的谐振频率基本上等于载波寿命的倒数。 振荡电压施加到结和电感器的串联组合，电压具有接近但高于谐振频率的基频，并且幅度大于3-5伏范围内的预定电平。 最后，如果穿过pn结的输出显示低于基频的实质频率分量，则被测器件被拒绝。
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