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公开(公告)号:US4942767A
公开(公告)日:1990-07-24
申请号:US360325
申请日:1989-06-02
IPC分类号: H04R23/00
CPC分类号: H04R23/008
摘要: A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.
摘要翻译: 微加工膜片位于与光纤端部的间隙上。 光纤和隔膜一体安装。 光纤的端部提供了一个局部参考平面,它将穿过光纤的光分成隔膜。 光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。 两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。 干涉图形提供了膜片偏转的指示,作为横跨隔膜的暴露侧的施加压力的函数。 通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。 第二光纤以与第一光纤相同的方式提供干涉图案,但是具有相移。 允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。
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公开(公告)号:US4926696A
公开(公告)日:1990-05-22
申请号:US932780
申请日:1986-11-19
IPC分类号: H04R23/00
CPC分类号: G01L9/0079 , H04R23/008
摘要: A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.
摘要翻译: 薄隔膜承受一侧的压力,并面对另一侧的分束器。 分束器一体地附接到隔膜,并用作整个组件的局部光学参考平面。 来自光源的相干光部分地在分束器处反射。 剩余的光从隔膜反射。 反射光束在检测点复合,并具有作为光阑偏转量的函数的相位差。 检测到的重组光束表示膜片的偏转。 组件的光学校准是隔膜和分束器之间的距离的函数,其保持为预定义,因为分束器与隔膜成一体。 在隔膜和分束器之间形成的小空腔中的通风口使得隔膜能够以更高的灵敏度感测小压力。 通过微型制造技术,膜片对动态和静态压力敏感。 检测组件的热膨胀以及隔膜的偏转使得能够将检测到的压力测量作为检测到的热膨胀和挠曲之间的差。
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公开(公告)号:US09102209B2
公开(公告)日:2015-08-11
申请号:US13534800
申请日:2012-06-27
IPC分类号: B60G17/0165
CPC分类号: B60G17/0165 , B60G2400/821 , B60G2600/182 , B60G2800/164
摘要: A vehicle suspension and wheel damper using anti-causal filtering. Information from in front of a wheel or information about an operating condition of a vehicle is used to anti-causally determine a response of an active suspension associated with the wheel.
摘要翻译: 一种使用反因果过滤的车辆悬架和车轮阻尼器。 使用来自车轮前方的信息或关于车辆的操作状况的信息来反向地确定与车轮相关联的主动悬架的响应。
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公开(公告)号:US20140136048A1
公开(公告)日:2014-05-15
申请号:US13676582
申请日:2012-11-14
IPC分类号: G01P21/00
CPC分类号: G01P21/00
摘要: In an aspect, in general, a system and method compensate for a misalignment characteristic of one or more acceleration sensors fixed to a sprung mass of a vehicle, each acceleration sensor having a location on the vehicle and a desired orientation relative to the vehicle.
摘要翻译: 在一方面,一般来说,系统和方法补偿固定在车辆弹簧质量上的一个或多个加速度传感器的不对准特性,每个加速度传感器具有车辆上的位置和相对于车辆的期望取向。
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公开(公告)号:US08938333B2
公开(公告)日:2015-01-20
申请号:US13534808
申请日:2012-06-27
申请人: Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
发明人: Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
IPC分类号: B60G17/0165
CPC分类号: B60G17/0165 , B60G2400/821 , B60G2400/91 , B60G2600/182 , B60G2800/162
摘要: An active wheel damper. An active suspension damps vertical displacement of an unsprung mass in a frequency range and reduces vertical displacement of a sprung mass in another frequency range.
摘要翻译: 主动轮阻尼器。 一个主动悬架可以抑制簧下质量在频率范围内的垂直位移,并减少弹簧质量在另一个频率范围内的垂直位移。
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公开(公告)号:US20140001717A1
公开(公告)日:2014-01-02
申请号:US13534800
申请日:2012-06-27
IPC分类号: B60G17/0165
CPC分类号: B60G17/0165 , B60G2400/821 , B60G2600/182 , B60G2800/164
摘要: A vehicle suspension and wheel damper using anti-causal filtering. Information from in front of a wheel or information about an operating condition of a vehicle is used to anti-causally determine a response of an active suspension associated with the wheel.
摘要翻译: 一种使用反因果过滤的车辆悬架和车轮阻尼器。 使用来自车轮前方的信息或关于车辆的操作状况的信息来反向地确定与车轮相关联的主动悬架的响应。
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公开(公告)号:US06704339B2
公开(公告)日:2004-03-09
申请号:US10233253
申请日:2002-08-30
申请人: Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
发明人: Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
IPC分类号: H01S3101
CPC分类号: H01S3/005 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要: The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.
摘要翻译: 本发明提供一种用于生产线机器的模块化高重复率紫外线气体放电激光源。 该系统包括具有光束指向控制的封闭和清除的光束路径,用于将激光束传送到期望的位置,例如生产线机器的入口。 在优选实施例中,生产线机器是光刻机,并且提供两个单独的放电室,其中之一是主振荡器的一部分,其产生在第二放电室中放大的非常窄的带状晶体束。 该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。 与现有技术的激光系统相比,脉冲放大器使输出脉冲长度加倍,导致脉冲功率(mJ / ns)的降低。 该优选实施例能够在光刻系统晶片平面处提供照明,其在光刻系统的整个使用寿命期间大致恒定,尽管光学部件的实质性劣化。
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公开(公告)号:US06563128B2
公开(公告)日:2003-05-13
申请号:US10074059
申请日:2002-02-11
IPC分类号: G01N2186
CPC分类号: F16F15/02 , F16F15/005 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70825 , G03F7/70833 , G03F7/709
摘要: A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.
摘要翻译: 提供用于控制受控结构的运动的基本稳定系统的系统。 该系统包括诸如制造设备的底板的接地结构,并且受控结构包括安装设备的基座。 该系统还包括至少三个空气支架和多个致动器,所述致动器全部附接到地面结构和底座以将基座与地面结构隔离并稳定基座。 该系统包括多个位置和加速度传感器,每个位置和加速度传感器与相应的致动器共同定位。 该系统还包括多输入多输出反馈控制系统,其包括用基于来自每个传感器的反馈信号控制每个致动器的反馈控制算法编程的计算机处理器。 传感器与执行器的共同位置避免了由较高阶振动模式引起的严重问题。
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公开(公告)号:US06872961B2
公开(公告)日:2005-03-29
申请号:US10112443
申请日:2002-03-29
IPC分类号: B23P19/033 , F16F15/00 , F16F15/02 , F16F15/027 , G03F7/20 , G05D19/02 , G01N21/86 , F16M13/00
CPC分类号: G03F7/709 , F16F15/005 , F16F15/02 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70833 , G05D19/02 , Y10T29/5313 , Y10T29/53174
摘要: A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration. A recursive least squares (RLS) method is used to identify the commanded motion from the laser interferometer signals. Vibration measurements are derived from the laser interferometer signals by removing the commanded motion portion of the signal.
摘要翻译: 一种用于减少运动部件振动的运动控制系统。 该系统包括位置控制驱动和振动控制驱动。 使用至少一个位置传感器来提供反馈信号,反馈信号又用于为位置控制驱动器和振动控制驱动器提供控制信号。 在优选实施例中,运动控制系统被应用于集成电路光刻步骤和扫描机的阶段。 位置控制驱动器是线性磁致动器,振动控制驱动器是电陶瓷致动器。 激光干涉仪位置监测系统用于测量舞台系统的位置,速度和加速度。 执行器将受控力(基于位置监控系统的测量)施加到每个阶段以控制舞台的运动。 来自干涉仪位置系统的信号也用于控制振动。 使用递归最小二乘法(RLS)方法来识别来自激光干涉仪信号的命令运动。 通过去除信号的指令运动部分,从激光干涉仪信号得到振动测量值。
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公开(公告)号:US20140005888A1
公开(公告)日:2014-01-02
申请号:US13534808
申请日:2012-06-27
申请人: Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
发明人: Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
IPC分类号: B60G17/0165
CPC分类号: B60G17/0165 , B60G2400/821 , B60G2400/91 , B60G2600/182 , B60G2800/162
摘要: An active wheel damper. An active suspension damps vertical displacement of an unsprung mass in a frequency range and reduces vertical displacement of a sprung mass in another frequency range.
摘要翻译: 主动轮阻尼器。 一个主动悬架可以抑制簧下质量在频率范围内的垂直位移,并减少弹簧质量在另一个频率范围内的垂直位移。
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